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body_diff: "[{\"diffs\":[[1,\"<html>\\\r\\\n<head>\\\r\\\n  <title>半导体中WAT介绍-今日头条</title>\\\r\\\n  <basefont face=\\\"微软雅黑\\\" size=\\\"2\\\" />\\\r\\\n  <meta http-equiv=\\\"Content-Type\\\" content=\\\"text/html;charset=utf-8\\\" />\\\r\\\n  <meta name=\\\"exporter-version\\\" content=\\\"YXBJ Windows/608924 (zh-CN, DDL); Windows/10.0.0 (Win64); EDAMVersion=V2;\\\"/>\\\r\\\n  <style>\\\r\\\n\\tbody, td {\\\r\\\n\\t  font-family: 微软雅黑;\\\r\\\n\\t  font-size: 12pt;\\\r\\\n\\t}\\\r\\\n  </style>\\\r\\\n</head>\\\r\\\n<body>\\\r\\\n<a name=\\\"26558\\\"></a>\\\r\\\n<h1>半导体中WAT介绍-今日头条</h1>\\\r\\\n\\\r\\\n<div><span style=\\\"margin:0px;\\\"><div><div style=\\\"font-size: 18px; font-family: PingFangSC-Regular; letter-spacing: 1.2px; line-height: 30px; text-align: justify;\\\"><div style=\\\"\\\"><div><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">WAT（wafer acceptable test）</span></p><div style=\\\"\\\"><img src=\\\":/9ae2b2ba15314a5480b4ea22996f1d35\\\" type=\\\"image/jpeg\\\" data-filename=\\\"959a3cf1f4e64ae88e4a26088b719769~tplv-tt-large.jpeg.jpg\\\" alt=\\\"文章图片1\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 205.078px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><h1>1.概述：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">WAT（wafer acceptable test）是一项使用特定测试机台（分自动测试机以及手动测试台）在wafer阶段对特定测试结构（testkey）进行的测量。WAT可以反应wafer流片阶段的工艺波动以及侦测产线的异常。WAT会作为wafer是否可以正常出货的卡控标准。</span></p><h1>2.1测试阶段：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">WAT测试可以分为inline WAT、Final WAT。</span></p><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">Inline WAT是在inter-metal（金属间）阶段对器件做测试。Final WAT是在wafer整个制程完成后对器件进行测试。</span></p><h1>2.2测试机台：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">WAT自动测试需要使用特定的测试机台。主要是Keithley 和 Agilent的测试机。测试机台分为测试机柜以及测试头。</span></p><div style=\\\"\\\"><img src=\\\":/b15ae1c0407247fd9e5d33470763751f\\\" type=\\\"image/jpeg\\\" data-filename=\\\"651b08b53e3b44a89485460cd6d7a343~tplv-tt-large.jpeg.jpg\\\" alt=\\\"文章图片2\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 146.562px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><h1>2.3测试板卡：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">WAT自动测试使用特定的测试板卡,通过测试头操作测试板卡进行测试。</span></p><div style=\\\"\\\"><img src=\\\":/f6829abc262c4f1695cae36e0330b8f9\\\" type=\\\"image/jpeg\\\" data-filename=\\\"9ce0bd9840e0426fbf3ed254f4121eb5~tplv-tt-large.jpeg.jpg\\\" alt=\\\"文章图片3\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 144.922px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">WAT手动测试需要使用探针台，手动将测试探针扎到相应的测试PAD上。</span></p><div style=\\\"\\\"><img src=\\\":/51134477e86f48ebaec9923f66e65c1b\\\" type=\\\"image/jpeg\\\" data-filename=\\\"2f9758dba2e44e17959d8bbecef1b08c~tplv-tt-large.image.jpg\\\" alt=\\\"文章图片4\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 228.594px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><h1>2.4测试结构：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">A. WAT是对特定的测试结构（testkey）做测试。测试结构（testkey）放置在划片槽内。由测试探针扎到测试PAD上进行测试。</span></p><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">B. 为保证测试一致性以及测试硬件的重复利用，器件结构（testkey）都是有统一的PAD数以及PAD间距。测试pattern放置在PAD间。具体的标准需要向各家FAB咨询。</span></p><div style=\\\"\\\"><img src=\\\":/1af14c4c195e47f58aabe9785366d852\\\" type=\\\"image/jpeg\\\" data-filename=\\\"b3616f62515d49088a9ead27924192e8~tplv-tt-large.jpeg.jpg\\\" alt=\\\"文章图片5\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 152.031px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><h1>2.5测试标准：</h1><div style=\\\"\\\"><img src=\\\":/0f08e86fc5e04b749de474ebf4553bbf\\\" type=\\\"image/jpeg\\\" data-filename=\\\"50bd8431dfe248c29c69c7379d1c8278~tplv-tt-large.jpeg.jpg\\\" alt=\\\"文章图片6\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 58.5156px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><div style=\\\"\\\"><img src=\\\":/673c7ec5f3424dafb9a8ffcd7a1c709b\\\" type=\\\"image/jpeg\\\" data-filename=\\\"d4754e616f87457eb874cc3910d09901~tplv-tt-large.image.jpg\\\" alt=\\\"文章图片7\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 326.484px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><h1>2.6测试项目：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">A. WAT可以测试电流/电压/电阻/电容</span></p><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">B. FAB内主要的测试项目：</span></p><div style=\\\"\\\"><img src=\\\":/5701d7dd536648baa764d675d2c10338\\\" type=\\\"image/jpeg\\\" data-filename=\\\"75299dab429b44d3bd4979a484a6410c~tplv-tt-large.jpeg.jpg\\\" alt=\\\"文章图片8\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 370.234px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><h1>2.7测试结果的分析：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">A. WAT测试项目可以分为正态分布项目和非正态分布项目。</span></p><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">B. 正态分布项目需要review Cpk，Cpk需要满足大于1.33。分布的差异来自于工艺造成的偏差。</span></p><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">C. 非正态分布项目需要分析长期测试结果的一致性以及异常离散点的原因。</span></p><div style=\\\"\\\"><img src=\\\":/4d56c46c482f4f52b476d5a1c53cb8da\\\" type=\\\"image/jpeg\\\" data-filename=\\\"986ddbc55ee1426b9d0300712afa51db~tplv-tt-large.image.jpg\\\" alt=\\\"文章图片9\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 356.016px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><div style=\\\"\\\"><img src=\\\":/aa29bf30c1c14af9beb71b65d0522ad5\\\" type=\\\"image/jpeg\\\" data-filename=\\\"c36e7ccdfb42469ca18b4964768a836f~tplv-tt-large.jpeg.jpg\\\" alt=\\\"文章图片10\\\" style=\\\"background: url(\\\"https://sf1-cdn-tos.toutiaostatic.com/obj/mp/syl-page/toutiaoicon_loading_textpage@3x.RQmcZRIc.png\\\") center center no-repeat; width: 640px; display: block; box-sizing: content-box; padding: 0px 0px 96.25px; margin: 0px 0px 8px; border: 0px none rgb(34, 34, 34);\\\"/></div><h1>3.WAT测试的意义：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">A.表征产品器件速度 B.体现工艺能力 C.监控产线工艺波动 D.监控产线工艺异常</span></p><h1>4.总结：</h1><p style=\\\"\\\"><span style=\\\"color: rgb(18, 18, 18); --tt-darkmode-color: #A3A3A3; display: inline; box-sizing: content-box; padding: 0px; margin: 0px; border: 0px none rgb(18, 18, 18);\\\">WAT在工艺开发制程阶段是工艺调整的依据。WAT在量产阶段反应的是产线工艺的波动。对于FAB来说，WAT是重要的监控手段。对于设计来说，WAT是验证设计的重要参数。分析利用好WAT对于产品验证以及量产维护都有重要的意义。</span></p></div></div></div></div></span>\\\n</div></body></html>\\u0000\"]],\"start1\":0,\"start2\":0,\"length1\":0,\"length2\":9364}]"
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updated_time: 2025-11-28T21:04:09.878Z
created_time: 2025-11-28T21:04:09.878Z
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