640 [57].png

id: ed15df46a4d44fd79fc1e2d91aa4cb1d
mime: image/png
filename: 
created_time: 2025-11-28T16:58:23.204Z
updated_time: 2025-11-30T12:36:43.638Z
user_created_time: 2025-11-28T16:58:23.204Z
user_updated_time: 2025-11-30T12:36:43.638Z
file_extension: png
encryption_cipher_text: 
encryption_applied: 0
encryption_blob_encrypted: 0
size: 323376
is_shared: 0
share_id: 
master_key_id: 
user_data: 
blob_updated_time: 1764349103204
ocr_text: Strained Si MOSFET Technology\nRIM rl: DEEP SUBMICRON STRAINED.Si N-MOSFET's\n. ea . IEEE TRANS. ON ELECTRON DEVICES, 47, 1406, JULY 2000\n» The strain leads to an energy splitting of the Si s —— J\n» It lifts the six fold degeneracy in the conduction band and a tension Ef) SI, Ge,\nlowers the two perpendicular valleys (labeled A) with respect == 10.0420\nto the four in-plane valleys. (8) equilibrium lattices (b) pasudomorphic\nstrained Si on relaxed Si, Go_\n» Electrons are expected to preferentially occupy the\nlower-energy valleys, reducing the effective in-plane Apart (1)\nE,\n©\n» The energy splitting also suppresses intervalley m= = 3 =\nphonon-carrier scattering, increasing the electron low- 75\nfield mobility. on. (AE ~ 670: meV)\nin-plane\nA, valleys\n(¢) biaxial tensile strain-induced Eg splitting in Si
ocr_details: [{"words":[{"t":"Strained","bb":[80,217,38,64],"bl":[80,217,64,64]},{"t":"Si","bb":[234,261,39,64],"bl":[234,261,64,64]},{"t":"MOSFET","bb":[279,416,39,64],"bl":[279,416,64,64]},{"t":"Technology","bb":[426,614,38,71],"bl":[426,614,64,64]}]},{"words":[{"t":"RIM","bb":[678,697,95,102],"bl":[678,697,100,102]},{"t":"rl:","bb":[701,720,95,102],"bl":[701,720,102,102]},{"t":"DEEP","bb":[729,755,95,102],"bl":[729,755,102,101]},{"t":"SUBMICRON","bb":[759,795,95,102],"bl":[759,795,101,102]},{"t":"STRAINED.Si","bb":[800,889,95,102],"bl":[800,889,102,102]},{"t":"N-MOSFET's","bb":[894,954,95,102],"bl":[894,954,102,102]}]},{"words":[{"t":".","bb":[141,145,124,127],"bl":[141,145,123,123]},{"t":"ea","bb":[419,448,124,127],"bl":[419,448,123,123]},{"t":".","bb":[574,578,124,127],"bl":[574,578,123,123]},{"t":"IEEE","bb":[643,674,113,123],"bl":[643,674,123,123]},{"t":"TRANS.","bb":[683,735,108,131],"bl":[683,735,123,123]},{"t":"ON","bb":[739,760,113,123],"bl":[739,760,123,123]},{"t":"ELECTRON","bb":[766,845,113,123],"bl":[766,845,123,123]},{"t":"DEVICES,","bb":[852,943,113,124],"bl":[852,943,123,123]},{"t":"47,","bb":[924,944,108,131],"bl":[924,944,123,123]},{"t":"1406,","bb":[950,983,112,125],"bl":[950,983,123,124]},{"t":"JULY","bb":[989,1019,113,123],"bl":[989,1019,123,123]},{"t":"2000","bb":[1026,1056,108,131],"bl":[1026,1056,123,123]}]},{"words":[{"t":"»","bb":[19,30,129,139],"bl":[19,30,140,140]},{"t":"The","bb":[47,88,124,140],"bl":[47,88,140,140]},{"t":"strain","bb":[96,160,125,140],"bl":[96,160,140,140]},{"t":"leads","bb":[169,227,124,140],"bl":[169,227,140,140]},{"t":"to","bb":[235,257,125,140],"bl":[235,257,140,140]},{"t":"an","bb":[266,291,128,140],"bl":[266,291,140,140]},{"t":"energy","bb":[300,377,128,144],"bl":[300,377,140,140]},{"t":"splitting","bb":[385,477,124,144],"bl":[385,477,140,140]},{"t":"of","bb":[486,508,124,140],"bl":[486,508,140,140]},{"t":"the","bb":[515,551,124,140],"bl":[515,551,140,140]},{"t":"Si","bb":[559,578,124,140],"bl":[559,578,140,140]},{"t":"s","bb":[736,744,139,149],"bl":[736,744,140,140]},{"t":"——","bb":[791,835,139,150],"bl":[791,835,140,140]},{"t":"J","bb":[904,970,140,150],"bl":[904,970,140,140]}]},{"words":[{"t":"»","bb":[19,30,200,212],"bl":[19,30,213,213]},{"t":"It","bb":[48,63,198,213],"bl":[48,63,213,213]},{"t":"lifts","bb":[72,106,197,213],"bl":[72,106,213,213]},{"t":"the","bb":[115,146,197,213],"bl":[115,146,213,213]},{"t":"six","bb":[155,181,201,213],"bl":[155,181,213,213]},{"t":"fold","bb":[190,225,197,213],"bl":[190,225,213,213]},{"t":"degeneracy","bb":[235,349,197,217],"bl":[235,349,213,213]},{"t":"in","bb":[359,374,201,213],"bl":[359,374,213,213]},{"t":"the","bb":[383,414,197,213],"bl":[383,414,213,213]},{"t":"conduction","bb":[423,531,197,213],"bl":[423,531,213,213]},{"t":"band","bb":[541,588,197,213],"bl":[541,588,213,213]},{"t":"and","bb":[597,632,197,213],"bl":[597,632,213,213]},{"t":"a","bb":[700,706,216,223],"bl":[700,706,213,213]},{"t":"tension","bb":[865,908,203,213],"bl":[865,908,213,213]},{"t":"Ef)","bb":[915,939,195,219],"bl":[915,939,213,213]},{"t":"SI,","bb":[964,981,203,219],"bl":[964,981,213,213]},{"t":"Ge,","bb":[988,1013,203,219],"bl":[988,1013,213,213]}]},{"words":[{"t":"lowers","bb":[48,112,221,237],"bl":[48,112,237,237]},{"t":"the","bb":[120,151,221,237],"bl":[120,151,237,237]},{"t":"two","bb":[160,195,223,237],"bl":[160,195,237,237]},{"t":"perpendicular","bb":[205,341,221,241],"bl":[205,341,237,237]},{"t":"valleys","bb":[349,416,221,241],"bl":[349,416,237,237]},{"t":"(labeled","bb":[426,504,221,241],"bl":[426,504,237,237]},{"t":"A)","bb":[514,539,221,241],"bl":[514,539,237,237]},{"t":"with","bb":[549,590,221,237],"bl":[549,590,237,237]},{"t":"respect","bb":[600,672,223,241],"bl":[600,672,237,237]},{"t":"==","bb":[692,737,221,243],"bl":[692,737,237,237]},{"t":"10.0420","bb":[784,837,220,231],"bl":[784,837,237,237]}]},{"words":[{"t":"to","bb":[47,66,247,262],"bl":[47,66,261,261]},{"t":"the","bb":[74,106,246,262],"bl":[74,106,261,261]},{"t":"four","bb":[114,155,246,261],"bl":[114,155,261,261]},{"t":"in-plane","bb":[163,243,246,265],"bl":[163,243,261,261]},{"t":"valleys.","bb":[252,325,246,265],"bl":[252,325,261,261]},{"t":"(8)","bb":[694,710,257,270],"bl":[694,710,261,261]},{"t":"equilibrium","bb":[715,784,243,274],"bl":[715,784,261,261]},{"t":"lattices","bb":[790,839,243,274],"bl":[790,839,261,261]},{"t":"(b)","bb":[889,905,257,270],"bl":[889,905,261,261]},{"t":"pasudomorphic","bb":[910,1012,257,270],"bl":[910,1012,261,261]}]},{"words":[{"t":"strained","bb":[852,905,273,283],"bl":[852,905,283,283]},{"t":"Si","bb":[910,922,273,283],"bl":[910,922,283,283]},{"t":"on","bb":[927,942,276,283],"bl":[927,942,283,283]},{"t":"relaxed","bb":[948,995,273,283],"bl":[948,995,283,283]},{"t":"Si,","bb":[1000,1018,265,292],"bl":[1000,1018,283,283]},{"t":"Go_","bb":[1025,1049,272,288],"bl":[1025,1049,283,283]}]},{"words":[{"t":"»","bb":[19,30,298,310],"bl":[19,30,311,311]},{"t":"Electrons","bb":[48,151,295,311],"bl":[48,151,311,311]},{"t":"are","bb":[159,195,300,311],"bl":[159,195,311,311]},{"t":"expected","bb":[203,305,295,315],"bl":[203,305,311,311]},{"t":"to","bb":[313,335,297,311],"bl":[313,335,311,311]},{"t":"preferentially","bb":[345,496,295,315],"bl":[345,496,311,311]},{"t":"occupy","bb":[504,582,300,315],"bl":[504,582,311,311]},{"t":"the","bb":[590,626,295,311],"bl":[590,626,311,311]}]},{"words":[{"t":"lower-energy","bb":[48,198,320,339],"bl":[48,198,335,335]},{"t":"valleys,","bb":[206,290,320,339],"bl":[206,290,335,335]},{"t":"reducing","bb":[300,396,320,339],"bl":[300,396,336,336]},{"t":"the","bb":[404,440,320,336],"bl":[404,440,336,336]},{"t":"effective","bb":[449,546,320,336],"bl":[449,546,336,336]},{"t":"in-plane","bb":[554,646,320,339],"bl":[554,646,336,333]},{"t":"Apart","bb":[695,779,310,353],"bl":[695,779,331,328]},{"t":"(1)","bb":[792,817,323,333],"bl":[792,817,328,328]}]},{"words":[{"t":"E,","bb":[867,874,375,385],"bl":[867,874,385,385]}]},{"words":[{"t":"©","bb":[875,882,383,392],"bl":[875,882,392,392]}]},{"words":[{"t":"»","bb":[19,30,395,408],"bl":[19,30,409,409]},{"t":"The","bb":[47,88,394,410],"bl":[47,88,409,409]},{"t":"energy","bb":[96,173,398,413],"bl":[96,173,409,409]},{"t":"splitting","bb":[181,273,394,413],"bl":[181,273,409,410]},{"t":"also","bb":[282,326,394,410],"bl":[282,326,410,410]},{"t":"suppresses","bb":[335,460,398,413],"bl":[335,460,410,410]},{"t":"intervalley","bb":[469,588,394,413],"bl":[469,588,410,410]},{"t":"m=","bb":[840,863,411,420],"bl":[840,863,410,410]},{"t":"=","bb":[882,917,358,427],"bl":[882,917,410,410]},{"t":"3","bb":[939,974,362,423],"bl":[939,974,410,410]},{"t":"=","bb":[986,1006,387,403],"bl":[986,1006,410,410]}]},{"words":[{"t":"phonon-carrier","bb":[48,217,418,438],"bl":[48,217,434,434]},{"t":"scattering,","bb":[224,344,418,438],"bl":[224,344,434,434]},{"t":"increasing","bb":[353,468,418,438],"bl":[353,468,434,434]},{"t":"the","bb":[477,513,418,434],"bl":[477,513,434,434]},{"t":"electron","bb":[521,612,418,434],"bl":[521,612,434,434]},{"t":"low-","bb":[622,670,418,434],"bl":[622,670,434,434]},{"t":"75","bb":[963,973,429,443],"bl":[963,973,434,434]}]},{"words":[{"t":"field","bb":[47,95,442,458],"bl":[47,95,458,458]},{"t":"mobility.","bb":[105,201,442,462],"bl":[105,201,458,458]},{"t":"on.","bb":[705,729,437,468],"bl":[705,729,457,457]},{"t":"(AE","bb":[895,922,446,463],"bl":[895,922,457,457]},{"t":"~","bb":[929,935,450,452],"bl":[929,935,457,457]},{"t":"670:","bb":[940,972,446,457],"bl":[940,972,457,456]},{"t":"meV)","bb":[977,1008,446,458],"bl":[977,1008,456,458]}]},{"words":[{"t":"in-plane","bb":[710,759,463,474],"bl":[710,759,472,472]}]},{"words":[{"t":"A,","bb":[712,721,480,493],"bl":[712,721,489,489]},{"t":"valleys","bb":[728,769,480,492],"bl":[728,769,489,489]}]},{"words":[{"t":"(¢)","bb":[702,718,503,515],"bl":[702,718,515,513]},{"t":"biaxial","bb":[723,764,502,513],"bl":[723,764,513,513]},{"t":"tensile","bb":[768,811,502,513],"bl":[768,811,513,513]},{"t":"strain-induced","bb":[816,910,502,513],"bl":[816,910,513,513]},{"t":"Eg","bb":[915,931,502,518],"bl":[915,931,513,514]},{"t":"splitting","bb":[935,987,502,516],"bl":[935,987,514,513]},{"t":"in","bb":[992,1003,503,512],"bl":[992,1003,513,513]},{"t":"Si","bb":[1007,1020,502,513],"bl":[1007,1020,513,512]}]}]
ocr_status: 2
ocr_error: 
ocr_driver_id: 1
type_: 4