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ocr_text: Issues for nanoscale MOSFET (2)\n» Tunneling into and Through Gate Oxide Leak: Toe\nthickness with high electric fields results in electrons tunneling from E f\nthe gate and from the gate to the substrate through the gate oxide, © bn : pe i\n» Leakage Current Due to Hot Carrier Injection @ © ©\nSubstrate to Gate Oxide\nThe high electric field near the substrate-oxide interface energizes the electrons or\nholes and they cross the substrate-oxide interface to enter the oxide layer. This\nphenomenon is known as hot carrier injection. This phenomenon is more likely to E L]\naffect electrons than holes. This is because electrons have a lesser effective mass 8\nand a lesser barrier height as compared to holes.\n» Leakage Current Due to Punch-Through Effect\nDue to the proximity of drain and source terminals, the depletion region of both the [3 pubare\nterminals come together and eventually merge. In such a condition, "punch-through” E\nis said to have taken place. The punch-through effect lowers the potential barrier for apelin\nthe majority of carriers from the source. This increases the number of carriers\nentering into the substrate. Some of these carriers are collected by the drain and the\nrest contribute to leakage current. https://www.allaboutcirc: #s.com/technical-articles\nPulse Summer School, Epitaxy Bases & Promises, Porquerolles, 2-8 July 2021 ot
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