640 [44].png

id: b789484c3e0e43c698ca5cf0ee5c5c47
mime: image/png
filename: 
created_time: 2025-11-28T16:58:22.570Z
updated_time: 2025-11-30T12:37:55.920Z
user_created_time: 2025-11-28T16:58:22.570Z
user_updated_time: 2025-11-30T12:37:55.920Z
file_extension: png
encryption_cipher_text: 
encryption_applied: 0
encryption_blob_encrypted: 0
size: 370437
is_shared: 0
share_id: 
master_key_id: 
user_data: 
blob_updated_time: 1764349102570
ocr_text: Heterogeneous Material Integration on Si Platforms\n—————————————————————————— Blanket layer growth\n»Key challenge --> elimination of the Strain relaxed buffer ayer? Direct wafer bonding quental 3D integration\ndislocations formed when Ge or III-V\nmaterials are grown on Si. = — —_—\n===) A variety of techniques includes: =\n- compositional grading, — = a\n- wafer bonding, Selective area growth\n- selective area growth, J\n- aspect ratio trapping,\nFi. 1. Various approaches tha have been explored t teat I-V mateials on Si substrates.\n» Patterned selective-area-growth (SAG) methods provide a direct and potentially more flexible\nmeans to directly integrate disparate materials if defectivity can be managed.\n» Selective area epitaxy is a local growth through a patterned amorphous dielectric mask (typically\nSiO; or SizN,) deposited on a semiconductor substrate. Semiconductor growth conditions are\nselected to ensure epitaxial growth on the exposed substrate, but not on the dielectric mask.
ocr_details: [{"words":[{"t":"Heterogeneous","bb":[81,332,39,71],"bl":[81,332,64,64]},{"t":"Material","bb":[348,477,38,64],"bl":[348,477,64,64]},{"t":"Integration","bb":[494,678,39,71],"bl":[494,678,64,64]},{"t":"on","bb":[694,731,45,64],"bl":[694,731,64,64]},{"t":"Si","bb":[748,776,39,64],"bl":[748,776,64,64]},{"t":"Platforms","bb":[792,948,38,64],"bl":[792,948,64,64]}]},{"words":[{"t":"——————————————————————————","bb":[66,555,63,94],"bl":[66,555,84,84]},{"t":"Blanket","bb":[754,804,78,89],"bl":[754,804,84,84]},{"t":"layer","bb":[809,841,63,96],"bl":[809,841,84,84]},{"t":"growth","bb":[849,893,63,96],"bl":[849,893,84,84]}]},{"words":[{"t":"»Key","bb":[19,69,95,114],"bl":[19,69,110,111]},{"t":"challenge","bb":[78,172,95,114],"bl":[78,172,111,111]},{"t":"-->","bb":[181,212,98,109],"bl":[181,212,111,111]},{"t":"elimination","bb":[223,332,95,111],"bl":[223,332,111,111]},{"t":"of","bb":[342,361,95,111],"bl":[342,361,111,111]},{"t":"the","bb":[368,399,95,111],"bl":[368,399,111,111]},{"t":"Strain","bb":[561,589,90,117],"bl":[561,589,109,109]},{"t":"relaxed","bb":[593,629,90,117],"bl":[593,629,109,109]},{"t":"buffer","bb":[635,663,90,117],"bl":[635,663,109,109]},{"t":"ayer?","bb":[669,696,90,117],"bl":[669,696,109,109]},{"t":"Direct","bb":[764,794,90,117],"bl":[764,794,109,109]},{"t":"wafer","bb":[798,823,90,117],"bl":[798,823,109,109]},{"t":"bonding","bb":[827,868,90,117],"bl":[827,868,109,109]},{"t":"quental","bb":[950,1062,101,111],"bl":[950,1062,109,109]},{"t":"3D","bb":[995,1005,89,116],"bl":[995,1005,109,109]},{"t":"integration","bb":[1009,1062,101,111],"bl":[1009,1062,109,109]}]},{"words":[{"t":"dislocations","bb":[18,135,119,135],"bl":[18,135,135,135]},{"t":"formed","bb":[143,214,119,135],"bl":[143,214,135,135]},{"t":"when","bb":[223,274,119,135],"bl":[223,274,135,135]},{"t":"Ge","bb":[284,310,120,135],"bl":[284,310,135,135]},{"t":"or","bb":[319,339,123,135],"bl":[319,339,135,135]},{"t":"III-V","bb":[347,393,120,135],"bl":[347,393,135,135]}]},{"words":[{"t":"materials","bb":[19,111,143,159],"bl":[19,111,159,159]},{"t":"are","bb":[120,151,148,159],"bl":[120,151,159,159]},{"t":"grown","bb":[160,220,148,163],"bl":[160,220,159,159]},{"t":"on","bb":[229,252,148,159],"bl":[229,252,159,159]},{"t":"Si.","bb":[261,285,144,159],"bl":[261,285,159,159]},{"t":"=","bb":[596,682,132,166],"bl":[596,682,157,157]},{"t":"—","bb":[787,818,135,155],"bl":[787,818,157,157]},{"t":"—_—","bb":[843,915,127,165],"bl":[843,915,157,157]}]},{"words":[{"t":"===)","bb":[41,86,174,190],"bl":[41,86,190,190]},{"t":"A","bb":[100,115,175,190],"bl":[100,115,190,190]},{"t":"variety","bb":[123,202,174,194],"bl":[123,202,190,190]},{"t":"of","bb":[210,232,174,190],"bl":[210,232,190,190]},{"t":"techniques","bb":[238,362,174,194],"bl":[238,362,190,190]},{"t":"includes:","bb":[370,469,174,190],"bl":[370,469,190,190]},{"t":"=","bb":[624,682,165,197],"bl":[624,682,190,190]}]},{"words":[{"t":"-","bb":[122,128,212,214],"bl":[122,128,220,220]},{"t":"compositional","bb":[138,294,204,224],"bl":[138,294,220,220]},{"t":"grading,","bb":[303,396,204,224],"bl":[303,396,220,220]},{"t":"—","bb":[633,660,197,209],"bl":[633,660,220,220]},{"t":"=","bb":[768,803,191,210],"bl":[768,803,220,220]},{"t":"a","bb":[859,915,191,210],"bl":[859,915,220,220]}]},{"words":[{"t":"-","bb":[122,128,243,245],"bl":[122,128,240,240]},{"t":"wafer","bb":[138,202,235,251],"bl":[138,202,240,240]},{"t":"bonding,","bb":[211,299,235,255],"bl":[211,299,240,240]},{"t":"Selective","bb":[753,813,229,240],"bl":[753,813,240,240]},{"t":"area","bb":[818,845,232,240],"bl":[818,845,240,240]},{"t":"growth","bb":[850,897,229,243],"bl":[850,897,240,240]}]},{"words":[{"t":"-","bb":[122,128,274,276],"bl":[122,128,282,282]},{"t":"selective","bb":[138,237,266,282],"bl":[138,237,282,282]},{"t":"area","bb":[245,293,271,282],"bl":[245,293,282,282]},{"t":"growth,","bb":[302,388,266,286],"bl":[302,388,282,282]},{"t":"J","bb":[963,1018,283,291],"bl":[963,1018,282,282]}]},{"words":[{"t":"-","bb":[122,128,306,308],"bl":[122,128,313,313]},{"t":"aspect","bb":[138,211,299,317],"bl":[138,211,313,313]},{"t":"ratio","bb":[220,271,297,313],"bl":[220,271,313,313]},{"t":"trapping,","bb":[278,381,297,317],"bl":[278,381,313,313]}]},{"words":[{"t":"Fi.","bb":[592,609,390,399],"bl":[592,609,397,397]},{"t":"1.","bb":[615,621,390,397],"bl":[615,621,397,397]},{"t":"Various","bb":[627,662,390,397],"bl":[627,662,397,397]},{"t":"approaches","bb":[667,717,390,400],"bl":[667,717,398,397]},{"t":"tha","bb":[721,738,390,397],"bl":[721,738,397,397]},{"t":"have","bb":[742,763,390,397],"bl":[742,763,397,397]},{"t":"been","bb":[768,788,390,397],"bl":[768,788,397,397]},{"t":"explored","bb":[792,831,390,400],"bl":[792,831,397,397]},{"t":"t","bb":[836,837,391,397],"bl":[836,837,397,397]},{"t":"teat","bb":[848,888,391,399],"bl":[848,888,397,397]},{"t":"I-V","bb":[892,910,390,397],"bl":[892,910,397,397]},{"t":"mateials","bb":[916,957,390,397],"bl":[916,957,397,397]},{"t":"on","bb":[961,971,392,397],"bl":[961,971,397,397]},{"t":"Si","bb":[976,983,390,397],"bl":[976,983,397,397]},{"t":"substrates.","bb":[988,1032,390,397],"bl":[988,1032,397,397]}]},{"words":[{"t":"»","bb":[19,31,414,427],"bl":[19,31,428,428]},{"t":"Patterned","bb":[49,143,412,428],"bl":[49,143,428,428]},{"t":"selective-area-growth","bb":[153,371,412,432],"bl":[153,371,428,428]},{"t":"(SAG)","bb":[381,439,412,432],"bl":[381,439,428,428]},{"t":"methods","bb":[450,535,412,428],"bl":[450,535,428,428]},{"t":"provide","bb":[544,617,412,432],"bl":[544,617,428,428]},{"t":"a","bb":[626,636,416,428],"bl":[626,636,428,428]},{"t":"direct","bb":[645,701,412,428],"bl":[645,701,428,428]},{"t":"and","bb":[709,744,412,428],"bl":[709,744,428,428]},{"t":"potentially","bb":[755,859,412,432],"bl":[755,859,428,428]},{"t":"more","bb":[868,919,416,428],"bl":[868,919,428,428]},{"t":"flexible","bb":[927,998,412,428],"bl":[927,998,428,428]}]},{"words":[{"t":"means","bb":[49,114,441,452],"bl":[49,114,452,452]},{"t":"to","bb":[122,141,438,452],"bl":[122,141,452,452]},{"t":"directly","bb":[150,223,436,456],"bl":[150,223,452,452]},{"t":"integrate","bb":[233,321,437,456],"bl":[233,321,452,452]},{"t":"disparate","bb":[330,421,436,456],"bl":[330,421,452,452]},{"t":"materials","bb":[430,522,436,452],"bl":[430,522,452,452]},{"t":"if","bb":[532,543,436,452],"bl":[532,543,452,452]},{"t":"defectivity","bb":[551,654,436,456],"bl":[551,654,452,452]},{"t":"can","bb":[662,696,441,452],"bl":[662,696,452,452]},{"t":"be","bb":[706,728,436,452],"bl":[706,728,452,452]},{"t":"managed.","bb":[739,836,436,456],"bl":[739,836,452,452]}]},{"words":[{"t":"»","bb":[19,31,473,486],"bl":[19,31,487,487]},{"t":"Selective","bb":[49,138,471,487],"bl":[49,138,487,487]},{"t":"area","bb":[147,189,475,487],"bl":[147,189,487,487]},{"t":"epitaxy","bb":[199,271,472,491],"bl":[199,271,487,487]},{"t":"is","bb":[281,295,472,487],"bl":[281,295,487,487]},{"t":"a","bb":[303,313,475,487],"bl":[303,313,487,487]},{"t":"local","bb":[323,366,471,487],"bl":[323,366,487,487]},{"t":"growth","bb":[376,444,471,491],"bl":[376,444,487,487]},{"t":"through","bb":[453,531,471,491],"bl":[453,531,487,487]},{"t":"a","bb":[540,550,475,487],"bl":[540,550,487,487]},{"t":"patterned","bb":[560,656,471,491],"bl":[560,656,487,487]},{"t":"amorphous","bb":[665,777,471,491],"bl":[665,777,487,487]},{"t":"dielectric","bb":[785,875,471,487],"bl":[785,875,487,487]},{"t":"mask","bb":[884,936,471,487],"bl":[884,936,487,487]},{"t":"(typically","bb":[945,1035,471,491],"bl":[945,1035,487,487]}]},{"words":[{"t":"SiO;","bb":[49,90,496,515],"bl":[49,90,512,512]},{"t":"or","bb":[97,117,500,512],"bl":[97,117,512,512]},{"t":"SizN,)","bb":[125,183,496,515],"bl":[125,183,512,512]},{"t":"deposited","bb":[192,288,496,515],"bl":[192,288,512,512]},{"t":"on","bb":[297,320,500,512],"bl":[297,320,512,512]},{"t":"a","bb":[330,339,500,512],"bl":[330,339,512,512]},{"t":"semiconductor","bb":[349,496,496,512],"bl":[349,496,512,512]},{"t":"substrate.","bb":[504,602,496,512],"bl":[504,602,512,512]},{"t":"Semiconductor","bb":[612,763,496,512],"bl":[612,763,512,512]},{"t":"growth","bb":[771,839,496,515],"bl":[771,839,512,512]},{"t":"conditions","bb":[849,950,496,512],"bl":[849,950,512,512]},{"t":"are","bb":[959,990,500,512],"bl":[959,990,512,512]}]},{"words":[{"t":"selected","bb":[49,129,520,536],"bl":[49,129,536,536]},{"t":"to","bb":[138,157,522,536],"bl":[138,157,536,536]},{"t":"ensure","bb":[166,233,524,536],"bl":[166,233,536,536]},{"t":"epitaxial","bb":[242,325,520,540],"bl":[242,325,536,536]},{"t":"growth","bb":[334,402,520,540],"bl":[334,402,536,536]},{"t":"on","bb":[412,434,524,536],"bl":[412,434,536,536]},{"t":"the","bb":[444,475,520,536],"bl":[444,475,536,536]},{"t":"exposed","bb":[484,565,520,540],"bl":[484,565,536,536]},{"t":"substrate,","bb":[575,673,520,540],"bl":[575,673,536,536]},{"t":"but","bb":[684,715,520,536],"bl":[684,715,536,536]},{"t":"not","bb":[724,755,522,536],"bl":[724,755,536,536]},{"t":"on","bb":[763,786,524,536],"bl":[763,786,536,536]},{"t":"the","bb":[795,827,520,536],"bl":[795,827,536,536]},{"t":"dielectric","bb":[835,925,520,536],"bl":[835,925,536,536]},{"t":"mask.","bb":[936,994,520,536],"bl":[936,994,536,536]}]}]
ocr_status: 2
ocr_error: 
ocr_driver_id: 1
type_: 4