640 [48].png

id: b684fe79ddac4212b138a34685a14401
mime: image/png
filename: 
created_time: 2025-11-28T16:58:22.044Z
updated_time: 2025-11-30T12:40:41.509Z
user_created_time: 2025-11-28T16:58:22.044Z
user_updated_time: 2025-11-30T12:40:41.509Z
file_extension: png
encryption_cipher_text: 
encryption_applied: 0
encryption_blob_encrypted: 0
size: 480333
is_shared: 0
share_id: 
master_key_id: 
user_data: 
blob_updated_time: 1764349102044
ocr_text: f\n» ART has be: buffer layer is\nthin(<1p as a low\nthermal bud tegration into\na state-of-t|\n» Ge or III-V\nIn the AR <r\nare guided Silicon\na) (b) in SiO: resis (a) XTEM of\nIN = } formed at the Ge/Si terface\n> Typically, t pour > Depiction of Aspect Ratio Trapping using Germanium in SiO; trenches. (a) | sifeon. bu are rapped a the\nthermally-g| pyTEM of Ge in trenches in a sample thinned to the bottom of the trench. (b) PVTEM ih low dislocation density. (b)\nRIE etching of Ge in trenches in a sample thinned to near the top of the trench.
ocr_details: [{"words":[{"t":"f","bb":[276,279,85,96],"bl":[276,279,96,96]}]},{"words":[{"t":"»","bb":[19,31,106,119],"bl":[19,31,120,120]},{"t":"ART","bb":[48,93,105,120],"bl":[48,93,120,120]},{"t":"has","bb":[101,139,104,120],"bl":[101,139,120,120]},{"t":"be:","bb":[147,172,104,120],"bl":[147,172,120,120]},{"t":"buffer","bb":[888,951,104,120],"bl":[888,951,120,120]},{"t":"layer","bb":[959,1015,104,124],"bl":[959,1015,120,120]},{"t":"is","bb":[1023,1040,104,121],"bl":[1023,1040,120,120]}]},{"words":[{"t":"thin(<1p","bb":[48,168,129,148],"bl":[48,168,145,145]},{"t":"as","bb":[897,921,133,145],"bl":[897,921,145,145]},{"t":"a","bb":[929,940,133,145],"bl":[929,940,145,145]},{"t":"low","bb":[950,989,129,145],"bl":[950,989,145,145]}]},{"words":[{"t":"thermal","bb":[48,135,153,169],"bl":[48,135,169,169]},{"t":"bud","bb":[144,177,153,169],"bl":[144,177,169,169]},{"t":"tegration","bb":[896,999,153,173],"bl":[896,999,169,169]},{"t":"into","bb":[1008,1050,153,169],"bl":[1008,1050,169,169]}]},{"words":[{"t":"a","bb":[48,60,181,193],"bl":[48,60,193,193]},{"t":"state-of-t|","bb":[68,175,177,193],"bl":[68,175,193,193]}]},{"words":[{"t":"»","bb":[19,31,214,228],"bl":[19,31,229,229]},{"t":"Ge","bb":[48,77,213,229],"bl":[48,77,229,228]},{"t":"or","bb":[85,108,217,229],"bl":[85,108,228,228]},{"t":"III-V","bb":[116,173,213,228],"bl":[116,173,228,228]}]},{"words":[{"t":"In","bb":[66,89,311,325],"bl":[66,89,325,325]},{"t":"the","bb":[98,134,310,326],"bl":[98,134,325,325]},{"t":"AR","bb":[141,172,311,325],"bl":[141,172,325,325]},{"t":"<r","bb":[923,949,305,325],"bl":[923,949,325,325]}]},{"words":[{"t":"are","bb":[66,102,338,350],"bl":[66,102,350,350]},{"t":"guided","bb":[109,179,334,354],"bl":[109,179,350,350]},{"t":"Silicon","bb":[915,954,349,358],"bl":[915,954,357,358]}]},{"words":[{"t":"a)","bb":[361,378,440,457],"bl":[361,378,446,446]},{"t":"(b)","bb":[684,702,435,450],"bl":[684,702,446,446]},{"t":"in","bb":[891,898,440,447],"bl":[891,898,446,446]},{"t":"SiO:","bb":[904,930,437,449],"bl":[904,930,446,447]},{"t":"resis","bb":[935,983,437,464],"bl":[935,983,447,447]},{"t":"(a)","bb":[997,1012,439,448],"bl":[997,1012,447,447]},{"t":"XTEM","bb":[1018,1058,436,447],"bl":[1018,1058,447,447]},{"t":"of","bb":[1064,1074,437,447],"bl":[1064,1074,447,447]}]},{"words":[{"t":"IN","bb":[16,25,448,469],"bl":[16,25,462,462]},{"t":"=","bb":[90,94,457,460],"bl":[90,94,462,462]},{"t":"}","bb":[889,891,457,460],"bl":[889,891,463,463]},{"t":"formed","bb":[899,932,453,464],"bl":[899,932,463,463]},{"t":"at","bb":[946,948,457,464],"bl":[946,948,464,464]},{"t":"the","bb":[962,979,449,471],"bl":[962,979,464,464]},{"t":"Ge/Si","bb":[986,1014,454,464],"bl":[986,1014,464,464]},{"t":"terface","bb":[1040,1075,454,464],"bl":[1040,1075,464,464]}]},{"words":[{"t":">","bb":[19,31,463,472],"bl":[19,31,480,480]},{"t":"Typically,","bb":[48,153,457,476],"bl":[48,153,480,480]},{"t":"t","bb":[162,171,458,473],"bl":[162,171,480,480]},{"t":"pour","bb":[194,242,467,484],"bl":[194,242,480,480]},{"t":">","bb":[250,257,467,480],"bl":[250,257,480,480]},{"t":"Depiction","bb":[277,351,466,484],"bl":[277,351,480,480]},{"t":"of","bb":[358,376,466,480],"bl":[358,376,480,480]},{"t":"Aspect","bb":[381,432,467,484],"bl":[381,432,480,480]},{"t":"Ratio","bb":[440,480,467,480],"bl":[440,480,480,480]},{"t":"Trapping","bb":[488,556,467,484],"bl":[488,556,480,480]},{"t":"using","bb":[564,604,466,484],"bl":[564,604,480,480]},{"t":"Germanium","bb":[612,701,466,480],"bl":[612,701,480,480]},{"t":"in","bb":[709,722,471,480],"bl":[709,722,480,480]},{"t":"SiO;","bb":[730,764,467,482],"bl":[730,764,480,480]},{"t":"trenches.","bb":[772,834,466,480],"bl":[772,834,480,480]},{"t":"(a)","bb":[854,873,467,483],"bl":[854,873,480,480]},{"t":"|","bb":[881,891,451,488],"bl":[881,891,480,480]},{"t":"sifeon.","bb":[890,943,457,481],"bl":[890,943,480,481]},{"t":"bu","bb":[949,965,456,481],"bl":[949,965,481,481]},{"t":"are","bb":[973,989,457,481],"bl":[973,989,481,481]},{"t":"rapped","bb":[995,1038,456,484],"bl":[995,1038,481,481]},{"t":"a","bb":[1044,1045,474,481],"bl":[1044,1045,481,481]},{"t":"the","bb":[1056,1075,457,481],"bl":[1056,1075,481,481]}]},{"words":[{"t":"thermally-g|","bb":[45,176,481,509],"bl":[45,176,502,502]},{"t":"pyTEM","bb":[194,257,488,502],"bl":[194,257,502,502]},{"t":"of","bb":[263,281,487,502],"bl":[263,281,502,502]},{"t":"Ge","bb":[285,306,488,502],"bl":[285,306,502,502]},{"t":"in","bb":[313,327,492,502],"bl":[313,327,502,502]},{"t":"trenches","bb":[334,396,488,502],"bl":[334,396,502,502]},{"t":"in","bb":[403,416,492,502],"bl":[403,416,502,502]},{"t":"a","bb":[423,431,492,502],"bl":[423,431,502,502]},{"t":"sample","bb":[437,490,488,506],"bl":[437,490,502,502]},{"t":"thinned","bb":[497,553,487,502],"bl":[497,553,502,502]},{"t":"to","bb":[559,573,491,502],"bl":[559,573,502,502]},{"t":"the","bb":[580,602,488,502],"bl":[580,602,502,502]},{"t":"bottom","bb":[609,662,488,502],"bl":[609,662,502,502]},{"t":"of","bb":[668,685,487,502],"bl":[668,685,502,502]},{"t":"the","bb":[690,712,488,502],"bl":[690,712,502,502]},{"t":"trench.","bb":[719,765,488,502],"bl":[719,765,502,502]},{"t":"(b)","bb":[783,803,488,505],"bl":[783,803,502,502]},{"t":"PVTEM","bb":[810,874,488,502],"bl":[810,874,502,502]},{"t":"ih","bb":[892,902,487,497],"bl":[892,902,502,502]},{"t":"low","bb":[907,926,487,497],"bl":[907,926,502,502]},{"t":"dislocation","bb":[933,996,487,497],"bl":[933,996,502,502]},{"t":"density.","bb":[1001,1040,487,501],"bl":[1001,1040,502,502]},{"t":"(b)","bb":[1059,1075,487,499],"bl":[1059,1075,502,502]}]},{"words":[{"t":"RIE","bb":[46,84,506,521],"bl":[46,84,524,524]},{"t":"etching","bb":[93,175,505,525],"bl":[93,175,524,524]},{"t":"of","bb":[194,210,509,524],"bl":[194,210,524,524]},{"t":"Ge","bb":[217,234,510,524],"bl":[217,234,524,524]},{"t":"in","bb":[241,254,514,524],"bl":[241,254,524,524]},{"t":"trenches","bb":[260,322,510,524],"bl":[260,322,524,524]},{"t":"in","bb":[328,342,514,524],"bl":[328,342,524,524]},{"t":"a","bb":[347,355,514,524],"bl":[347,355,524,524]},{"t":"sample","bb":[361,413,510,528],"bl":[361,413,524,524]},{"t":"thinned","bb":[419,475,510,524],"bl":[419,475,524,524]},{"t":"to","bb":[480,494,513,524],"bl":[480,494,524,524]},{"t":"near","bb":[499,532,514,524],"bl":[499,532,524,524]},{"t":"the","bb":[537,559,510,524],"bl":[537,559,524,524]},{"t":"top","bb":[565,588,513,528],"bl":[565,588,524,524]},{"t":"of","bb":[594,608,509,524],"bl":[594,608,524,524]},{"t":"the","bb":[614,636,509,524],"bl":[614,636,524,524]},{"t":"trench.","bb":[642,692,510,524],"bl":[642,692,524,524]}]}]
ocr_status: 2
ocr_error: 
ocr_driver_id: 1
type_: 4