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ocr_text: Aspect Ratio Trapping Patterned Si\n> The use of {111} Si V-grooves in the ART growth process has been developped.\n» The crystallographic alignment between the Si and III-V materials in the V-grooves avoids\nthe introduction of APDs.\n===) Crystallography analysis indicates that III-V SC on the two {111} facets of the “V-\nshape” have the same polarity. In principle, the Si (111) surface can also have surface steps, as\nin the case of Si (001) --> A single step on the Si (111) surface has the height of one\nSi (001) double-layer (0.31 nm). Such steps will not lead to the formation of APBs.\n» III-V nucleation on Si (111) generates less defects as compared to nucleation on Si (001)\n& avoid the formation of the (111)-oriented defects along the parallel direction of the\ntrench.\nA II-V lattice in the V-shape of Si with 4 \ + I o X Ke eh x\n{111} facets along the [110] direction. i ¢ ) og §\n[Qiang Li et al., Progress in Crystal Growth & I ANA XC x LA\nCharacterization of Materials 63 (2017) 105-120] by 4 ANA, TTX
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