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title_diff: "[{\"diffs\":[[1,\"建一家Fab新厂，需要哪些机台设备？（转载）\"]],\"start1\":0,\"start2\":0,\"length1\":0,\"length2\":22}]"
body_diff: "[{\"diffs\":[[1,\"<html>\\\r\\\n<head>\\\r\\\n  <title>建一家Fab新厂，需要哪些机台设备？（转载）</title>\\\r\\\n  <basefont face=\\\"微软雅黑\\\" size=\\\"2\\\" />\\\r\\\n  <meta http-equiv=\\\"Content-Type\\\" content=\\\"text/html;charset=utf-8\\\" />\\\r\\\n  <meta name=\\\"exporter-version\\\" content=\\\"YXBJ Windows/608924 (zh-CN, DDL); Windows/10.0.0 (Win64); EDAMVersion=V2;\\\"/>\\\r\\\n  <meta name=\\\"content-class\\\" content=\\\"yinxiang.peso.superNote\\\"/>\\\r\\\n  <meta name=\\\"application-data:yinxiang.noteLayout\\\" content=\\\"{\\\"lineSpace\\\":\\\"recommend\\\",\\\"paragraphSpace\\\":\\\"recommend\\\"}\\\"/>\\\r\\\n  <style>\\\r\\\n\\tbody, td {\\\r\\\n\\t  font-family: 微软雅黑;\\\r\\\n\\t  font-size: 12pt;\\\r\\\n\\t}\\\r\\\n  </style>\\\r\\\n</head>\\\r\\\n<body>\\\r\\\n<a name=\\\"36058\\\"></a>\\\r\\\n<h1>建一家Fab新厂，需要哪些机台设备？（转载）</h1>\\\r\\\n\\\r\\\n<div><span style=\\\"\\\"><div style=\\\"max-width: 700px;\\\"><p></p><div style=\\\"--en-blockquote: true; box-sizing: border-box; border-left: 3px solid #b4c0cc; background-position: initial initial; background-repeat: initial initial;\\\"><div>原文链接: <a href=\\\"http://mp.weixin.qq.com/s?__biz=MzUyOTg1NDM2Ng==&amp;mid=2247491223&amp;idx=1&amp;sn=e7eb95d0302da16cd9929162e97fc763&amp;chksm=fbca103b58e68e330967f3b44c1a5a48938c876d1225bef9a7d66c643eaa9f421eb05ad5c135&amp;mpshare=1&amp;scene=1&amp;srcid=0405vWzKGO9go3ZVwlewBQce&amp;sharer_shareinfo=69725973a3f0105c5d472ab130ff8346&amp;sharer_shareinfo_first=6d16d2aa7095c8a4a6594fa7959954e0#rd\\\"><span>http://mp.weixin.qq.com/s?__biz=MzUyOTg1NDM2Ng==&amp;mid=2247491...</span></a></div></div><p></p><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><a style=\\\"-webkit-tap-highlight-color: transparent;\\\"> 半导体综研 </a></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent;\\\"></em></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><p style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">以下文章来源于Tom聊芯片智造</span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">，作者Tom</span></p><img src=\\\":/bf67087b5bfb43fda1d62c43238a448c\\\" type=\\\"image/jpeg\\\" data-filename=\\\"0.jpg\\\" style=\\\"--en-marks: %7B%22link%22%3A%22https%3A%2F%2Fmp.weixin.qq.com%2Fs%3F__biz%3DMzUyOTg1NDM2Ng%3D%3D%26mid%3D2247491223%26idx%3D1%26sn%3De7eb95d0302da16cd9929162e97fc763%26chksm%3Dfbca103b58e68e330967f3b44c1a5a48938c876d1225bef9a7d66c643eaa9f421eb05ad5c135%26mpshare%3D1%26scene%3D1%26srcid%3D0405vWzKGO9go3ZVwlewBQce%26sharer_shareinfo%3D69725973a3f0105c5d472ab130ff8346%26sharer_shareinfo_first%3D6d16d2aa7095c8a4a6594fa7959954e0%23%22%2C%22align%22%3A%22center%22%7D; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255);\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; color: rgb(0,82,255); __visibility: visible;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; __visibility: visible;\\\">说明：最近微信公众号修改了文章推送机制，只有加星标的公众号才能在首页看到更新文章。所以如果您希望能够及时看到本公众号每次发布的新文章，需要关注本公众号并加上星标。谢谢您的支持！</strong></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255);\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; color: rgb(0,82,255); __visibility: visible;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; __visibility: visible;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; __visibility: visible;\\\"/></strong></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255);\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; __visibility: visible;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; __visibility: visible;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 24px; letter-spacing: 0.544px; __visibility: visible;\\\">正文：</strong></strong></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">知识星球的伙伴提出了题目的问题。一家Fab厂的设备种类与数量与该厂的</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">产能，</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">工艺节点，</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">产品类</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">型，</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">自动化程度等有关，那么我们今天就来详细介绍下</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">常规的</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">所需机台。</span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">设备我这里将其分为工艺设备，检测与量测设备和厂务设备。</span></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-align: center;\\\"><img src=\\\":/c0296bec672147a1ae307e05d18b1ccc\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; outline: 0; __visibility: visible; width: auto;\\\" width=\\\"auto\\\"/></p><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 24px;\\\">工艺设备：包括湿法，干法，光刻。</span></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">湿法包括：晶圆电镀机，清洗机，湿法刻蚀机，</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; color: var(--weui-LINK); cursor: pointer;\\\">cmp</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">，湿法去胶机，甩干机等</span></span><br style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">干法设备<br style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">镀膜：蒸发镀膜机（Evaporation），溅射机（Sputtering），脉冲激光沉积（PLD）等，等离子体增强CVD（PECVD）,低压CVD（LPCVD）,金属有机CVD（</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; color: var(--weui-LINK); cursor: pointer;\\\">MOCVD</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">）,MPCVD，Laser CVD，APCVD，HT-CVD，UHV CVD等</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">干法刻蚀：离子束刻蚀（</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; color: var(--weui-LINK); cursor: pointer;\\\">IBE</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">），ICP-RIE,CCP-RIE,ECR-RIE,DRIE，干法去胶机等。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">外延机台</span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">离子注入机台<br style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">退火：炉管退火设备，快速热退火设备，激光退火设备，等离子体退火设备</span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">扩散：炉管设备<br style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">光刻设备：光刻机，</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; color: var(--weui-LINK); cursor: pointer;\\\">匀胶机</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">，显影机等</span></span><br style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 24px;\\\">检测与量测设备</span></strong></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255);\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">      光学显微镜，扫描</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; color: var(--weui-LINK); cursor: pointer;\\\">电子显微镜</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\">（SEM），原子力显微镜（AFM），椭圆偏振仪，Probe，AOI，XRD，FIB，XPS，SIMS，TEM，四探针等等。</span></p><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 24px;\\\">厂务设备</span></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">过滤系统：高效微粒空气过滤器（HEPA）和超高效微粒空气过滤器（ULPA），温湿度控制系统：除湿机，加湿器，冷水机组，热交换器，冷却塔等</span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">气体供应系统：空压机，制氮机等</span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">废气处理系统：</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">干/湿式洗涤塔，燃烧塔，催化塔</span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">水处</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">理系统：</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">高纯水机及废水处理系统</span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">消防系</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">统</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">：</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">自动灭火系统，烟雾探测器和报警系统</span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">晶圆搬运系统：</span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px; text-indent: 2em; letter-spacing: 0.034em;\\\">OHT，AGV，RGV等</span></div><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-indent: 2em;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-size: 20px;\\\">存储系统：Stockers，Buffers等</span></h3><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px; text-wrap: wrap; background-color: rgb(255,255,255); text-align: center;\\\"><img src=\\\":/15bcf752ac1041c69d52aeba1b1677e8\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; outline: 0; border-style: none; __visibility: visible; width: auto;\\\" width=\\\"auto\\\"/></p><div style=\\\"-webkit-tap-highlight-color: transparent; text-wrap: wrap; outline: 0; letter-spacing: 0.544px; background-color: rgb(255,255,255); text-align: left;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; color: rgb(255,255,255); font-size: 24px;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.034em; background-color: rgb(0,82,255);\\\">最后做个广告：</span></strong></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-wrap: wrap; outline: 0; letter-spacing: 0.544px; background-color: rgb(255,255,255);\\\">之前的线上课程里，我在线上和我的学员分享了不少关于半导体、尤其是设备领域的数据。虽然课程已经结束，但还是有回放的<br style=\\\"-webkit-tap-highlight-color: transparent; outline: 0;\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-wrap: wrap; outline: 0; letter-spacing: 0.544px; background-color: rgb(255,255,255);\\\">如果大家感兴趣，依旧可以扫码报名、或者直接联系我们工作人员，购买相关<span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; letter-spacing: 0.544px;\\\">系列</span>课程视频。谢谢了</div><p style=\\\"-webkit-tap-highlight-color: transparent; text-wrap: wrap; outline: 0; letter-spacing: 0.544px; background-color: rgb(255,255,255); text-align: center;\\\"><img src=\\\":/e870428fe1dd4adcbeaf1c2e8def9d5d\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; outline: 0; __visibility: visible; width: auto;\\\" width=\\\"auto\\\"/></p><p style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/7b1a172dffef48ccba5ef0bdaeefe2bd\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto;\\\" width=\\\"auto\\\"/></p><div style=\\\"-webkit-tap-highlight-color: transparent; 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updated_time: 2025-11-28T21:04:34.769Z
created_time: 2025-11-28T21:04:34.769Z
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