640 [82].png

id: a40eee1539714f7fbc50a06423ddc908
mime: image/png
filename: 
created_time: 2025-11-28T16:58:23.337Z
updated_time: 2025-11-30T12:36:36.606Z
user_created_time: 2025-11-28T16:58:23.337Z
user_updated_time: 2025-11-30T12:36:36.606Z
file_extension: png
encryption_cipher_text: 
encryption_applied: 0
encryption_blob_encrypted: 0
size: 406084
is_shared: 0
share_id: 
master_key_id: 
user_data: 
blob_updated_time: 1764349103337
ocr_text: Combining MBE & MOCVD\nAN 150 nm 1+ (back) 1kHz $2 aa coub et al.,\n= hod BoE Phys. Status Solidi A,\n10] H 1700638(2018)]\n> —\n2 3g os | 150 nm —\n= uw Bb 3 2 1 ° 1 2 3 .\nFigure 3. CV measurements performed on 150nm AIN/Si test\nFigure 1. Schematic showing epitaxial layer structure for (a) MBE AIN-on. structures. Bias was swept from 4 to —4V and back at a measurement\nsilicon test structure, (b) MOCVD HFET and (c) hybrid MBE/MOCVD frequency of 1kHz. Inset shows simulated OV band diagram for 150nm\nHFET structures on silicon AN on S indicating hole accumulation at th interface.\n» C-V measurements on 150nm MBE AIN/p-Si test structures\nmmm) @ OV: hole accumulation is still observed and the capacitance decreases until 4V. No further\nincrease in Cp is observed at higher positive biases, indicating the suppression of e- accumulation\nat the interface (an increase in the positive bias voltage regime initiated by carrier injection\noriginating from an inversion channel formed between AIN and the p-Si substrate). This e- channel is\nresponsible for the vertical leakage current in the buffer structure. oe\nmmm) C-V profile shows no hysteresis (between to/back-sweeps): high AIN/Si .( rags gudlivy.
ocr_details: [{"words":[{"t":"Combining","bb":[80,255,38,71],"bl":[80,255,64,64]},{"t":"MBE","bb":[273,341,39,64],"bl":[273,341,64,64]},{"t":"&","bb":[356,379,39,64],"bl":[356,379,64,64]},{"t":"MOCVD","bb":[393,516,39,64],"bl":[393,516,64,64]}]},{"words":[{"t":"AN","bb":[295,310,118,125],"bl":[295,310,125,125]},{"t":"150","bb":[314,329,107,133],"bl":[314,329,125,125]},{"t":"nm","bb":[334,346,107,133],"bl":[334,346,125,125]},{"t":"1+","bb":[633,658,121,129],"bl":[633,658,126,126]},{"t":"(back)","bb":[675,711,118,130],"bl":[675,711,126,126]},{"t":"1kHz","bb":[719,749,108,138],"bl":[719,749,126,126]},{"t":"$2","bb":[756,772,120,134],"bl":[756,772,126,126]},{"t":"aa","bb":[849,906,114,124],"bl":[849,906,126,126]},{"t":"coub","bb":[973,994,119,127],"bl":[973,994,127,127]},{"t":"et","bb":[1007,1013,119,127],"bl":[1007,1013,127,127]},{"t":"al.,","bb":[1023,1041,119,128],"bl":[1023,1041,127,127]}]},{"words":[{"t":"=","bb":[181,193,129,141],"bl":[181,193,146,146]},{"t":"hod","bb":[616,636,120,155],"bl":[616,636,146,146]},{"t":"BoE","bb":[755,794,134,158],"bl":[755,794,146,146]},{"t":"Phys.","bb":[938,965,135,148],"bl":[938,965,146,146]},{"t":"Status","bb":[975,1009,135,146],"bl":[975,1009,146,146]},{"t":"Solidi","bb":[1016,1048,135,146],"bl":[1016,1048,146,146]},{"t":"A,","bb":[1053,1065,135,148],"bl":[1053,1065,146,146]}]},{"words":[{"t":"10]","bb":[607,636,156,163],"bl":[607,636,163,163]},{"t":"H","bb":[756,763,159,171],"bl":[756,763,163,163]},{"t":"1700638(2018)]","bb":[938,1037,153,167],"bl":[938,1037,164,165]}]},{"words":[{"t":">","bb":[266,279,226,236],"bl":[266,279,236,236]},{"t":"—","bb":[832,859,224,238],"bl":[832,859,238,238]}]},{"words":[{"t":"2","bb":[75,88,234,269],"bl":[75,88,247,247]},{"t":"3g","bb":[262,279,228,265],"bl":[262,279,247,247]},{"t":"os","bb":[620,631,228,264],"bl":[620,631,247,247]},{"t":"|","bb":[637,638,240,259],"bl":[637,638,247,247]},{"t":"150","bb":[641,676,231,248],"bl":[641,676,247,247]},{"t":"nm","bb":[685,716,236,247],"bl":[685,716,247,247]},{"t":"—","bb":[809,848,239,260],"bl":[809,848,247,247]}]},{"words":[{"t":"=","bb":[75,88,283,296],"bl":[75,88,303,303]},{"t":"uw","bb":[263,278,289,318],"bl":[263,278,303,303]},{"t":"Bb","bb":[616,640,282,311],"bl":[616,640,303,303]},{"t":"3","bb":[670,674,296,303],"bl":[670,674,303,303]},{"t":"2","bb":[701,709,296,303],"bl":[701,709,303,303]},{"t":"1","bb":[739,742,296,303],"bl":[739,742,303,303]},{"t":"°","bb":[772,777,296,303],"bl":[772,777,303,303]},{"t":"1","bb":[807,810,296,303],"bl":[807,810,303,303]},{"t":"2","bb":[842,846,296,303],"bl":[842,846,303,303]},{"t":"3","bb":[876,880,296,303],"bl":[876,880,303,303]},{"t":".","bb":[911,915,296,303],"bl":[911,915,303,303]}]},{"words":[{"t":"Figure","bb":[585,614,341,352],"bl":[585,614,349,349]},{"t":"3.","bb":[625,632,341,349],"bl":[625,632,349,349]},{"t":"CV","bb":[639,655,341,349],"bl":[639,655,349,349]},{"t":"measurements","bb":[666,737,343,349],"bl":[666,737,349,349]},{"t":"performed","bb":[748,796,340,351],"bl":[748,796,349,349]},{"t":"on","bb":[807,818,344,349],"bl":[807,818,349,349]},{"t":"150nm","bb":[831,864,341,349],"bl":[831,864,349,349]},{"t":"AIN/Si","bb":[875,903,341,351],"bl":[875,903,349,351]},{"t":"test","bb":[917,933,342,349],"bl":[917,933,351,351]}]},{"words":[{"t":"Figure","bb":[64,109,350,362],"bl":[64,109,362,362]},{"t":"1.","bb":[99,112,343,371],"bl":[99,112,362,362]},{"t":"Schematic","bb":[118,171,343,371],"bl":[118,171,362,362]},{"t":"showing","bb":[175,217,343,371],"bl":[175,217,362,361]},{"t":"epitaxial","bb":[222,263,343,371],"bl":[222,263,361,361]},{"t":"layer","bb":[267,291,343,371],"bl":[267,291,361,361]},{"t":"structure","bb":[295,340,343,371],"bl":[295,340,361,359]},{"t":"for","bb":[346,360,349,359],"bl":[346,360,359,359]},{"t":"(a)","bb":[364,377,350,362],"bl":[364,377,359,360]},{"t":"MBE","bb":[386,406,350,359],"bl":[386,406,360,360]},{"t":"AIN-on.","bb":[412,446,353,359],"bl":[412,446,360,361]},{"t":"structures.","bb":[585,632,357,364],"bl":[585,632,363,364]},{"t":"Bias","bb":[640,659,356,364],"bl":[640,659,364,364]},{"t":"was","bb":[664,681,358,364],"bl":[664,681,364,364]},{"t":"swept","bb":[687,714,357,366],"bl":[687,714,364,364]},{"t":"from","bb":[719,765,355,364],"bl":[719,765,364,364]},{"t":"4","bb":[745,752,346,373],"bl":[745,752,364,364]},{"t":"to","bb":[756,766,346,373],"bl":[756,766,364,364]},{"t":"—4V","bb":[772,791,346,373],"bl":[772,791,364,364]},{"t":"and","bb":[797,813,355,364],"bl":[797,813,364,364]},{"t":"back","bb":[819,840,356,364],"bl":[819,840,364,364]},{"t":"at","bb":[844,853,346,373],"bl":[844,853,364,364]},{"t":"a","bb":[860,863,358,364],"bl":[860,863,364,364]},{"t":"measurement","bb":[868,934,356,364],"bl":[868,934,364,364]}]},{"words":[{"t":"silicon","bb":[64,97,366,375],"bl":[64,97,374,375]},{"t":"test","bb":[103,122,367,375],"bl":[103,122,375,375]},{"t":"structure,","bb":[129,179,367,376],"bl":[129,179,375,375]},{"t":"(b)","bb":[185,199,366,377],"bl":[185,199,375,376]},{"t":"MOCVD","bb":[206,250,366,375],"bl":[206,250,376,376]},{"t":"HFET","bb":[256,285,366,375],"bl":[256,285,377,377]},{"t":"and","bb":[292,310,366,375],"bl":[292,310,377,377]},{"t":"(c)","bb":[317,330,366,377],"bl":[317,330,377,376]},{"t":"hybrid","bb":[336,368,365,377],"bl":[336,368,376,375]},{"t":"MBE/MOCVD","bb":[375,450,366,377],"bl":[375,450,375,375]},{"t":"frequency","bb":[585,630,369,380],"bl":[585,630,377,378]},{"t":"of","bb":[634,644,369,378],"bl":[634,644,378,378]},{"t":"1kHz.","bb":[649,674,370,378],"bl":[649,674,378,378]},{"t":"Inset","bb":[682,704,371,378],"bl":[682,704,378,378]},{"t":"shows","bb":[709,738,370,378],"bl":[709,738,378,378]},{"t":"simulated","bb":[743,789,370,378],"bl":[743,789,378,378]},{"t":"OV","bb":[794,807,370,378],"bl":[794,807,378,378]},{"t":"band","bb":[812,834,360,385],"bl":[812,834,378,378]},{"t":"diagram","bb":[839,875,370,381],"bl":[839,875,378,378]},{"t":"for","bb":[882,895,369,378],"bl":[882,895,378,378]},{"t":"150nm","bb":[900,933,370,378],"bl":[900,933,378,378]}]},{"words":[{"t":"HFET","bb":[65,93,382,391],"bl":[65,93,391,391]},{"t":"structures","bb":[100,152,383,391],"bl":[100,152,391,391]},{"t":"on","bb":[157,170,385,391],"bl":[157,170,391,391]},{"t":"silicon","bb":[175,208,382,391],"bl":[175,208,391,391]},{"t":"AN","bb":[584,602,385,392],"bl":[584,602,392,392]},{"t":"on","bb":[607,618,387,393],"bl":[607,618,392,392]},{"t":"S","bb":[623,631,385,393],"bl":[623,631,392,392]},{"t":"indicating","bb":[637,683,384,395],"bl":[637,683,392,393]},{"t":"hole","bb":[688,708,384,393],"bl":[688,708,393,393]},{"t":"accumulation","bb":[712,777,385,393],"bl":[712,777,393,393]},{"t":"at","bb":[782,790,386,393],"bl":[782,790,393,393]},{"t":"th","bb":[795,810,385,393],"bl":[795,810,393,393]},{"t":"interface.","bb":[815,855,384,393],"bl":[815,855,393,393]}]},{"words":[{"t":"»","bb":[16,27,410,423],"bl":[16,27,424,424]},{"t":"C-V","bb":[40,83,409,424],"bl":[40,83,424,424]},{"t":"measurements","bb":[92,258,410,424],"bl":[92,258,424,424]},{"t":"on","bb":[267,293,412,424],"bl":[267,293,424,424]},{"t":"150nm","bb":[304,379,409,424],"bl":[304,379,424,424]},{"t":"MBE","bb":[389,434,409,424],"bl":[389,434,424,424]},{"t":"AIN/p-Si","bb":[443,539,408,428],"bl":[443,539,424,424]},{"t":"test","bb":[548,591,410,424],"bl":[548,591,424,424]},{"t":"structures","bb":[598,713,410,424],"bl":[598,713,424,424]}]},{"words":[{"t":"mmm)","bb":[8,57,431,450],"bl":[8,57,449,449]},{"t":"@","bb":[65,82,433,450],"bl":[65,82,449,449]},{"t":"OV:","bb":[92,122,433,449],"bl":[92,122,449,449]},{"t":"hole","bb":[134,174,433,449],"bl":[134,174,449,449]},{"t":"accumulation","bb":[183,315,433,449],"bl":[183,315,449,449]},{"t":"is","bb":[325,339,433,449],"bl":[325,339,449,449]},{"t":"still","bb":[348,381,433,449],"bl":[348,381,449,449]},{"t":"observed","bb":[390,480,433,449],"bl":[390,480,449,449]},{"t":"and","bb":[490,525,433,449],"bl":[490,525,449,449]},{"t":"the","bb":[534,565,432,449],"bl":[534,565,449,449]},{"t":"capacitance","bb":[574,691,433,452],"bl":[574,691,449,449]},{"t":"decreases","bb":[700,799,433,449],"bl":[700,799,449,449]},{"t":"until","bb":[808,850,433,449],"bl":[808,850,449,449]},{"t":"4V.","bb":[859,885,433,448],"bl":[859,885,449,449]},{"t":"No","bb":[895,920,433,449],"bl":[895,920,449,449]},{"t":"further","bb":[928,998,433,449],"bl":[928,998,449,449]}]},{"words":[{"t":"increase","bb":[15,96,458,473],"bl":[15,96,473,473]},{"t":"in","bb":[106,121,458,472],"bl":[106,121,473,473]},{"t":"Cp","bb":[131,156,457,476],"bl":[131,156,473,473]},{"t":"is","bb":[165,179,458,473],"bl":[165,179,473,473]},{"t":"observed","bb":[188,278,457,473],"bl":[188,278,473,473]},{"t":"at","bb":[287,306,458,473],"bl":[287,306,473,473]},{"t":"higher","bb":[315,378,457,476],"bl":[315,378,473,473]},{"t":"positive","bb":[387,462,458,476],"bl":[387,462,473,473]},{"t":"biases,","bb":[472,539,457,476],"bl":[472,539,473,473]},{"t":"indicating","bb":[549,658,457,476],"bl":[549,658,473,473]},{"t":"the","bb":[667,703,457,473],"bl":[667,703,473,473]},{"t":"suppression","bb":[711,846,457,476],"bl":[711,846,473,473]},{"t":"of","bb":[855,877,457,473],"bl":[855,877,473,473]},{"t":"e-","bb":[885,906,461,473],"bl":[885,906,473,473]},{"t":"accumulation","bb":[915,1064,457,473],"bl":[915,1064,473,473]}]},{"words":[{"t":"at","bb":[14,36,483,497],"bl":[14,36,497,497]},{"t":"the","bb":[43,79,481,497],"bl":[43,79,497,497]},{"t":"interface","bb":[88,187,481,497],"bl":[88,187,497,497]},{"t":"(an","bb":[196,227,481,501],"bl":[196,227,497,497]},{"t":"increase","bb":[237,319,482,497],"bl":[237,319,497,497]},{"t":"in","bb":[328,343,482,497],"bl":[328,343,497,497]},{"t":"the","bb":[353,384,481,497],"bl":[353,384,497,497]},{"t":"positive","bb":[394,469,482,501],"bl":[394,469,497,497]},{"t":"bias","bb":[479,517,481,497],"bl":[479,517,497,497]},{"t":"voltage","bb":[526,598,481,501],"bl":[526,598,497,497]},{"t":"regime","bb":[608,676,482,501],"bl":[608,676,497,497]},{"t":"initiated","bb":[685,764,481,497],"bl":[685,764,497,497]},{"t":"by","bb":[775,796,481,501],"bl":[775,796,497,497]},{"t":"carrier","bb":[805,870,482,497],"bl":[805,870,497,497]},{"t":"injection","bb":[879,962,482,501],"bl":[879,962,497,497]}]},{"words":[{"t":"originating","bb":[14,120,506,525],"bl":[14,120,521,521]},{"t":"from","bb":[130,175,506,521],"bl":[130,175,521,521]},{"t":"an","bb":[185,207,510,521],"bl":[185,207,521,521]},{"t":"inversion","bb":[218,306,506,521],"bl":[218,306,521,521]},{"t":"channel","bb":[315,391,506,521],"bl":[315,391,521,521]},{"t":"formed","bb":[401,471,506,521],"bl":[401,471,521,521]},{"t":"between","bb":[481,564,506,521],"bl":[481,564,521,521]},{"t":"AIN","bb":[573,605,506,521],"bl":[573,605,521,521]},{"t":"and","bb":[615,650,506,521],"bl":[615,650,521,521]},{"t":"the","bb":[660,691,506,521],"bl":[660,691,521,521]},{"t":"p-Si","bb":[700,738,506,525],"bl":[700,738,521,521]},{"t":"substrate).","bb":[748,855,506,525],"bl":[748,855,521,521]},{"t":"This","bb":[864,910,506,521],"bl":[864,910,521,521]},{"t":"e-","bb":[919,940,510,521],"bl":[919,940,521,521]},{"t":"channel","bb":[949,1035,506,521],"bl":[949,1035,521,521]},{"t":"is","bb":[1045,1062,506,521],"bl":[1045,1062,521,521]}]},{"words":[{"t":"responsible","bb":[15,144,530,550],"bl":[15,144,546,546]},{"t":"for","bb":[151,183,530,546],"bl":[151,183,546,546]},{"t":"the","bb":[191,227,530,546],"bl":[191,227,546,546]},{"t":"vertical","bb":[235,317,530,546],"bl":[235,317,546,546]},{"t":"leakage","bb":[327,414,530,550],"bl":[327,414,546,546]},{"t":"current","bb":[422,504,531,546],"bl":[422,504,546,546]},{"t":"in","bb":[513,531,530,546],"bl":[513,531,546,546]},{"t":"the","bb":[540,576,530,546],"bl":[540,576,546,546]},{"t":"buffer","bb":[585,652,530,546],"bl":[585,652,546,546]},{"t":"structure.","bb":[661,770,531,546],"bl":[661,770,546,546]},{"t":"oe","bb":[924,982,548,555],"bl":[924,982,546,546]}]},{"words":[{"t":"mmm)","bb":[9,58,552,572],"bl":[9,58,572,571]},{"t":"C-V","bb":[72,115,555,570],"bl":[72,115,570,570]},{"t":"profile","bb":[124,195,554,574],"bl":[124,195,570,570]},{"t":"shows","bb":[203,274,554,570],"bl":[203,274,570,570]},{"t":"no","bb":[283,309,558,570],"bl":[283,309,570,570]},{"t":"hysteresis","bb":[318,432,554,574],"bl":[318,432,570,570]},{"t":"(between","bb":[441,533,554,574],"bl":[441,533,570,570]},{"t":"to/back-sweeps):","bb":[542,714,554,574],"bl":[542,714,570,570]},{"t":"high","bb":[726,772,554,574],"bl":[726,772,570,570]},{"t":"AIN/Si","bb":[781,854,554,573],"bl":[781,854,570,570]},{"t":".(","bb":[865,882,558,572],"bl":[865,882,570,571]},{"t":"rags","bb":[901,961,548,579],"bl":[901,961,570,571]},{"t":"gudlivy.","bb":[973,1055,548,579],"bl":[973,1055,571,570]}]}]
ocr_status: 2
ocr_error: 
ocr_driver_id: 1
type_: 4