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ocr_text: Issues for nanoscale MOSFET (1)\n» Reverse bias-pn junction leakage current = =\nFor heavily doped pn junction of drain/source and substrate regions, the band-to- en y\nband tunneling (BTBT) effect dominates the reverse bias leakage current. Inband- = oN [ow\nto-band tunneling, electrons tunnel directly from the valence band of the p region gach hie\nto the conduction band of the n region. ree\n» Subthrehold leakage current a\nWhen 0 < Ves < Vy, © the transistor is biased in the subthreshold or weak inversion\nregion and the concentration of minority carriers is small but not zero. ) Sub threshold leakage\n» Drain-Induced Barrier Lowering (DIBL) Song\nSubthreshold leakage current is mainly due to drain-induced barrier lowering. In -—\nshort channel devices, the depletion region of drain and source interact with each . BTBT leakage\nother and reduce the potential barrier at the source. The source is then able to Vilanos band\ninject charge carriers into the surface of the channel resulting in subthreshold ance a =\nleakage current (pronounced in high drain voltages and short channel devices).\nVen\n> Vu Roll Off\nVth reduces due to channel length reduction. The drain and source depletion 1\nregion enter further into the channel length, depleting a part of the channel. ardh ol?)\nDue to this, a lesser gate voltage is required to invert the channel reducing the hie]\nthreshold voltage. The reduction in threshold voltages increases the subthreshold\nleakage current as the subthreshold current is inversely proportional to the\nthreshold voltage. TR\nPulse Summer School, Epitaxy Bases & Promises, Porquerolles, 2-8 July 2021 9%
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