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body_diff: "[{\"diffs\":[[1,\"<html>\\\r\\\n<head>\\\r\\\n  <title>带你轻松了解半导体CIM系统之EAP (四)</title>\\\r\\\n  <basefont face=\\\"微软雅黑\\\" size=\\\"2\\\" />\\\r\\\n  <meta http-equiv=\\\"Content-Type\\\" content=\\\"text/html;charset=utf-8\\\" />\\\r\\\n  <meta name=\\\"exporter-version\\\" content=\\\"YXBJ Windows/608924 (zh-CN, DDL); Windows/10.0.0 (Win64); EDAMVersion=V2;\\\"/>\\\r\\\n  <meta name=\\\"content-class\\\" content=\\\"yinxiang.peso.superNote\\\"/>\\\r\\\n  <meta name=\\\"application-data:yinxiang.noteLayout\\\" content=\\\"{\\\"lineSpace\\\":\\\"recommend\\\",\\\"paragraphSpace\\\":\\\"recommend\\\"}\\\"/>\\\r\\\n  <style>\\\r\\\n\\tbody, td {\\\r\\\n\\t  font-family: 微软雅黑;\\\r\\\n\\t  font-size: 12pt;\\\r\\\n\\t}\\\r\\\n  </style>\\\r\\\n</head>\\\r\\\n<body>\\\r\\\n<a name=\\\"44140\\\"></a>\\\r\\\n<h1>带你轻松了解半导体CIM系统之EAP (四)</h1>\\\r\\\n\\\r\\\n<div><span style=\\\"\\\"><div style=\\\"max-width: 700px;\\\"><p></p><div style=\\\"--en-blockquote: true; box-sizing: border-box; border-left: 3px solid #b4c0cc; background-position: initial initial; background-repeat: initial initial;\\\"><div>原文链接: <a href=\\\"http://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484767&amp;idx=1&amp;sn=68d5af51b79bfb2d3004234d7270a037&amp;chksm=9688372a1059741ad76cfe522274a20cd8407adee3371e46d96de8bce59925f861da37f4e520&amp;mpshare=1&amp;scene=1&amp;srcid=0531bKXaPquilaqIO1H3pvsj&amp;sharer_shareinfo=ded5fd36b7813c475197494591e16bc4&amp;sharer_shareinfo_first=ded5fd36b7813c475197494591e16bc4#rd\\\"><span>http://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484...</span></a></div></div><p></p><div style=\\\"\\\"><div><div><div><span style=\\\"\\\">原创</span><span><span style=\\\"\\\">计算机集成</span></span><span><a style=\\\"\\\"> 计算机集成 </a></span><span><em></em></span></div><div style=\\\"\\\"><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgb(0,0,0); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span>                                                                                                                                 点击上方蓝字&quot;</span></em></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(87, 107, 149); __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span>计算机集成</span></em></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span>&quot;，关注并设为星标</span></em></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgb(0,0,0); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span>                                                                                                                                                       专注高质量分享，与您共成长</span></em></span></p><div style=\\\"\\\"><span style=\\\"color: rgba(0, 0, 0, 0.9); letter-spacing: 0.544px; orphans: 2; text-align: left; widows: 2; -webkit-tap-highlight-color: transparent;\\\"><br/></span></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"font-weight: normal;\\\">半导体CIM系统随着晶圆厂模式的盛行也历经了几十年的时间，许多公司的CIM系统还存在架构老旧，性</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: normal;\\\">能</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"font-weight: normal;\\\">亟待优化的情况，这次和大家分享一篇澳门科技大学与IKAS在EAP新架构探索方面的一篇论文《</span></span></span><span><span style=\\\"font-weight: bold;\\\">A New Framework of the EAP System in Semiconductor</span><span style=\\\"font-weight: normal;\\\">》，以下会基于英文原版翻译与加入个人理解做一些修改。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong><span style=\\\"color: rgba(0, 0, 0, 0.9); letter-spacing: 0.034em; font-style: normal; font-weight: normal;\\\"><span style=\\\"\\\">作者：</span></span></strong><span style=\\\"color: rgba(0, 0, 0, 0.9); letter-spacing: 0.034em; font-style: normal; font-weight: normal;\\\"><span style=\\\"\\\"> Tairan Song, Yan Qiao, Yunfang He, Jie Li, Naiqi Wu, Bin Liu</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"letter-spacing: 0.544px; -webkit-tap-highlight-color: transparent;\\\"><span><span style=\\\"font-weight: normal;\\\">机构：</span></span></strong></p><div style=\\\"\\\"><span style=\\\"color: rgba(0, 0, 0, 0.9); letter-spacing: 0.034em; font-style: normal; font-weight: normal;\\\"><span style=\\\"\\\">1. 澳门科技大学系统工程研究所与智能科学与系统协同实验室</span></span></div><div style=\\\"\\\"><span style=\\\"color: rgba(0, 0, 0, 0.9); letter-spacing: 0.034em; font-style: normal; font-weight: normal;\\\"><span style=\\\"\\\">2. 埃克斯工业科技有限公司</span></span></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><br/></span></p><h2 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">论文摘要</span></span></h2><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">在现代半导体制造中，计算机集成制造系统（CIM）在自动化方面扮演着至关重要的角色，并拥有大量的软件系统。其中，设备自动化程序（EAP）是支持各类设备互联的基础系统之一。对于传统的EAP而言，其通信和逻辑模型是紧密耦合的。EAP中任何异常的发生都可能导致EAP出问题，从而使得所有设备都无法访问。此外，传统EAP通常只能处理少数几种机台</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">。半导体工厂中随着扩产，入驻的机台也越来越多，使得EAP的变得难以承受。</span></span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">因此</span></span><span><span style=\\\"\\\">，工厂迫切需要解决传统EAP的这些问题。为此，本研究设计了一种新的分布式EAP系统框架，采用新技术来增强EAP的可用性和稳定性。此外，这种设计理念使得分布式EAP系统更具兼容性和可扩展性。并且，随着通信和大数据技术的发展，该EAP系统可以进行升级。我们进行了实验来验证所设计的分布式EAP系统的稳定性。</span></span></span></p><h2 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">1. 引言</span></span></h2><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在半导体制造领域，自20世纪90年代初以来，计算机集成制造（CIM）系统通过各种控制软件系统和传感器，帮助晶圆厂提高了生产效率和晶圆质量。借助CIM，许多任务，例如在半导体生产机台上上传和更改Recipe，都可以自动执行，而无需工程师手动控制。这极大地将工程师从复杂繁琐的日常工作中解放出来。此外，它还可以避免因在</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">半导体生产机台上的人为不当操作而导致的晶圆质量问题和机台故障。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">CIM最早由Joseph Harrington博士于20世纪70年代初提出，它是一种利用计算机控制整个生产过程的制造理念。通过这种方式，不同的操作可以很好地同步，从而大大缩短了过程的周期时间。此外，CIM使制造过程更不容易出错。据本研究作者所知，大多数半导体工厂都安装了相关的软件系统来支持CIM，例如制造执行系统（MES）、物料控制系统（MCS）、自动化物料搬运系统（AMHS）、配方管理系统（RMS）和EAP。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">MES是CIM的核心部分，帮助工程师管理和控制制造环境和流程。MES因行业而异，甚至在同一家公司的不同工厂之间也有所不同，因为它需要精确反映涉及各种细节的制造流程。IBM和应用材料公司是半导体工厂MES市场的两大主要供应商。他们可以定制模式提供MES产品。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">MCS负责半导体工厂内部的物料运输。实际上，MCS是根据MES下达的交付任务来运作的。MES将包括起始位置、结束位置和优先级在内的交付信息发送给MCS。然后，MCS与存储设备和天车系统协作，完成MES下达的任务。AMHS负责管理和控制运输工具，例如工厂中的存储设备和天车系统。实际上，AMHS总是与MCS合作，共同负责物料运输的整个过程。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">RMS的主要作用是管理工厂中的Recipe（配方）。在现代半导体工厂中，有超过一千台用于晶圆制造的机台，例如光刻机，蚀刻机，清洗机台等等。不同的产品可能在同一机台中使用不同的</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Recipe进行制造。因此，可能需要管理数千个</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Recipe。由于涉及如此多的机台和待处理的晶圆产品，手动管理如此大量的</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Recipe极其困难。RMS的职责是收集和管理</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Recipe，以便确定何时以及应将哪个</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Recipe应用于特定的机台。实际上，RMS与EAP合作，在需要时向机台下</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Recipe。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP是一个基础软件系统，直接与制造机台通信，并将生产相关信息传递给更高级别的应用程序，如RMS和MES。EAP通常基于SECS I、SECS II、GEM和HSMS协议进行开发。EAP的性能对CIM中其他系统（如RMS、APC和MES）在半导体制造中的效率有显著影响。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">如图1所示，传统的EAP充当生产机台和CIM中软件系统之间的单一集线器。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/cc5a2ec0d1ff4f4383bc79ffcc4f4579\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"\\\">图1 传统EAP架构</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">随着工厂对数据分析需求的不断增长，传统的EAP由于以下原因无法满足当前应用程序对数据收集和信息传递的需求。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(1) 通信模型和逻辑模型之间的紧密耦合使得EAP臃肿且不稳定。例如，EAP中任何异常的发生都可能导致EAP故障，从而使得机台与EAP断连； (2) 由于EAP是多年前开发的，部署EAP需要许多软件依赖项，并且系统运行在较旧的操作系统上； (3) 传统EAP的设计较少考虑可扩展性问题，导致其只能处理少数机台。工厂中生产机台的扩充使得对EAP的性能难以承受。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">随着通信和软件技术的不断进步，例如物联网（IoT）、云计算、分布式技术、大数据、容器技术以及消息队列技术，可以设计一种新型EAP来解决传统EAP的上述问题。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">据我们所知，关于EAP的研究相对较少。然而，这些研究并未专注于解决上述EAP系统的问题。此外，目前半导体工厂采用传统的EAP系统与生产机台进行通信，而上述问题仍未得到解决。解决这些问题非常重要，这也激发了我们进行这项工作。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在这项工作中，我们引入了一种新的分布式EAP框架。本文提出的EAP与传统EAP之间的本质区别在于，我们提出的EAP是松散耦合的。为了构建这种松散耦合的EAP系统，我们重新设计了其架构和工作机制。在新的架构中，<span style=\\\"font-weight: bold;\\\">EAP由两个主要平台组成，即管理平台和基础平台。同时，采用消息队列进行异步通信。通过这种方式，所有模型（例如管理模型、业务逻辑模型和API模型）、中间件和EAP驱动程序都分布并部署在各种服务器上。</span>这表明所提出的EAP的任何部分都可以独立运行。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在这样的框架下，可以增强EAP的几个性能指标。首先是抗干扰能力。在分布式架构下，整个EAP系统可以更加健壮和稳定。EAP系统中的一个小异常不会影响整个系统，与传统EAP系统进行比较，这极大提高了EAP系统的鲁棒性。其次，在容器技术的优势下，EAP系统的部署和维护变得更加容易，并且适用于更多的操作系统。第三，通过集成分布式架构和消息队列，整个EAP系统可以根据需要进行扩展。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">本文的其余部分组织如下。第2节介绍了分布式EAP系统的实施框架。然后，基于该框架，在第3节中描述了系统每个部分的详细操作场景。最后，进行了实验以验证系统性能。</span></span></p><h2 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">2. 分布式EAP系统的实施框架</span></span></h2><h3 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>2.1. IF-DEAPS的设计理念</span></h3><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">我们根据以下三个原则设计了一种新的分布式EAP系统（IF-DEAPS）实施框架，以确保整个系统的稳定性并满足实际生产条件下的性能边界：</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(1) IF-DEAPS的架构应该是松散耦合的； (2) 需要先进的软件技术来促进其松散耦合，并降低部署和管理成本； (3) IF-DEAPS必须具有良好的可扩展性，以满足智能制造的要求。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\"><span style=\\\"font-weight: bold;\\\">松散耦合是设计良好的分布式EAP系统的重要因素。</span>IF-DEAPS的松散耦合架构意味着IF-DEAPS的所有功能平台应最大限度地提高它们之间的独立性。此外，如果一个有效的模型或平台在逻辑上是紧密耦合的，那么除了关键的同步情况外，大多数通信都应根据消息队列执行以实现解耦。凭借IF-DEAPS的松散耦合架构，可以根据需要独立部署服务或模型，从而增强系统的可伸缩性、灵活性和开放性。同时，IF-DEAPS可以避免单个节点故障对整个系统造成的严重影响，从而具有高度的容错性。因此，整个系统可以从松散耦合中受益。此外，这种设计模式符合当前软件开发的范式。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">为了促进松散耦合，并降低部署和管理成本，IF-DEAPS采用了最新的先进技术，即容器技术。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">近年来，容器技术一直是软件行业的热门话题。Docker作为一种软件平台，是容器技术清单中最受欢迎的技术之一。Docker提供了一个称为容器的标准化单元来运行镜像，开发人员可以将应用程序及其相关依赖项打包到其中。这种机制使得在各种场景（例如开发、测试和生产）中构建、传输、部署和维护应用程序变得更加容易。各种角色（包括开发人员、测试人员、运维工程师等）都可以从中受益。他们可以专注于自己的职责，而将其他部分视为黑盒。例如，测试人员可以简单地构建一个容器，并专注于接口测试和黑盒测试，而运维工程师可以花更多时间在（互联网技术）基础设施和监控系统运行性能上。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">良好的可扩展性可以使IF-DEAPS更好地匹配智能制造的要求。在智能制造中，分布式EAP系统与制造工具连接的要求因工厂而异。一些工厂只需要在某些核心制造区域配备少量精密仪器来获取一些基本数据，而另一些深入智能制造的工厂则需要尽可能多地连接工厂中的所有制造工具以进行数据收集。可扩展性应主要从以下三个方面考虑：（1）连接可扩展性；（2）业务逻辑可扩展性；（3）管理可扩展性。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">连接可扩展性指的是，随着工厂中制造工具数量的增长，分布式EAP系统可以与生产机台进行物理连接，而不受架构限制。业务逻辑可扩展性意味着用户部门的业务逻辑（即需求）可以轻松集成到系统中，准确转换，并在制造过程中正确执行。例如，Recipe1和2应用于工具中的一种生产机台的不同场景。在机台的实际操作中，应根据晶圆制造场景（即晶圆制造过程）正确部署它们。管理可扩展性意味着随着连接的增加，系统应该有一个地方可以正确管理和维护连接。</span></span></p><h3 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>2.2. 架构</span></h3><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">根据上述设计原则，IF-DEAPS的系统架构如图2所示，其中包括一个管理平台、一个消息队列和一个基础平台。在该架构中，相关生产机台和传感器被省略了。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/360953a6916945c0a7dc7e26e1159e14\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图2 </span></span><span style=\\\"text-align: center; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">IF-DEAPS的系统架构</span></span></span></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在该架构中，管理平台充当大脑来控制和监控整个系统，消息队列负责在整个系统中传递数据，就像大脑中的神经系统一样，基础平台则充当四肢来执行命令和收集数据。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">管理平台由管理模型、业务逻辑模型、监控模型、主模型、应用程序接口（API）模型和一个数据库组成。所有这些模型都可以针对不同的用途进行分类。管理模型、监控模型和主模型用于管理；业务和API模型用于执行与业务相关的任务；数据库用于跨管理平台存储模型的数据以及可提供给其他系统的中间数据。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">管理平台上组件的排序不仅基于功能，还基于系统交互。与业务相关的部分是与用户和外部系统交互的端口。因此，它应该是独立的，并提供直接、清晰的系统功能。管理平台的核心功能是监控和管理分布式EAP Driver的基础平台。为了有效地实施这些关键功能，在设计的IF-DEAPS中引入了Master Model和代Agent Model。Agent Model部署在每个EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver之前，并帮助部署、配置和监控相关</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver的健康状况。代理模型的数量等于</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver的数量。Master Model负责与Agent Model通信以传输操作命令并收集管理模型所需的数据。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在图2所示的IF-DEAPS中，消息队列在当前软件开发行业中被广泛使用。Kafka 、ActiveMQ、RabbitMQ和RocketMQ是该领域最受欢迎的几种。通过分析这些消息队列的优缺点，Kafka被选为此架构中的消息队列。说服我们使用Kafka的原因总结如下：（1）Kafka的设计是一种自然适合高并发场景的分布式架构；（2）实施期间有良好的文档和社区支持；（3）支持多种开发语言，使得该框架没有语言限制。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">IF-DEA</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">PS的基础平台是一个松散的边缘平台，用于容纳</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver。该平台的驱动程序直接连接到生</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">产机台，以通过不同的协议（例如SECS/GEM、HTTPS等）收集数据和控制机台。如上所述，平台上的</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Agent Model与</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Master Model配对，用于监控和管理</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver。接下来将描述IF-DEAPS的详细操作机制。</span></span></p><h2 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">3. 操作机制</span></span></h2><h3 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.1. 基础平台</span></h3><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">IF-DEAPS的基础平台架构如图3所示。EAP的基本功能是从机台收集晶圆处理数据，并向机台下各种命令。如图3所示，每个</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver都与机台和消息队列进行双向通信。</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Agent Model与相应的</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver关联，通过配置</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver并监控</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver的健康状况等方式，确保其保持良好状态。基础平台的典型操作场景，包括命令执行场景、数据收集场景、</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver配置场景和</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver健康状况监控场景，将讨论如下。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/291c68dec5954e92ae08aa192e5bfcac\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图3. 基础平台架构</span></span></p><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><br/></span></p><h4 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.1.1. 命令执行和数据收集方案</span></h4><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">分布式EAP系统的命令执行和数据收集方案如图4所示，操作机制包括以下四个步骤：</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(1) 消息队列将数据收集命令发给到</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver。此类命令必须提供相应的数据信息，例如生产机台上wafer的processing参数、收集时间或其他特定要求的参数； (2) 根据半导体相关协议，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver向生产机台下达相关命令； (3) 机台执行命令后，将数据解析回</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver； (4) </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver收到数据后，将数据转换为JSON格式并将其发给消息队列。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">步骤（1）和（2）共同构成命令执行方案，而步骤（3）和（4）共同构成数据收集方案。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/564c6136d0864231865842c85f1861ea\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图4. 命令执行和数据收集方案的操作机制</span></span></p><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><br/></span></p><h4 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.1.2. EAP Driver配置方案</span></h4><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP Driver配置方案如图5所示。以下五个步骤构成了此方案的操作机制：</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(1) 消息队列将更新的配置命令发给</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Agent Model； (2) </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Agent Model将此更新命令发送给相应的</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver，然后</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver进入更新模式； (3) </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Agent Model从消息队列中获取最新的配置信息； (4) </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Agent Model更新</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver配置文件； (5) 更新成功后，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Agent Model将</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Driver转为正常模式，并向消息队列发送反馈。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/fcc74c9a3c3b47d7a843c653adb4b2ea\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图5. EAP Driver配置方案</span></span></p><h4 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.1.3. EAP Driver健康状况监控方案</span></h4><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP Driver的健康状况监控是在部署分布式EAP Driver之后进行的，并一直持续到EAP Driver终止。EAP Driver部署是指在服务器上初始化EAP Driver以及初始设置、配置和默认参数。EAP Driver健康状况监控方案如图6所示，此方案的操作机制包含以下四个步骤：</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(1) EAP Driver部署执行后，EAP Driver向消息队列发送成功消息；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(2) 相应的关联Agent Model从消息队列获取成功消息；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(3) Agent Model检查健康状况数据，例如来自EAP Driver环境的应用程序进程ID、磁盘使用情况、网络速度等；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(4) Agent Model将健康状况数据发送到消息队列。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">根据所需的监控周期，Agent Model定期重复步骤（2）至（4）。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/88c68895c2884b69984efc89dfe4b7f6\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图6. EAP健康状况监控方案</span></span></p><h3 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.2. 消息队列</span></h3><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">消息队列在两个系统之间实现了异步数据通信机制。消息队列的主要功能是数据通信，尤其适用于解耦的微服务架构。一组数据在逻辑上被视为一条消息，它们存储在队列中直到被处理。通常，消息队列技术可用于解耦重量级数据处理、缓冲工作和批处理工作，以及作为负载均衡器。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在这项工作中，Apache Kafka被选为IF-DEAPS中的消息队列。其背后的原因可以分为三点：（1）分布式结构；（2）数据流管道功能；（3）容器化且易于安装。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Kafka是一个多功能、分布式和复制的框架，通过发布-订阅过程实现消息队列。它是一个由社区维护的开源软件。在操作机制中，发布者被称为“生产者”，订阅者被称为“消费者”。生产者提交数据，消费者接收数据。Kafka的一般基础架构如图7所示。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/54c79ba157c141a887d2704a7ac51cac\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图7. Kafka技术架构</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">如图7所示，生产者将消息发送到Topic。消息被称为数据。生产者一次只能将数据发送到一个Topic。此外，生产者能够异步和点对点地发送消息。消费者从Topic读取消息。他们维护分区偏移以消耗来自Topic的数据。实际数据以键值格式存储。然后，数据是不可变的。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Topic是多个消费者订阅的数据流。这是Kafka提供的最高级别抽象。分区是一个有序的、不可变的数据序列，不断附加。它不能在磁盘上进一步分裂。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">高可用性由分布式架构执行，因为数据可以从多个分区获得。此外，Kafka中的容错也是通过将分区数据复制到其他代理（称为数据副本）来实现的。每个代理持有一个或多个分区，每个分区都可以是副本或Topic的领导者。在Kafka机制中，读写操作通过</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Topic的领导者进行，领导者与副本进行数据更新协调。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">从图2可以看出，Kafka被用作EAP管理平台和这项工作的基础平台之间的主要数据管道。基础平台是数据生产者，而EAP管理平台则充当数据消费者。在内部，传输的数据在逻辑分区组中获得一个Topic进行存储。分区是数据的实际存储，数据分布在不同机器内整个集群的多个分区上。在外部，消息队列充当连接两个独立系统（即EAP管理平台和基础平台）的桥梁，以形成整个分布式EAP系统。</span></span></p><h3 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.3. 管理平台</span></h3><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">管理平台架构如图8所示。该平台是用户或其他系统的端口，这些外部部分被添加到IF-DEAPS中。Web UI和应用程序是图形用户界面，可帮助用户管理分布式EAP系统并通过该系统操纵晶圆制造工具。由于EAP系统是收集数据和操纵生产机台的基础，因此其他系统（例如APC、RMS和故障检测与分类（FDC）系统）需要通过API从IF-DEAPS获取数据。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/c4613b72dafa42989601a93d5bc850a8\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图8. 管理平台架构</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在管理平台中，管理模型、业务逻辑模型和API模型已完全或部分导出到Web UI或其他系统以提供服务。Master Model、监控模型和数据库信息主要支持服务的执行。例如，当用户在Web UI中触发数据收集服务时，Web UI然后将相关参数解析到管理模型。管理模型随后分析并将其转换为命令。命令发送到Master Model，Master Model负责执行此命令。接下来将讨论一些典型的操作场景，包括数据检查场景、更新配置场景以及检查EAP Driver状态场景。</span></span></p><h4 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.3.1. 数据检查方案</span></h4><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在数据检查方案中，当用户想要检查设备数据（包括实时和历史数据）时，如果用户查询实时数据，则数据源应该是EAP Driver；如果用户查询历史数据，则数据源应该是数据库。详细方案如图9所示，操作机制包含以下步骤：</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(1) 用户发出命令来检查一系列数据。此命令可以通过应用程序、Web UI或其他调用API服务的系统发出。此外，如果命令由其他系统发送，则传递到API模型；而如果命令由应用程序和Web UI发送，则传递到业务逻辑模型；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(2) 如果命令传递给API模型，则此命令将转移到业务逻辑模型；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(3) 业务模型分析命令，即确定所需数据是实时数据还是历史数据。如果数据是实时的，则业务模型将此命令发送到Master Model以实时从EAP Driver获取数据；如果数据是历史性的，则业务模型将此查询命令发送到数据库；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(4) 如果数据库接收此命令，则可以解决查询并将正确的数据发送到业务逻辑模型；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(5) 如果Master Model接收此命令，则分析命令，并具体说明适当的EAP Driver，用EAP参数重新包装命令，然后将命令发送到消息队列中的主题；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(6) 从EAP Driver收集所需数据并将其发送回后，消息队列将数据推向Master Model；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(7) Master Model将数据发送到业务逻辑模型；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(8) 收到数据后，业务逻辑模型根据适当的业务逻辑操纵数据，并将其相应地发送回应用程序、Web UI或API模型；</span></span><span><br/></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">(9) 如果API模型收到所需的数据，它将从业务逻辑模型向其他系统提供数据。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/d12861256d9c422db1f124535c93d84a\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图9. 管理平台中的数据检查方案</span></span></p><h4 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.3.2. 配置更新方案</span></h4><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">配置更新是指用户想要更改与晶圆制造机台类型相关的特定EAP Driver或一组EAP Driver的配置的情况。此场景如图10所示。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/99f98a3cf9814c68bc6da679ab4ef5be\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图10. 配置更新方案</span></span></span></p><div><span><br/></span></div><h4 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.3.3. EAP Driver状态检查方案</span></h4><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP Driver状态检查方案是一个持续监控的场景。在实际生产环境中，所有EAP Driver都持续受到监控。在以下描述中，仅引入一个分布式EAP Driver的状态检查方案。该方案如图11所示。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/ccdb85d355fb4423959c968c3d6faec7\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"text-align: center;\\\"><span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">图11. EAP状态检查方案</span></span></span></p><div><span><br/></span></div><h3 style=\\\"box-sizing: border-box; color: rgb(79,79,79); font-weight: 600;\\\"><span>3.4. 提出的分布式EAP系统的优势</span></h3><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">与传统EAP服务相比，在适当的业务逻辑下与生产机台的通信和操纵在基础平台和管理平台上完全实施。此外，由于IF-DEAPS的分布式架构，适应性和可伸缩性得到了增强。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">适应性的增强意味着可以用较低的成本处理异常。对于传统的EAP，任何异常，例如环境问题或传统EAP中的错误，都可能导致相应的机台离线。如果发生这种情况，则需要工程师花费大量时间来解决问题。但是，在IF-DEAPS中，如果一个EAP Driver出现故障，则只有连接到该驱动程序的机台会受到影响，而其他机台仍然可以正常工作。此外，由于采用了容器技术，可以快速重新部署发生故障的EAP Driver，从而最大限度地减少对生产的影响。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">可伸缩性的增强意味着IF-DEAPS可以轻松适应工厂中机台数量的变化。当需要连接新的机台时，只需部署一个新的EAP Driver并将其注册到管理平台即可。当不再需要某个机台时，可以轻松地从系统中删除相应的EAP Driver。这种灵活性使得IF-DEAPS能够适应不断变化的生产需求。</span></span></p><h2 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">4. 性能评估</span></span></h2><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">分布式EAP系统性能测试的目的是评估整个系统的稳定性以及在实际生产条件下性能边界。在此工作中，使用Jmeter工具进行这样的性能测试。表1列出了两个相应的短期和相对长期测试场景。表2显示了测试环境。此外，还使用9个指标来评价EAP系统的性能，包括：</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（1）请求成功比率：成功接口请求响应的总请求比率；</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（2）CPU消耗(CPUC)：EAP系统性能测试期间的CPU资源消耗；</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（3）内存消耗(MC)：EAP系统性能测试期间的内存资源消耗；</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（4）TB-90%：数据请求响应时间的90％的时间边界；</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（5）TB-95%：数据请求响应时间的95％分位数的时间边界；</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（6）TB-99%数据时间边界：不低于99％请求响应时间的数据的时间边界；</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（7）最小时间消耗（MinTC）：接口响应的最小消耗时间；</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（8）最大时间消耗(MaxTC)：接口响应的最大耗时；</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（9）平均时间消耗(ATC)：接口响应的平均时间。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">测试场景及测试环境：</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/15f66729781b474ea92f69519d1ccbea\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"text-align: center;\\\"><img src=\\\":/7ed13bb79f804fe896d4e0713d4d370d\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">对于场景A和B，分别对EAP系统进行24小时、3×24小时的9个关键接口请求-响应数据观察性能测试。场景A和B的具体测试结果总结在表3和表4中。 </span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/061f1db185454dd5aa2fdda1e420c16a\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"text-align: center;\\\"><img src=\\\":/7450ad870d7f46cebf262259e2af10e5\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">如表3和表4所示，所有接口的请求成功率达到100%，同时CPU和内存资源消耗控制在70％以内，在应用中处于安全可控范围。具体来说，从表3和表4可以看出，对于所有接口而言，TB-90％、TB-95％和TB-99％均在毫秒级范围内，且A场景下参数设置及参数比例下的值大于B场景下对应的值，这表明在相对短时间的A场景（即A场景中的数据响应时间不低于90％、95％和99％的时间边界）下，其数据响应时间比B场景（即B场景为相对较长时间段）要长；因此，本文提出的分布式EAP在更长的时间内具有更加稳定的性能，因为较长的数据响应时间占总响应时间的比例下降了。 </span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">此外，大多数情况下，在场景A中MinTC的值比在场景B中的大，而每个接口下场景B的最大时延（MaxTC）的值大于场景A。这种现象的原因是，在更长的时间段内，极端情况下的异常数据收集概率更高。请注意，表3或表4中最大时延值代表的是网络抖动引起的常见异常事件。然而，从表3和4可以看出，除了参数设置和参数比例设置接口外，场景A和场景B之间的ATC值没有显著差异。对于参数设置和参数比例设置接口，场景B的ATC值远小于场景A。这表明分布式EAP可以在更长时间内实现更加稳定的表现。 </span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">综上所述，根据表3和表4中RSR、CPUC、MC、TB-99% 和ATC的测试结果总结得出，在两种场景下提出的分布式EPA系统均具有良好的性能。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">此外，参数接口对于分布式EAP系统管理平台中的组件获取生产机台的参数数据至关重要。它是生产环境中被频繁调用的接口之一。从图12和图13可以看出，代表参数接口的浅绿色线的变化通常比较平滑，这表明分布式EAP系统运行正常，并且在响应方面表现良好。偶尔也会出现一些浅绿色线的针状跳动现象，这些通常是由于网络问题或计算资源竞争问题造成的。请注意，它们与分布式系统本身无关。同时，即使偶尔出现问题，该系统也可以按照要求正确地进行响应。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">表3和表4显示了所提出的分布式EAP系统的稳定性。此外，还获得了与目前采用的来自其他三家半导体制造软件公司的EAP系统进行比较的一些定量结果。在保密和商业法规下，我们无法披露其他软件公司的名称，并将其命名为公司A、B和C。比较是在中国的一家半导体工厂的同一生产线中进行的。比较结果如表5所示，在其中TPS表示每秒事务数。由于与半导体厂签订了非披露协议，因此不能展示详细的定量比较结果。然而，每个方法可以达到的TPS数量级如表5所示。从表5可以看出，IF-DEAP在TPS效率方面明显优于其他方法。   </span></span></div><div style=\\\"text-align: center;\\\"><img src=\\\":/472d12c25baa41579e524ed9fe6f0727\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"text-align: center;\\\"><img src=\\\":/7e23e1ce86e04933aaa2dbbaffd9856c\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"text-align: center;\\\"><img src=\\\":/ccc8468cb0e146648130df07201796d8\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div><span><br/></span></div><h2 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">5. 结论</span></span></h2><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">EAP系统被广泛用于互连制造设备，从而将相关生产信息解析并传递给半导体工厂的上层应用。它们也是MES与机台交互的桥梁，在RMS、APC等其他系统的高效运行中发挥着重要作用。传统EAP作为单一节点互连指定数量的机台，缺乏可扩展性。其通信模型与逻辑模型紧密耦合，导致系统臃肿且不稳定。此外，传统EAP已发展数十年，无法兼容可提升系统性能的新兴技术。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">为解决这些问题，本研究设计了一种分布式EAP系统新框架：管理平台作为&quot;大脑&quot;控制监控整个系统；消息队列负责数据传输，如同大脑的神经系统；基础平台作为&quot;肢体&quot;执行指令和采集数据。在这种分布式架构下，EAP系统的微小异常不会影响整体运行。与传统系统相比，该架构显著提升了系统的健壮性。同时，分布式架构与消息队列的结合使系统可扩展性大幅增强。实验表明，所设计的分布式EAP系统在稳定性方面表现优异。未来工作将重点扩展系统对更多通讯协议的支持，并为用户提供更便捷的业务逻辑编程方式。</span></span></p><div style=\\\"text-align: left;\\\"><span style=\\\"font-weight: bold;\\\"><br/></span></div><hr style=\\\"border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1, 0.5); transform-origin: 0 0; transform: scale(1, 0.5);\\\"/><div style=\\\"box-sizing: border-box; border-width: 0px; border-style: solid; border-color: hsl(var(--border)); font-weight: bold; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span><span style=\\\"\\\">往期半导体CIM系统介绍</span></span><span>推荐阅读</span></div><ul style=\\\"list-style-type: disc;\\\"><li><div style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484363&amp;idx=1&amp;sn=3ee43fc24b54a57688bcc69968d6665e&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解什么是半导体CIM系统</span></a></span></div></li><li style=\\\"\\\"><div style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484429&amp;idx=1&amp;sn=6d121dd2c9b6b2f327f20f3b413887a8&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之MES (一)</span></a></span></div></li><li><div style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484471&amp;idx=1&amp;sn=c73ad6712fdcf031ff834c12852e53cd&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之EAP (一)</span></a></span></div></li><li><div style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484492&amp;idx=1&amp;sn=59b8b9a94dd4f7c2bc5db4810aa4557d&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之MES (二)</span></a></span></div></li><li><h1 style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484555&amp;idx=1&amp;sn=0582218dd28aaf2a2585a018a47aaefd&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">你轻松了解半导体CIM系统之EAP (二)</span></a></span></h1></li><li><h1 style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484601&amp;idx=1&amp;sn=178ff3e4cd6fab29b9e7afabb203a053&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之AMHS (一)</span></a></span></h1></li><li><h1 style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484716&amp;idx=1&amp;sn=173aee0819c37bc60df5a86d8c7792ec&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之EAP (三)</span></a></span></h1></li><li><h1 style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484742&amp;idx=1&amp;sn=21f690a14175f4982d0a78f6bbe11ab0&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之APC（一）</span></a></span></h1><div style=\\\"\\\"><span><br/></span></div></li></ul><div style=\\\"\\\"><span><br/></span></div><div style=\\\"\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: bold;\\\">参考</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: bold;\\\">资</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: bold;\\\">料:</span></span></div><div style=\\\"\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: normal;\\\">- </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: normal;\\\">A New Framework of the EAP System in Semiconductor</span></span></div><div><span><span style=\\\"font-style: italic;\\\"></span></span></div><div><span><span style=\\\"font-style: italic;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"font-style: italic;\\\">关注一下，后续有更多精彩内容~<img src=\\\":/45abcb04aa3945b8898108b92c4c4895\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; display: inline-block; width: auto; vertical-align: middle; background-size: cover; height: auto;\\\" width=\\\"auto\\\"/></span></span><div><span><span style=\\\"font-style: italic;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><br/></span></div></div></div></div><div><div><div><div style=\\\"display: flex;\\\"><a>阅读原文</a></div></div></div></div></div></div></div></span>\\\n</div></body></html>\\u0000\"]],\"start1\":0,\"start2\":0,\"length1\":0,\"length2\":184236}]"
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updated_time: 2025-11-28T21:04:34.611Z
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