id: 8a69e4fb7a3843e2bb9ecdac5c2cba9a
parent_id: 
item_type: 1
item_id: 86636ac0ac664f37b89bd90b8ed0d0ca
item_updated_time: 1764345628709
title_diff: "[{\"diffs\":[[1,\"带你轻松了解半导体CIM系统之APC (一)\"]],\"start1\":0,\"start2\":0,\"length1\":0,\"length2\":22}]"
body_diff: "[{\"diffs\":[[1,\"<html>\\\r\\\n<head>\\\r\\\n  <title>带你轻松了解半导体CIM系统之APC (一)</title>\\\r\\\n  <basefont face=\\\"微软雅黑\\\" size=\\\"2\\\" />\\\r\\\n  <meta http-equiv=\\\"Content-Type\\\" content=\\\"text/html;charset=utf-8\\\" />\\\r\\\n  <meta name=\\\"exporter-version\\\" content=\\\"YXBJ Windows/608924 (zh-CN, DDL); Windows/10.0.0 (Win64); EDAMVersion=V2;\\\"/>\\\r\\\n  <meta name=\\\"content-class\\\" content=\\\"yinxiang.peso.superNote\\\"/>\\\r\\\n  <meta name=\\\"application-data:yinxiang.noteLayout\\\" content=\\\"{\\\"lineSpace\\\":\\\"recommend\\\",\\\"paragraphSpace\\\":\\\"recommend\\\"}\\\"/>\\\r\\\n  <style>\\\r\\\n\\tbody, td {\\\r\\\n\\t  font-family: 微软雅黑;\\\r\\\n\\t  font-size: 12pt;\\\r\\\n\\t}\\\r\\\n  </style>\\\r\\\n</head>\\\r\\\n<body>\\\r\\\n<a name=\\\"40630\\\"></a>\\\r\\\n<h1>带你轻松了解半导体CIM系统之APC (一)</h1>\\\r\\\n\\\r\\\n<div><span style=\\\"\\\"><div style=\\\"max-width: 700px;\\\"><p></p><div style=\\\"--en-blockquote: true; box-sizing: border-box; border-left: 3px solid #b4c0cc; background-position: initial initial; background-repeat: initial initial;\\\"><div>原文链接: <a href=\\\"http://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484742&amp;idx=1&amp;sn=21f690a14175f4982d0a78f6bbe11ab0&amp;chksm=961f7ddc1b9ecff842cfbdac303a6578238b7363b2952d4a72fb721e1842d84f57f3cf7a2af4&amp;mpshare=1&amp;scene=1&amp;srcid=0426lIrMDbSOomQZdPOffL2E&amp;sharer_shareinfo=abb9cd8a226a5b5f7289cb76d2f839c8&amp;sharer_shareinfo_first=abb9cd8a226a5b5f7289cb76d2f839c8#rd\\\"><span>http://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484...</span></a></div></div><p></p><div style=\\\"\\\"><div><div><div><span style=\\\"\\\">原创</span><span><span style=\\\"\\\">计算机集成</span></span><span><a style=\\\"\\\"> 计算机集成 </a></span><span><em></em></span></div><div style=\\\"\\\"><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgb(0,0,0); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span>                                                                                                                                点击上方蓝字&quot;</span></em></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(87, 107, 149); __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span>计算机集成</span></em></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span>&quot;，关注并设为星标</span></em></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgb(0,0,0); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span>                                                                                                                                                       专注高质量分享，与您共成长</span></em></span></p><div style=\\\"\\\"><span style=\\\"color: rgba(0, 0, 0, 0.9); letter-spacing: 0.544px; orphans: 2; text-align: left; widows: 2; -webkit-tap-highlight-color: transparent;\\\"><br/></span></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"font-weight: bold;\\\">APC(Advanced Process Control)，</span><span style=\\\"font-weight: normal;\\\">中文称先进制程控制系统，在半导体制造尤其是先进制程方面，APC系统可以帮助Fab提高芯片良率和生产效率，因此十分关键。</span></span></p><h2 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">APC系统概述</span></span></h2><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">APC系统在业界也称为</span><span style=\\\"font-weight: bold;\\\">R2R（Run-to-Run control）</span><span style=\\\"\\\">，APC系统的核心概念是透过晶圆在</span><span style=\\\"font-weight: bold;\\\">实际生产之前的量测机台量测值（前量）</span><span style=\\\"\\\">或是</span><span style=\\\"font-weight: bold;\\\">制程生产之后的量测机台量测值（后量）</span><span style=\\\"\\\">，对对应制程的晶圆程序的某个或某几个参数值进行实际的修正，从而起到弥补制程偏差的功效。 </span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">APC反馈大致上分为后反馈与前反馈两种。</span><span style=\\\"font-weight: bold;\\\">后反馈</span><span style=\\\"\\\">就是透过比对材料在量测机台产生的量测值与量测目标值的之间差异，再透过某种制程演算公式进行计算之后， 返回修改或补偿下一批或下下一批晶圆的程序设定参数，这种反馈方法最常用來补偿机台因为时间渐渐飘移的问题。例如薄膜区的CMP（化学机械研磨）机台的研磨板会随着时间逐渐磨损，透过APC的回馈算法可以补偿这种逐渐飘移的效应。 所谓</span><span style=\\\"font-weight: bold;\\\">前反馈</span><span style=\\\"\\\">，主要为了补偿生产之前的制程变异，透过生产之前的量测机台量测值，经由一定演算手法换算成晶圆程序的设定值，实时修正这一批晶圆的程序参数设定值，来补偿生产之前制程变异所造成的影响</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">。下图为APC反馈的简单示例。</span></span></p><div style=\\\"text-align: center;\\\"><img src=\\\":/f7b9c03d637f4e9d8d7438c48f3fde26\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"\\\">APC系统反馈示例</span></span></p><div><span><br/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">APC系统发展历史</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">APC系统最早运用在化工行业，在20世纪90年代初，化工行业为了攻克单回路控制的缺点，采取了基于模型的先进过程控制方法，也就是APC思想。后来借鉴于化工行业，食品制造，制药，光伏制造，半导体制造等行业都采取了APC这种先进过程控制方法，大大提高了产品良率及生产效率。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span><span style=\\\"\\\">在半导体领域APC系统尤为重要，以台积电南京12寸晶圆厂一期项目为例，该项目投资额度为30亿美元，规划产能为每年24万片，即月产能2万片，单片晶圆4,000左右美元前提下粗略估计每年营业额可达9.6亿美元左右，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">在</span></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">假设</span></span></span><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">初始良率90%、单片成本3,000美元</span></span></strong><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">的条件下，良率提升1%可使台积电南京12寸厂</span></span></span><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">每月至少获利20万美元，年获利240万美元</span></span></strong><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">。因此APC系统是各个FAB厂提高产能与良率的解决方案之一。</span></span></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"\\\">在</span></span><span><span><span style=\\\"\\\">半导体制造作中，APC系统的前身历来是60年代盛行的</span></span><span><span style=\\\"\\\">SPC（</span></span><span dir=\\\"ltr\\\"><span><span style=\\\"\\\">Statistical Process Control</span></span></span><span><span style=\\\"\\\">,统计过程控制）系统。SPC的一个基本工作原理是，过程参数 在很长一段时间内保持不变。然后，SPC跟踪该过程的某些</span></span><span><span style=\\\"\\\">独特、单独的指标（通常是一些晶圆状态参数），并在以指定的统计指标超过既定的控制限值时宣布该过程失控。虽然这种方法有一些既定的好处，但它的缺点是它的处理域有限，也就是格局不够，只关注一个或几个参数，以及它对问题的延迟识别，发生异常不能及时处理。</span></span></span></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"white-space: pre-wrap; color: rgb(28, 31, 35); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">随着制程越来越小，对工艺的要求也越来越高，需要检查更多的参数范围来确认工艺是否异常，需要在更短的时间内发现异常并及时调整，需要频繁测量和估算晶圆的状态参数，需要根据历史生产数据调节出适合下次的更好的参数等等，因此，传统的SPC无法满足要求，APC也逐步登上历史舞台。</span></span></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span style=\\\"white-space: pre-wrap; color: rgb(28, 31, 35); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><br/></span></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">APC系统核心功能</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span><span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">基本上</span></span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">APC</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">算是某类系统的总称，是由</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">SEMI</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">所定义与推广的技术，通常包括下列项目：</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">R2R</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（批次控制，</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Run-to-Run control</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">）、</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">FDC</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（故障侦测与分类，</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Fault Detection and Classification</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">）、</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">OEE</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">（</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">Overall Equipment Efficiency</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">）、</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">e-Diagnostic</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">等等项目</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">。不过确切的范围则很难界定，一方面是因为</span></span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">APC</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">的技术尚在不停开发中且各个FAB业务使用有所区别；另一方面</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">SEMI</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">针对</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">APC</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">的新标准也陆续制定出版。因此每个</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">FAB</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">厂对于</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">APC</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">的说法就有些差异，例如将</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">FDC</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">归类为独立的EES系统</span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">而不是</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">APC</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">。此外，</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">APC</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">中的子系统规格对于各个</span></span><span lang=\\\"EN-US\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">FAB</span></span></span><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">厂差异也很大。由于后续会给FDC作另外的介绍，因此本文主要是针对APC作详细介绍，其余系统欢迎留意后续文章。</span></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"white-space: pre-wrap; -webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; display: inline; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"\\\">APC的功能主要包括提升制程工艺能力，减少产品OOS及报废，提升产品良率，提高生产效率等等。</span></span></div><div style=\\\"text-align: center;\\\"><img src=\\\":/d8f59563a6e745ba99dc5ca71ca05886\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">在APC作用下当膜厚超出Spec时及时调整</span></span></div><div><span><span style=\\\"\\\">R2R是APC的核心，或者R2R就</span></span><span><span style=\\\"\\\">等同于APC，</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">R2R</span></span></span><span><span style=\\\"\\\">的基本概念是透过</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Wafer</span></span></span><span><span style=\\\"\\\">于前制程的量测值或是制程后的量测值，微调该制程的</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Recipe</span></span></span><span><span style=\\\"\\\">的某个或某几个参数设定值</span></span><span><span style=\\\"\\\">。如下图所示，</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">R2R</span></span></span><span><span style=\\\"\\\">大致上分为三大类：</span></span><span style=\\\"font-weight: bold;\\\"><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Feedback</span></span></span><span><span style=\\\"\\\">（反馈）、</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Feed forward</span></span></span><span><span style=\\\"\\\">（前馈）、</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Feedback/Feed forward</span></span></span><span><span style=\\\"\\\">（前反馈）控制。</span></span></span></div><div style=\\\"text-align: center;\\\"><img src=\\\":/55b5fcece63646b085eb631ccc02fd0d\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">R2R控制模块. 参考于曹永诚老师</span></span></div><div><span><span style=\\\"\\\">所谓</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Feedback control</span></span></span><span><span style=\\\"\\\">是通过比对</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Metrology</span></span></span><span><span style=\\\"\\\">量测值与目标值的差异，通过某种算法计算之后，回头修改或补偿下一批或下下一批</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Lot/Wafer</span></span></span><span><span style=\\\"\\\">的</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Recipe</span></span></span><span><span style=\\\"\\\">参数设定值。最常用来补偿机台因为时间渐渐飘移的问题，例如</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">CMP</span></span></span><span><span style=\\\"\\\">的</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">PAD</span></span></span><span><span style=\\\"\\\">会随着时间慢慢磨损，透过反馈算法可以补偿这种飘移的效应，如图下图所示。所谓</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Feed forward control</span></span></span><span><span style=\\\"\\\">，主要为了补偿前制程的变异，通过前制程的量测值，经由</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Model</span></span></span><span><span style=\\\"\\\">换算成</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Recipe</span></span></span><span><span style=\\\"\\\">的设定值，即时修正这批</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Lot/Wafer</span></span></span><span><span style=\\\"\\\">的</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">Recipe</span></span></span><span><span style=\\\"\\\">参数设定值，以补偿前制程变异所造成的影响。例如</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">CVD</span></span></span><span><span style=\\\"\\\">的厚度差异得用来修改后面</span></span><span lang=\\\"EN-US\\\"><span><span style=\\\"\\\">CMP</span></span></span><span><span style=\\\"\\\">的研磨时间。</span></span><span lang=\\\"EN-US\\\" style=\\\"mso-fareast-font-family: 宋体; mso-bidi-font-family: 宋体; color: #1B1B1B; mso-font-kerning: 0pt;\\\"></span></div><div style=\\\"text-align: center;\\\"><img src=\\\":/7d36726861e148189ec133e15cb6c61e\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"text-align: center;\\\"><span lang=\\\"EN-US\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">CMP机台</span></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">示意图、随时间变化趋势与控制器设计范例</span></span></div><div style=\\\"text-align: left;\\\"><span><span style=\\\"\\\">R2R也就是APC的难点是开发出满足工艺的算法，这不仅需要对软件开发技术有一定要求，而且较难的是对复杂的半导体制造业务要有深刻的know-how能力。目前APC常用的算法有EWMA(指数加权移动平均)、</span></span><span><span><span style=\\\"\\\">PID控制、多变量统计控制（如MIMO模型）、MPC(模型预测控制)等等，随着工艺发展越先进以及AI的发展，以后可能会融入贝叶斯方法，深度学习，强化学习等流行的人工智能技术。</span></span></span></div><div style=\\\"text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><br/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">APC系统未来趋势</span></span></div><div style=\\\"text-align: left;\\\"><span><span style=\\\"\\\">为适应越来越更先进的制程要求，未来APC系统也会与时俱进，持续更新。个人认为APC未来的发展趋势如下：</span></span></div><h4 style=\\\"font-weight: 600; color: rgb(64,64,64); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong><span><span style=\\\"\\\">1. 虚拟量测（VM）的深度整合</span></span></strong></h4><p style=\\\"text-align: left;\\\"><span><span style=\\\"\\\">虚拟量测技术通</span></span><span style=\\\"text-align: left;\\\"><span style=\\\"\\\">过实时</span></span><span><span style=\\\"\\\">数据预测关键工艺参数（如膜厚、关键尺寸），减少对物理量测设备的依赖，目前已运用于半导体制造行业。例如将VM结果反馈于APC系统，自动调整参数，比如在EUV光刻中通过VM实时补偿掩膜版误差。</span></span></p><p style=\\\"text-align: left;\\\"><span><span style=\\\"\\\">同时整合传感器数据、设备日志和晶圆历史数据，提升预测精度；结合在线学习（Online Learning）和迁移学习（Transfer Learning），实时校准模型以适应工艺漂移。</span></span></p><div><strong><span><span style=\\\"\\\">2. 与AI技术相结合</span></span></strong></div><div style=\\\"text-align: left;\\\"><strong><span><span style=\\\"font-weight: normal;\\\">通过强化学</span></span><span><span style=\\\"font-weight: normal;\\\">习使得多目标优化（如同时最大化良率、吞吐量和能耗效率）；借助自学习控制，可以使得</span></span><span><span><span style=\\\"font-weight: normal;\\\">系统自动识别工艺偏移并调整模型；通过因果推理，</span></span><span><span><span style=\\\"font-weight: normal;\\\">从相关性分析升级到因果干预，明确工艺参数与缺陷的因果关系（如利用因果图定位蚀刻速率异常的根本原因）。</span></span></span></span></strong></div><div style=\\\"text-align: left;\\\"><strong><span><span><span style=\\\"font-weight: bold;\\\"><span style=\\\"\\\">3. 边缘计算的应用</span></span></span></span></strong></div><div style=\\\"text-align: left;\\\"><span style=\\\"font-weight: bold;\\\"><span style=\\\"font-weight: normal;\\\">引入边缘计算技术，当APC的算法模型足够复杂时，计算速度也是值得考虑的事情，在设备端部署轻量化AI模型，可以实现计算毫秒级响应，当然这需要设备方面的同意，或者可以考虑让计算与服务运行于不同的服务器中，这部分估计还停留在理论，目前业界大概还没有实践。</span></span></div><div style=\\\"text-align: left;\\\"><span style=\\\"font-weight: bold;\\\"><span style=\\\"font-weight: normal;\\\">总而言之，未来趋势其实就是</span></span><span style=\\\"font-weight: bold;\\\"><span style=\\\"font-weight: normal;\\\">如何提出更好的模型，如何让APC更好地服务于半导体制造业务，如何将人工智能技术与APC做到完美结合。不仅如此，AI和大模型大火的今天，“AI+”也是各行各业的趋势了。</span></span></div><div style=\\\"text-align: left;\\\"><span style=\\\"font-weight: bold;\\\"><br/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; clear: both; min-height: 1em; color: rgba(0, 0, 0, 0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(0, 128, 255); font-size: 20px; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"font-weight: bold;\\\">总结</span></span></div><div style=\\\"text-align: left;\\\"><span style=\\\"font-weight: bold;\\\"><span style=\\\"font-weight: normal;\\\">APC系统是半导体CIM系统中一个十分关键的系统，也是一个非常复杂的系统，需要先进的IT技术与半导体制造业务相结合，同时也要在使用过程中不断完善，模型不断调优，正如前面所说APC带来的效益还是非常值得的，尤其是先进制程方面。APC涉猎较多，后续篇章也会详细APC相关算法与技术细节方面，敬请期待！</span></span></div><div style=\\\"text-align: center;\\\"><img src=\\\":/dcb11bf6187a45e597f581f00f66e15d\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"text-align: center;\\\"><span lang=\\\"EN-US\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; box-sizing: border-box; overflow-wrap: break-word; display: inline;\\\"><span style=\\\"\\\">APC赋能半导体智能制造</span></span></span></div><hr style=\\\"border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1, 0.5); transform-origin: 0 0; transform: scale(1, 0.5);\\\"/><div style=\\\"box-sizing: border-box; border-width: 0px; border-style: solid; border-color: hsl(var(--border)); font-weight: bold; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span><span style=\\\"\\\">往期半导体CIM系统介绍</span></span><span>推荐阅读</span></div><ul style=\\\"list-style-type: disc;\\\"><li><div style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484363&amp;idx=1&amp;sn=3ee43fc24b54a57688bcc69968d6665e&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解什么是半导体CIM系统</span></a></span></div></li><li style=\\\"\\\"><div style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484429&amp;idx=1&amp;sn=6d121dd2c9b6b2f327f20f3b413887a8&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之MES (一)</span></a></span></div></li><li><div style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484471&amp;idx=1&amp;sn=c73ad6712fdcf031ff834c12852e53cd&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之EAP (一)</span></a></span></div></li><li><div style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484492&amp;idx=1&amp;sn=59b8b9a94dd4f7c2bc5db4810aa4557d&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之MES (二)</span></a></span></div></li><li><h1 style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484555&amp;idx=1&amp;sn=0582218dd28aaf2a2585a018a47aaefd&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">你轻松了解半导体CIM系统之EAP (二)</span></a></span></h1></li><li><h1 style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484601&amp;idx=1&amp;sn=178ff3e4cd6fab29b9e7afabb203a053&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">带你轻松了解半导体CIM系统之AMHS (一)</span></a></span></h1></li><li><h1 style=\\\"\\\"><span><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484716&amp;idx=1&amp;sn=173aee0819c37bc60df5a86d8c7792ec&amp;scene=21#wechat_redirect\\\" style=\\\"\\\" target=\\\"_blank\\\"><span style=\\\"\\\">你轻松了解半导体CIM系统之EAP (三)</span></a></span></h1><div style=\\\"\\\"><span><br/></span></div></li></ul><div style=\\\"\\\"><span><br/></span></div><div style=\\\"\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: bold;\\\">参考</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: bold;\\\">资</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: bold;\\\">料:</span></span></div><div style=\\\"\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: normal;\\\">- 曹永诚. APC导论</span></span></div><div style=\\\"\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: normal;\\\">- 李剑. 半导体工业软件</span></span></div><div style=\\\"\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: normal;\\\">- 许涛. 基于SECS的半导体自动控制系统设计与实现</span></span></div><div style=\\\"\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"letter-spacing: normal; font-weight: normal;\\\">- 长江证券行业报告</span></span></div><div style=\\\"\\\"><span><br/></span></div><div><span><span style=\\\"font-style: italic;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"font-style: italic;\\\">关注一下，后续有更多精彩内容~<img src=\\\":/877f4b1e46194cadbed2ed561ad4b9aa\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; display: inline-block; width: auto; vertical-align: middle; background-size: cover; height: auto;\\\" width=\\\"auto\\\"/></span></span><div><span><span style=\\\"font-style: italic;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0px; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160, 160, 160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: rgb(255, 255, 255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><br/></span></div></div></div></div><div><div><div><div style=\\\"display: flex;\\\"><a>阅读原文</a></div></div></div></div></div></div></div></span>\\\n</div></body></html>\\u0000\"]],\"start1\":0,\"start2\":0,\"length1\":0,\"length2\":75120}]"
metadata_diff: {"new":{"id":"86636ac0ac664f37b89bd90b8ed0d0ca","parent_id":"f67288c3a0be4374b5d532b5dcc3aabc","latitude":"0.00000000","longitude":"0.00000000","altitude":"0.0000","author":"","source_url":"","is_todo":0,"todo_due":0,"todo_completed":0,"source":"joplin-desktop","source_application":"net.cozic.joplin-desktop","application_data":"","order":1764348850343,"markup_language":2,"is_shared":0,"share_id":"","conflict_original_id":"","master_key_id":"","user_data":"","deleted_time":0},"deleted":[]}
encryption_cipher_text: 
encryption_applied: 0
updated_time: 2025-11-28T21:04:34.607Z
created_time: 2025-11-28T21:04:34.607Z
type_: 13