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ocr_text: Aspect Ratio Trapping\n» ART is effective in reducing the surface TDD\n===) The surface dislocation density is reduced Eo\nby 3 orders of magnitude from blanket Ge on Si. © RSMO Go Sin (E00 hea tick)\n[RE\n» The TDD decreases proportionately with the aspect £\nratio (trench height/trench width) a ‘oo\n[= the aspect ratio itself plays an important role fad hy 3%\nin the mechanism by which ART reduces the TDD £ . > : <\n» ART is applicable to a variety of III-V " I\nTranch Aspect Ratio\nFigure 3. Threading dislocation density at the surface of a trench as a function of the
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