640 [61].png

id: 636a23fb4f554c7b800e5dec069a7839
mime: image/png
filename: 
created_time: 2025-11-28T16:58:22.115Z
updated_time: 2025-11-30T12:40:30.001Z
user_created_time: 2025-11-28T16:58:22.115Z
user_updated_time: 2025-11-30T12:40:30.001Z
file_extension: png
encryption_cipher_text: 
encryption_applied: 0
encryption_blob_encrypted: 0
size: 397790
is_shared: 0
share_id: 
master_key_id: 
user_data: 
blob_updated_time: 1764349102115
ocr_text: SiGe channels: Hole Transport\n» The biaxial strain is shown to lift the degeneracy of the heavy-hole and light-hole subbands in the\nvalence band, in addition to the effective mass reduction.\n> On the other hand, the theory suggests that the uniaxial compressive strain can further\nreduce the hole effective mass and is the optimum strain for the hole transport. The\ncalculated hole effective mass of relaxed and uniaxiallv strained SiGe, lattice matched to Si. for\nvarious Ge fractions and surface orientations. 1 =\n==) The hole effective mass decreases with in 2 Tae LE as\n> A way to achieve uniaxial strain is to start fr¢ E 1h 4100) strained\npattern them to high-aspect-ratio fingers or | £ OF (10)swaned = * # ,\n2\n0.01\n[J 02 04 06 08 1\nGe fraction (x)\nFIG. 6.3 Simulated hole effective mass a a function of Ge fraction for relaxed and uniaxial\ncompressivelystsined Si,_,Ge, (latice matched to i), with (100) and (110) surface rientations\n(Reproduced with permission from K. Ikeda, M. Ono, D. Kosemura, K. Usaia, M. Oda, Y\nKaminuta, et al, High-mobiliy and low-parasitic re,» ».ce chyazessics in.sesised Ge\n2012 Symposium on VLSI Technology (VLSI Technology) Disest of Technical Papers, 2012,
ocr_details: [{"words":[{"t":"SiGe","bb":[80,155,39,64],"bl":[80,155,64,64]},{"t":"channels:","bb":[170,327,38,64],"bl":[170,327,64,64]},{"t":"Hole","bb":[347,418,38,64],"bl":[347,418,64,64]},{"t":"Transport","bb":[430,590,39,71],"bl":[430,590,64,64]}]},{"words":[{"t":"»","bb":[10,22,107,120],"bl":[10,22,121,121]},{"t":"The","bb":[38,75,105,121],"bl":[38,75,121,121]},{"t":"biaxial","bb":[84,147,105,121],"bl":[84,147,121,121]},{"t":"strain","bb":[156,211,106,121],"bl":[156,211,121,121]},{"t":"is","bb":[221,235,106,121],"bl":[221,235,121,121]},{"t":"shown","bb":[244,306,105,121],"bl":[244,306,121,121]},{"t":"to","bb":[316,334,107,121],"bl":[316,334,121,121]},{"t":"lift","bb":[344,368,105,121],"bl":[344,368,121,121]},{"t":"the","bb":[376,408,105,121],"bl":[376,408,121,121]},{"t":"degeneracy","bb":[416,531,105,125],"bl":[416,531,121,121]},{"t":"of","bb":[539,559,105,121],"bl":[539,559,121,121]},{"t":"the","bb":[566,597,105,121],"bl":[566,597,121,121]},{"t":"heavy-hole","bb":[607,716,105,125],"bl":[607,716,121,121]},{"t":"and","bb":[725,759,105,121],"bl":[725,759,121,121]},{"t":"light-hole","bb":[770,863,105,125],"bl":[770,863,121,121]},{"t":"subbands","bb":[872,966,105,121],"bl":[872,966,121,121]},{"t":"in","bb":[976,991,106,121],"bl":[976,991,121,121]},{"t":"the","bb":[1000,1032,105,121],"bl":[1000,1032,121,121]}]},{"words":[{"t":"valence","bb":[39,114,129,145],"bl":[39,114,145,145]},{"t":"band,","bb":[124,177,129,149],"bl":[124,177,145,145]},{"t":"in","bb":[188,203,130,145],"bl":[188,203,145,145]},{"t":"addition","bb":[213,292,129,145],"bl":[213,292,145,145]},{"t":"to","bb":[301,320,131,145],"bl":[301,320,145,145]},{"t":"the","bb":[328,360,129,145],"bl":[328,360,145,145]},{"t":"effective","bb":[368,452,129,145],"bl":[368,452,145,145]},{"t":"mass","bb":[462,512,134,145],"bl":[462,512,145,145]},{"t":"reduction.","bb":[522,621,129,145],"bl":[522,621,145,145]}]},{"words":[{"t":">","bb":[10,22,166,180],"bl":[10,22,181,181]},{"t":"On","bb":[39,69,165,181],"bl":[39,69,181,181]},{"t":"the","bb":[77,113,165,181],"bl":[77,113,181,181]},{"t":"other","bb":[122,182,165,181],"bl":[122,182,181,181]},{"t":"hand,","bb":[190,251,165,184],"bl":[190,251,181,181]},{"t":"the","bb":[259,295,165,181],"bl":[259,295,181,181]},{"t":"theory","bb":[303,377,165,184],"bl":[303,377,181,181]},{"t":"suggests","bb":[385,485,166,184],"bl":[385,485,181,181]},{"t":"that","bb":[492,538,165,181],"bl":[492,538,181,181]},{"t":"the","bb":[546,582,165,181],"bl":[546,582,181,181]},{"t":"uniaxial","bb":[591,678,165,181],"bl":[591,678,181,181]},{"t":"compressive","bb":[687,827,165,184],"bl":[687,827,181,181]},{"t":"strain","bb":[835,899,165,181],"bl":[835,899,181,181]},{"t":"can","bb":[908,946,169,181],"bl":[908,946,181,181]},{"t":"further","bb":[954,1034,165,181],"bl":[954,1034,181,181]}]},{"words":[{"t":"reduce","bb":[40,115,189,205],"bl":[40,115,205,205]},{"t":"the","bb":[123,159,189,205],"bl":[123,159,205,205]},{"t":"hole","bb":[168,214,189,205],"bl":[168,214,205,205]},{"t":"effective","bb":[222,319,189,205],"bl":[222,319,205,205]},{"t":"mass","bb":[328,385,193,205],"bl":[328,385,205,205]},{"t":"and","bb":[393,433,189,205],"bl":[393,433,205,205]},{"t":"is","bb":[443,460,189,205],"bl":[443,460,205,205]},{"t":"the","bb":[467,503,189,205],"bl":[467,503,205,205]},{"t":"optimum","bb":[512,611,189,209],"bl":[512,611,205,205]},{"t":"strain","bb":[620,684,189,205],"bl":[620,684,205,205]},{"t":"for","bb":[692,724,189,205],"bl":[692,724,205,205]},{"t":"the","bb":[731,767,189,205],"bl":[731,767,205,205]},{"t":"hole","bb":[776,823,189,205],"bl":[776,823,205,205]},{"t":"transport.","bb":[830,942,190,209],"bl":[830,942,205,205]},{"t":"The","bb":[950,987,189,205],"bl":[950,987,205,205]}]},{"words":[{"t":"calculated","bb":[39,139,213,229],"bl":[39,139,229,229]},{"t":"hole","bb":[149,190,213,229],"bl":[149,190,229,229]},{"t":"effective","bb":[198,283,213,229],"bl":[198,283,229,229]},{"t":"mass","bb":[292,343,217,229],"bl":[292,343,229,229]},{"t":"of","bb":[352,371,213,229],"bl":[352,371,229,229]},{"t":"relaxed","bb":[379,450,213,229],"bl":[379,450,229,229]},{"t":"and","bb":[460,494,213,229],"bl":[460,494,229,229]},{"t":"uniaxiallv","bb":[505,599,213,230],"bl":[505,599,229,229]},{"t":"strained","bb":[607,686,213,229],"bl":[607,686,229,229]},{"t":"SiGe,","bb":[696,748,214,230],"bl":[696,748,229,229]},{"t":"lattice","bb":[758,818,213,229],"bl":[758,818,229,229]},{"t":"matched","bb":[827,911,213,229],"bl":[827,911,229,229]},{"t":"to","bb":[921,939,215,229],"bl":[921,939,229,229]},{"t":"Si.","bb":[949,972,214,230],"bl":[949,972,229,229]},{"t":"for","bb":[982,1009,213,229],"bl":[982,1009,229,229]}]},{"words":[{"t":"various","bb":[39,111,238,254],"bl":[39,111,253,253]},{"t":"Ge","bb":[120,146,238,254],"bl":[120,146,253,253]},{"t":"fractions","bb":[154,240,237,253],"bl":[154,240,253,253]},{"t":"and","bb":[248,283,237,253],"bl":[248,283,253,253]},{"t":"surface","bb":[293,365,237,253],"bl":[293,365,253,253]},{"t":"orientations.","bb":[374,499,238,253],"bl":[374,499,253,253]},{"t":"1","bb":[706,710,237,248],"bl":[706,710,253,253]},{"t":"=","bb":[744,751,257,265],"bl":[744,751,253,253]}]},{"words":[{"t":"==)","bb":[18,62,261,277],"bl":[18,62,278,278]},{"t":"The","bb":[73,113,262,278],"bl":[73,113,278,278]},{"t":"hole","bb":[122,169,262,278],"bl":[122,169,278,278]},{"t":"effective","bb":[177,273,262,278],"bl":[177,273,278,278]},{"t":"mass","bb":[282,339,266,278],"bl":[282,339,278,278]},{"t":"decreases","bb":[347,459,262,278],"bl":[347,459,278,278]},{"t":"with","bb":[467,516,262,278],"bl":[467,516,278,278]},{"t":"in","bb":[532,551,262,278],"bl":[532,551,278,278]},{"t":"2","bb":[667,681,265,284],"bl":[667,681,277,277]},{"t":"Tae","bb":[744,825,260,290],"bl":[744,825,277,277]},{"t":"LE","bb":[831,863,257,279],"bl":[831,863,277,279]},{"t":"as","bb":[877,924,257,289],"bl":[877,924,279,279]}]},{"words":[{"t":">","bb":[10,22,319,327],"bl":[10,22,327,327]},{"t":"A","bb":[39,54,312,327],"bl":[39,54,327,327]},{"t":"way","bb":[62,107,316,331],"bl":[62,107,327,327]},{"t":"to","bb":[115,137,313,328],"bl":[115,137,327,327]},{"t":"achieve","bb":[145,230,311,328],"bl":[145,230,327,328]},{"t":"uniaxial","bb":[239,326,311,328],"bl":[239,326,328,328]},{"t":"strain","bb":[335,399,313,328],"bl":[335,399,328,328]},{"t":"is","bb":[408,425,316,328],"bl":[408,425,328,328]},{"t":"to","bb":[433,455,313,328],"bl":[433,455,328,328]},{"t":"start","bb":[463,516,313,328],"bl":[463,516,328,328]},{"t":"fr¢","bb":[530,554,311,327],"bl":[530,554,327,327]},{"t":"E","bb":[670,678,318,328],"bl":[670,678,327,327]},{"t":"1h","bb":[781,825,315,338],"bl":[781,825,327,329]},{"t":"4100)","bb":[842,880,326,343],"bl":[842,880,329,329]},{"t":"strained","bb":[885,934,327,337],"bl":[885,934,329,329]}]},{"words":[{"t":"pattern","bb":[37,118,337,356],"bl":[37,118,352,352]},{"t":"them","bb":[126,183,336,352],"bl":[126,183,352,352]},{"t":"to","bb":[192,214,337,352],"bl":[192,214,352,352]},{"t":"high-aspect-ratio","bb":[223,417,336,356],"bl":[223,417,352,352]},{"t":"fingers","bb":[425,503,336,356],"bl":[425,503,352,352]},{"t":"or","bb":[511,534,340,352],"bl":[511,534,352,352]},{"t":"|","bb":[550,554,336,352],"bl":[550,554,352,352]},{"t":"£","bb":[667,678,335,356],"bl":[667,678,352,352]},{"t":"OF","bb":[693,710,336,347],"bl":[693,710,352,352]},{"t":"(10)swaned","bb":[744,830,348,361],"bl":[744,830,352,352]},{"t":"=","bb":[843,853,331,366],"bl":[843,853,352,352]},{"t":"*","bb":[867,875,341,349],"bl":[867,875,352,352]},{"t":"#","bb":[892,900,348,357],"bl":[892,900,352,352]},{"t":",","bb":[916,924,354,362],"bl":[916,924,352,352]}]},{"words":[{"t":"2","bb":[668,678,393,402],"bl":[668,678,402,402]}]},{"words":[{"t":"0.01","bb":[686,710,435,446],"bl":[686,710,446,445]}]},{"words":[{"t":"[J","bb":[716,727,447,469],"bl":[716,727,461,461]},{"t":"02","bb":[763,781,451,462],"bl":[763,781,461,461]},{"t":"04","bb":[812,830,451,461],"bl":[812,830,461,461]},{"t":"06","bb":[861,880,451,462],"bl":[861,880,461,461]},{"t":"08","bb":[911,930,451,461],"bl":[911,930,461,461]},{"t":"1","bb":[967,971,452,461],"bl":[967,971,461,461]}]},{"words":[{"t":"Ge","bb":[799,817,473,483],"bl":[799,817,483,483]},{"t":"fraction","bb":[823,870,473,483],"bl":[823,870,483,484]},{"t":"(x)","bb":[876,891,473,485],"bl":[876,891,484,485]}]},{"words":[{"t":"FIG.","bb":[567,590,495,504],"bl":[567,590,504,504]},{"t":"6.3","bb":[596,613,496,504],"bl":[596,613,504,504]},{"t":"Simulated","bb":[627,678,495,504],"bl":[627,678,504,504]},{"t":"hole","bb":[684,705,495,504],"bl":[684,705,504,504]},{"t":"effective","bb":[711,755,496,504],"bl":[711,755,504,504]},{"t":"mass","bb":[761,786,498,504],"bl":[761,786,504,504]},{"t":"a","bb":[792,801,498,504],"bl":[792,801,504,504]},{"t":"a","bb":[807,812,498,504],"bl":[807,812,504,504]},{"t":"function","bb":[818,860,496,504],"bl":[818,860,504,504]},{"t":"of","bb":[865,875,496,504],"bl":[865,875,504,504]},{"t":"Ge","bb":[881,895,495,504],"bl":[881,895,504,504]},{"t":"fraction","bb":[901,941,496,504],"bl":[901,941,504,504]},{"t":"for","bb":[946,961,496,504],"bl":[946,961,504,504]},{"t":"relaxed","bb":[967,1003,495,504],"bl":[967,1003,504,504]},{"t":"and","bb":[1009,1027,495,504],"bl":[1009,1027,504,504]},{"t":"uniaxial","bb":[1032,1073,495,504],"bl":[1032,1073,504,504]}]},{"words":[{"t":"compressivelystsined","bb":[566,684,511,522],"bl":[566,684,519,519]},{"t":"Si,_,Ge,","bb":[688,733,511,521],"bl":[688,733,519,519]},{"t":"(latice","bb":[738,773,511,520],"bl":[738,773,519,519]},{"t":"matched","bb":[778,820,511,519],"bl":[778,820,519,519]},{"t":"to","bb":[825,834,513,519],"bl":[825,834,519,519]},{"t":"i),","bb":[839,855,511,520],"bl":[839,855,519,519]},{"t":"with","bb":[859,881,511,519],"bl":[859,881,519,519]},{"t":"(100)","bb":[886,913,511,519],"bl":[886,913,519,519]},{"t":"and","bb":[917,934,511,519],"bl":[917,934,519,519]},{"t":"(110)","bb":[939,966,511,520],"bl":[939,966,519,519]},{"t":"surface","bb":[970,1006,511,519],"bl":[970,1006,519,519]},{"t":"rientations","bb":[1010,1070,512,519],"bl":[1010,1070,519,519]}]},{"words":[{"t":"(Reproduced","bb":[567,633,527,539],"bl":[567,633,536,536]},{"t":"with","bb":[640,661,527,536],"bl":[640,661,536,536]},{"t":"permission","bb":[667,723,530,539],"bl":[667,723,536,536]},{"t":"from","bb":[731,754,528,537],"bl":[731,754,536,536]},{"t":"K.","bb":[761,768,528,536],"bl":[761,768,536,536]},{"t":"Ikeda,","bb":[779,808,528,536],"bl":[779,808,536,536]},{"t":"M.","bb":[819,828,528,536],"bl":[819,828,536,536]},{"t":"Ono,","bb":[838,859,528,536],"bl":[838,859,536,536]},{"t":"D.","bb":[869,878,528,536],"bl":[869,878,536,536]},{"t":"Kosemura,","bb":[889,940,528,536],"bl":[889,940,536,536]},{"t":"K.","bb":[950,957,528,536],"bl":[950,957,536,536]},{"t":"Usaia,","bb":[969,1002,528,536],"bl":[969,1002,536,536]},{"t":"M.","bb":[1013,1022,528,536],"bl":[1013,1022,536,536]},{"t":"Oda,","bb":[1032,1053,527,536],"bl":[1032,1053,536,536]},{"t":"Y","bb":[1067,1068,528,536],"bl":[1067,1068,536,536]}]},{"words":[{"t":"Kaminuta,","bb":[567,619,544,552],"bl":[567,619,552,552]},{"t":"et","bb":[631,638,546,552],"bl":[631,638,552,552]},{"t":"al,","bb":[646,657,544,552],"bl":[646,657,552,552]},{"t":"High-mobiliy","bb":[670,740,543,553],"bl":[670,740,552,552]},{"t":"and","bb":[748,769,544,552],"bl":[748,769,552,552]},{"t":"low-parasitic","bb":[776,840,543,555],"bl":[776,840,552,552]},{"t":"re,»","bb":[851,858,546,552],"bl":[851,858,552,552]},{"t":"».ce","bb":[870,902,546,555],"bl":[870,902,552,552]},{"t":"chyazessics","bb":[910,987,531,562],"bl":[910,987,552,552]},{"t":"in.sesised","bb":[991,1052,543,556],"bl":[991,1052,552,552]},{"t":"Ge","bb":[1059,1073,544,552],"bl":[1059,1073,552,552]}]},{"words":[{"t":"2012","bb":[567,591,575,584],"bl":[567,591,584,584]},{"t":"Symposium","bb":[600,656,576,587],"bl":[600,656,584,584]},{"t":"on","bb":[663,675,579,584],"bl":[663,675,584,584]},{"t":"VLSI","bb":[683,707,576,584],"bl":[683,707,584,584]},{"t":"Technology","bb":[715,772,576,586],"bl":[715,772,584,584]},{"t":"(VLSI","bb":[780,810,576,584],"bl":[780,810,584,584]},{"t":"Technology)","bb":[817,880,576,586],"bl":[817,880,584,584]},{"t":"Disest","bb":[886,920,574,585],"bl":[886,920,584,584]},{"t":"of","bb":[926,936,576,587],"bl":[926,936,584,584]},{"t":"Technical","bb":[943,993,576,584],"bl":[943,993,584,584]},{"t":"Papers,","bb":[999,1034,576,587],"bl":[999,1034,584,584]},{"t":"2012,","bb":[1045,1070,575,584],"bl":[1045,1070,584,584]}]}]
ocr_status: 2
ocr_error: 
ocr_driver_id: 1
type_: 4