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ocr_text: Design of the Heterostructure DRY Sn\n> Designing structures to preserve a compressive strain: v qb of] B Ww | ll\n1.Graded aluminum from AIN to GaN: with a smooth $ 3 . d 5.»\ngrading or a step grading of different Al,Ga;.xN layers LA A AG\nmmm) to continually introduce compression into the layers. ZAM SELAH i\n2.AIN interlayers: after growing GaN on the Al(Ga)N Fig, 7 Cross-sectional TEM image of GaN grown cm the graded\nnucleation layer, a new AIN layer is grown on this GaN layer. “16. Zhang et a, Chin. Sci. Bull. 1251 (2014)]\nThe AIN quickly reaches its critical strain thickness and then - -\nrelaxes. After, a GaN layer can be grown in compression 0 js ~~ refrodissement [025\non the AIN layer. oof] wom | PE hom\nmmm) Presence of a strain gradient during the growth of 5 1 G25m | GANT N : pot R\nthe different layers (a slope of zero = fully relaxed structure) g - oon jos €\nStrong difference in the relaxation process between the first H 40 ~ 005 H\nsecond GaN layer > compressive strain of the structure aE) | 99\nSs compensation of the tensile strain generated po : =\nIn-situ curvature meas. gives the aver. deformation of the epitaxial structure BE\nnec) Eat cs ponies rarer re Summer School, Epitaxy Bases & Promises, Porquerolles, 2-8 July 2021 80
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