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ocr_text: SiGe channels: Hole Transport\n» Hole mobility monotonically increases with increasing Ge content in the biaxially strained-\nSiGe. Adjusting the Ge content in the channel and the buffer, a wide range of mobility values can be\nachieved me®ility enhancements up to 10x over (100)-Si.\n» Moreover, extremely high hole effective mobility numbers > above 1000cm2/V.s have\nbeen measured for buried-channel strained-Si;.,Ge, quantum wells.\n100/50 Strained Si\n2 -. ae § 8 = ~The effective mass of SiGe is a strong\nt a 2 " function of Ge fraction, strain state\n0 5x1012 10" 0 20 40 60 80 100 (uniaxial, biaxial).\no Ge content, y (%)\nHG. 6.2 (A) Measured effective hole mobility versus Ny, for strained-Si/strained-Si; _,Ge,/\nrelaxed-Si; Ge, quantum-well heterostructures for various y/x. (B) Hole mobility enhancement OE ris\nfactor over Si versus channel Ge fraction. (Data from J L. Hoyt and C. Ni Chleirigh, Massachusetts 7) =F We L005\n| nstiute of Technology, with permission.) fises, Porquerolles, 2-8 uly 201 ~~ e Porquerolles, 2-8 July 2021 62
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