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body_diff: "[{\"diffs\":[[1,\"<html>\\\r\\\n<head>\\\r\\\n  <title>带你轻松了解半导体CIM系统之AMHS (一)</title>\\\r\\\n  <basefont face=\\\"微软雅黑\\\" size=\\\"2\\\" />\\\r\\\n  <meta http-equiv=\\\"Content-Type\\\" content=\\\"text/html;charset=utf-8\\\" />\\\r\\\n  <meta name=\\\"exporter-version\\\" content=\\\"YXBJ Windows/608924 (zh-CN, DDL); Windows/10.0.0 (Win64); EDAMVersion=V2;\\\"/>\\\r\\\n  <meta name=\\\"content-class\\\" content=\\\"yinxiang.peso.superNote\\\"/>\\\r\\\n  <meta name=\\\"application-data:yinxiang.noteLayout\\\" content=\\\"{\\\"lineSpace\\\":\\\"recommend\\\",\\\"paragraphSpace\\\":\\\"recommend\\\"}\\\"/>\\\r\\\n  <style>\\\r\\\n\\tbody, td {\\\r\\\n\\t  font-family: 微软雅黑;\\\r\\\n\\t  font-size: 12pt;\\\r\\\n\\t}\\\r\\\n  </style>\\\r\\\n</head>\\\r\\\n<body>\\\r\\\n<a name=\\\"37766\\\"></a>\\\r\\\n<h1>带你轻松了解半导体CIM系统之AMHS (一)</h1>\\\r\\\n\\\r\\\n<div><span style=\\\"\\\"><div style=\\\"max-width: 700px;\\\"><p></p><div style=\\\"--en-blockquote: true; box-sizing: border-box; border-left: 3px solid #b4c0cc; background-position: initial initial; background-repeat: initial initial;\\\"><div>原文链接: <a href=\\\"http://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484601&amp;idx=1&amp;sn=178ff3e4cd6fab29b9e7afabb203a053&amp;chksm=9654a6b41a549332c38d1f276e8cd782a4062e4cd035e6522b729f6e4cac1d5c0083d044fc5c&amp;mpshare=1&amp;scene=1&amp;srcid=0210QoNHQgrhVNH548JEJVjB&amp;sharer_shareinfo=a0e6d5642ad9495b3d1db52d23d2ff51&amp;sharer_shareinfo_first=a0e6d5642ad9495b3d1db52d23d2ff51#rd\\\"><span>http://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484...</span></a></div></div><p></p><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">原创</span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">计算机集成</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><a style=\\\"-webkit-tap-highlight-color: transparent;\\\"> 计算机集成 </a></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent;\\\"></em></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgb(0,0,0); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">                                                                                                                                点击上方蓝字&quot;</span></em></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(87,107,149); __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">计算机集成</span></em></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">&quot;，关注并设为星标</span></em></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgb(0,0,0); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; __visibility: visible;\\\"><em style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; font-style: italic; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">                                                                                                                                                       专注高质量分享，与您共成长</span></em></span></p><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"color: rgba(0,0,0,0.9); letter-spacing: 0.544px; orphans: 2; text-align: left; widows: 2; -webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">AMHS系统（自动化物料搬送系统）对于生产芯片的晶圆厂在提高生产效率和缩短产品的生产周期等方面起着关键作用，尤其是现在主流的12寸晶圆厂对于AM</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">HS系统更是必不可少。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">在这里把AMHS系统也归类到了CIM系统领域，可能有的厂商不认为AMHS隶属于CIM系统，但个人认为AMHS系统的核心是软件部分，且与MES等CIM系统有密切交互，因此把AMHS系统也划分到CIM系统旗下。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">本文是半导体CIM系统之AMHS系统介绍的开篇之作，主要分享学习AMHS系统的组成结构，发展历史，国内外发展现状以及未来展望等基础知识，后续再对细节技术进行探讨。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">AMHS系统组成结构</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">AMHS(Automatic Material Handling System，自动化物料搬送系统)</span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">，一般特指在无尘室环境下，通过软件系统的控制和调度，按照生产系统的指令，实现物料在生产线工序间的自动搬运、缓冲存放的系统。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">AMHS具备减少物料的闲置时间，提高无尘室车间的利用率，提高产品良率，减少人员误操作，降低人力成本等诸多优势</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">，广泛应用于半导体硅片厂、半导体晶圆制造厂、半导体封装测试厂、显示面板厂以及新能源电池工厂等领域。该系列文章主要基于半导体晶圆制造厂业务进行介绍，但是系统在各行业有一定相似度。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/6a5e7dfb529a4163afde81ef74e1a32c\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">半导体AMHS大致模型图</span></span></strong></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">AMHS主要由硬件设备和控制软件组成，其中硬件设备包含搬运设备和存储与净化设备，控制软件包括MCS，STC，TSC等等。</span></span></strong></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">搬</span></span></strong></strong><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">运设</span></span></strong></strong><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">备</span></span></strong></strong></div><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">根据不同晶圆厂的需求，AMHS系统主要分为半自动化和全自动化解决方案。其中，8寸晶圆制造厂通常采用半自动化解决方案，涉及的搬运设备主要有AGV自动导航车、RGV有轨制导车和AMR机器人等地面传送设备和OHT天车设备。12寸晶圆制造厂现基本采用全自动化解决方案，涉及的搬运设备有OHT天车设备</span></span></strong></strong><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">。</span></span></strong></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">OHT(Overhead Hoist Transport)</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">能够在空中轨道上行驶，并能够通过皮带传动起重机直接进入保管设备或工艺设备的装卸口取放货，应用于工序区内部，也应用于工序区间或工厂间运输。目前在12寸晶圆制造厂，OHT系统被广泛认定为FAB工厂的主力搬送系统。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/c44b68842aa749d6a81dc412fcd1304f\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">弥费科技OHT</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">AMR(Autonomous Mobile Robot</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">)</span></span></strong></strong><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">协作机器人</span></span></strong></strong><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">，用于</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">半导体晶圆厂地面搬运FOUP/POD，对接MRC进行任务调度；实现设备与设备间搬运、设备与E-Rack间搬运。</span></span></strong></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/ee3b100d243e41b5a7ba2272ffe7fb1f\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">                               弥费科技AMR</span></span></strong></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">Conveyor，洁净室传送线</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">主要用于实现POD中短距离的传递输送，实现机台设备、STK、TW STK等设备之间FOUP的输送传递。按照工艺流程将不同设备有机串联起来的同时，能够缓存一定数量的POD。</span></span></strong></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/85a5245bc0db4c67b9b22309a6ce2de2\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">              弥费科技Conveyor</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span></strong></strong><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span></strong></strong><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span></strong></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">RGV(</span></span><b style=\\\"-webkit-tap-highlight-color: transparent; font-weight: 600; color: rgb(25,27,31); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">Rail Guided Vehicle</span></b><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">)，</span></span><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">轨道式导引机器人，</span></span></strong><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">RGV又称轨道穿梭小车，沿轨道将Cassette在工艺设备、Stocker和Buffer之间进行传输。</span></span></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/552af20e1a274010b30a3ced8a24bd66\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span></strong><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"> Mirle RGV</span></span></strong></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><strong style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">AGV(</span></span><b style=\\\"-webkit-tap-highlight-color: transparent; font-weight: 600; color: rgb(25,27,31); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">Automated Guided Vehicle</span></b><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">)，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">移动机器人，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">AGV是带有SCARA 机械臂的自动化运输系统，可以“直接”访问储料器和加工设备，灵活地将载体运送到加工设备。</span></span></strong></strong></strong><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/40f6d1a377a241cd880a0dfa2682cbd9\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"> AGV in Fab</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">地面方案AGV/RGV/AMR可以相互配合；在搬运量较小的情况，AGV/RGV/AMR系统相比天车系统费用更低，在搬运量较大情况下，其费用反而比天车更贵。而且AGV/RGV/AMR存在搬运量上限，会占用洁净间，在12寸晶圆厂中使用较少。   </span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">存储与净化设备</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\"></span></span></div><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">存储设备是无尘室的临时存储库，可缩短工艺设备流程结束到下一工艺设备流程开始之间的时间差。存储设备主要包括用于存储载具 （晶圆载具Foup、光罩盒Reticle等的存储柜（Stocker）以及工艺设备流程开始之前的暂时存储设备（NTB）。随着先进制程工艺向窄线宽发展，40nm及以下先进工艺节点存储设备需要配套净化设备，主要包括空中缓存净化(OHBP)。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">Foup/Pod Stocker，晶圆盒存储设备</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">Stocker用于半导体洁净室内生产工序与工序之间晶圆载具的传送和存储，支持多种载具Pod/Foup，以及净化功能。</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/da9f471511e74b159a6b650ae2ebc2bd\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">Foup/Pod Stocker</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">Reticle Stocker，光罩盒存储设备，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">Reticle Stocker用于半导体洁净室内光罩盒存储及传送，可实现与天车自动对接，人工对接，保证光罩品质，从而达到提高晶圆厂整体产品良率的目的。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/ef6393489d614b148c0d49e0accae185\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">Reticle Stocker</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">Tower Stocker，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">塔式存储设备，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">用于半导体晶圆厂洁净室内物料的跨楼层存储和传送。</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/a6da072912704df0a96efd088b634ed9\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">     Tower Stocker  </span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">OHB(Over Head Buffer) (with Purge),</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">空中缓存净化设备</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">配合天车轨道系统，为光罩盒提供空中批量存储货位，提高晶圆厂得空间利用率，最大化晶圆载具在各个工序间得传送效率。通过Purge管路布局，加装净化单元充入纯净气体，保证光罩盒内微环境，提高良品率。</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/b1c8804e633d404bad5bf16aa12cdb06\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">                 OHB</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">除此之</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">外，存储设备还有NTB(Near Tool Buffer，近机台缓存设备)，TLP(Tool LoadPort Station，机台净化设备)，E-Rack(电子货架)等等。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">控制软件</span></span></div><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">控制单元主要有</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">STC(Stocker Controller),TSC(Transport Controller)</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">和 </span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">MCS(Material Control System)</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">，其中MCS是AMHS软件部分的核心，是AMHS系统能够正常运行的大脑。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">它们之间的关系如下图所示。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/8e7c1879023c4c6c9fa64da2bf3e8ebc\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">                              学术界AMHS软件架构</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">STC是存储单元Stocker的控制器。它负责接收并执行上一层控制系统MCS的 动作指令；记录Stocker内所存储的FOUP信息和所有指令信息；协调和控制Stocker各部分的行为动作；并把Stocker的状态和存储记录报告给上层控制系统MCS。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">TSC是搬送单元自动搬送车的控制器。它负责接收并执行上一层控制系统MCS 的动作指令；记录Stocker内所存储的FOUP信息和所有指令信息；更重要的是，TSC需要负责OHT的状态管理，搬送指令的管理，OHT的任务派遣等。从而完成MCS下达的搬送指令，及时准确地将FOUP搬送到MCS指定的目的设备中。最后，TSC需要将搬送指令的完成结果和OHT的运行状态报告给上层控制系统MCS。 </span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">MCS系统是整个AMHS系统的中央控制系统，它负责接收并执行上一层控制系统MES的动作指令。首先，MCS系统会将上一层HOST下达的搬送指令进行分解，根据搬送指令的进行状态，分别发送到相应的STC系统和TSC系统，从而共同完成一个完整的搬送指令。一般而言，MCS系统本身并不会生成搬送指令，它的使命是去执行和监控MES系统所生成的搬送指令。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">除了搬送指令的</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">执行，MCS系统还会具备一些更高级的存储单元和搬送单元的</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">优化管理功能。例如，当搬送指令指定的目的地Stocker发生故障的时候，MCS系统会选择合适的备用Stocker作为搬送目的地；当AMHS系统内具有多套TSC系统的时候，MCS系统会选择更优化的TSC系统来执行搬送指令。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/b2c6dc7e4db946ffa9d6da661019662d\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">工业界TAIZHITECH MCS架构</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">AMHS系统发展历史</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">半导体工厂大规模采用AMHS系统的原因在于它不仅可以作为临时存储晶圆的 自动仓库，同时还可以实现不同工作区域间快速转送的功能。例如台积电在不到0.5平方公里的区域内，拥有超过50公里长的轨道、5000个以上的路口以及2000台晶圆传输车，每日运量约60万车次。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">在早期兴建的6寸晶圆厂中，由于wafer本身重量不是很大，因此对于wafer的自动搬送需求并不是非常迫切。随之后来8寸晶圆厂的兴建，生产技术人员开</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">始意识到AMHS系统的应用对于提升半导体工厂生产能力的巨大作用，AMHS系统的应用这才逐渐兴盛发展起来，现在AMHS系统在主流的、全自动化的12寸晶圆厂更是标配。</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">到目前为止</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">AMHS系统经历了四代的发展，分别是200mm自动化搬送系统，早期的300mm自动化搬送系统，Tool to Tool的直接搬送方式，高度智能化的自动搬送系统。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">1.</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\"> 第一代的AMHS系统：200mm自动化搬送系统</span></span></div><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">对于早期的200mm半导体工厂来说，大部分WIP传送、存储和分发是通过人工 操作完成的。后来的200mm半导体工厂在人工操作基础上结合了interbay自动传送和存储系统，然而WIP和设备之间的流通仍然没有实现自动化。200mm 半导体工厂向AMHS自动化搬运系统的转变是迫于半导体工厂规模扩大和产量提高所带来的压力。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">为了提高生产效率和生产更多种类的产品，许多200mm 半导体工厂采用了OHT和OHS(早期一种自动化搬送装置，现已被OHT替代)相结合的AMHS系统（如下图所示）促进生产或改善多种产品共线生产的管理，最终开发出更先进的半导体工厂布局，充分利用AMHS</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">系统Interbay高效率自动搬运的优点。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/60eb7b4667014c728dd2851165b871c6\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">200mm工厂下的AMHS系统</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">2. 第二代的AMHS系统：早期的300mm自动化搬送系统</span></span></div><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">早期的300mmAMHS系统实际上是200mm interbay传送系统的延伸，它在已有Interbay传送系统上增加了intrabay传送系统。当然，Stocker需要增加额外功能Interbay/Intrabay之间的传送界面；此外，还要增加Stocker容量，用于取代intrabay WIP的存储。300mm AMHS系统还增加了一种新型的运输工具-intrabay OHT，它可以将FOUP直接传送到设备。这样就可以进行物料FOUP的全自动搬运了。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">首先，AMHS系统将FOUP从工艺设备的LoadPort转移到OHT搬运车上并传送到各区所在的Stocker 里面；然后Stocker机械手将FOUP转移到Stocker的interbay的LoadPort上，并从这里装载到interbay的空中搬运车（OHS）上；接着，OHS将FOUP运送到离下一道工序最近的Stocker中存储起来；需要加工这个FOUP时，intrabay OHT到Stocker自动调取该FOUP，将其运送到生产设备端并放置在设备的LoadPort上。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">这种早期的AMHS设计实际上是建立在早期fab工艺流程的基础上的，它必须根据intrabay的生产速度为各个intrabay分派许多空中运输车。分离式的布局限制了AMHS的灵活性，它不能对工艺流程或其它异常事件做出快速反应。</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/f11704f221a34ada9e2dbd414e738524\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">300</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">mm工厂的分离</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">式搬送的AMHS系统</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">3. 第三代的AMHS系统：Tool to Tool的直接搬送方式</span></span></div><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">在第二代的AMHS系统中，不同生产区域间的Wafer搬送必须通过Stocker的中转才能完成，这种方式不仅影响搬送效率，而且在Stocker发生故障的时候，对于关键制程的生产机台的生产会带来灾难性的影响， 因此他们在第一代AMHS系统的基础上加以改进，设计出了第三代的AMHS系统。第三代的AMHS系统对于关键生产区域的机台可以由OHT来完成跨区域的搬送， 即通常所说的Tool to Tool 的直接搬送。这种设计的搬送特点是，关键区域的Wafer搬送不必依赖Stocker的中转来完成，从而提高了AMHS的搬送效率。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">4. 第四代的AMHS系统：高度智能化的自动搬送系统</span></span></div><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">在早期300mm分离式系统经验的基础上，AMHS供应商正在尝试对其进行修改，改善AHMS自动化系统的灵活性和柔性。 首先，OHT系统被延伸到interbay区域，OHT运输车可以在fab内的任何地方漫游。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">就像200mm fab中操作工人将前道工序完成的lot事先搬送到下一代工艺设备附近一样，现代化的AMHS系统中可以将FOUP存储位置从Stocker转移到靠近下一</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">道工艺设备最近的地方，通常称为轨道下方存储（under-track storage，UTS）或零占地面积存储（zero-footprint storag，ZFS）系统。UTS使用了洁净室的部分空中预留空间，但是不会占用工艺设备空间。</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/1eb7e61a2697409f802bc1f6f02965f5\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><div style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">3</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">00mm工厂的具有UTS</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">装置的智能式AMHS系统</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">国内外</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">发展现状</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">半导体AMHS行业壁垒较高，不仅需要强大的软件开发实力，也需要有半导体制造业务的know-how能力。长期以来全球AMHS市场一般被日韩企业主导，目前全球半导体行业所使用的AMH</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">S系统</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">超过九成均来自日本大福和村田这两家企</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">业，它们几乎垄断了高端市场，尤其是12寸的晶圆厂市场。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">根据 Gartner 测算，全球AMHS市场规模约占半导体设备总量的3%。根据赛迪顾问测算，2015—2022年全球AMHS市场的复合增长率为24%。特别是随着12寸晶圆厂的建设，AMHS被广泛应用，市场规模实现高速增长。尽管2022年受新冠肺炎疫情、全球消费疲软等影响，全球半导体晶圆厂建设进度放缓，但AMHS市场规模仍逆势增长至30.6亿美元，同比增长12%。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">根据赛迪顾问测算，2015—2022年全球AMHS市场的复合增长率为24%。特别是随着12寸晶圆厂的建设，AMHS被广泛应用，市场规模实现高速增长。尽管2022年受新冠肺炎疫情、全球消费疲软等影响，全球半导体晶圆厂建设进度放缓，但AMHS市场规模仍逆势增长至30.6亿美元，同比增长12%。</span></span></p><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/d6c4e8db1f744e74ad60a1c23499aae7\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">全球AMHS市场规模及增速</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">中国大陆方面，根据赛迪顾问测算，2015至2022年中国大陆AMHS市场的复合增长率为38%，随着中国半导体产业的崛起以及工业智能化的持续推进，中国半导体产业的物流自动化整体实现高速增长。2022年受新冠肺炎疫情、消费疲软、中美贸易战等影响，中国大陆半导体晶圆厂建设进度放缓，国外半导体企业在中国的投资减少，中国大陆AMHS市场规模达47.6亿元，当年增速放缓，低于全球平均增速。</span></span></p><div style=\\\"-webkit-tap-highlight-color: transparent; text-align: center;\\\"><img src=\\\":/d050ee0880e6468bb4c1831e908e3a2e\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; width: auto; height: auto;\\\" width=\\\"auto\\\"/></div><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: center; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">中国大陆AMHS市场规模及增速</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">在中美贸易摩擦加剧、高科技领域遭受封锁以及半导体供应链安全问题日益凸显的背景下，半导体关键设备的国产化替代越来越重要</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">，而</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">AMHS系统作为被卡脖子的关键设备之一，其国产化进程正在加速推进。其中，</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">弥费科技</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">作为行业新秀，凭借其四大“护城河”技术，通过十年的发展，成为国内首批通过8寸和12寸晶圆厂验收的AMHS解决方案供应商，实现了从技术服务提供商到自主研发AMHS系统的华丽转身。</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">另外，在这个卡脖子领域也有和</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">弥费科技</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">类似的优秀企业在发光发热，比如</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">新施诺、欣奕华、成川科技、格创东智、华芯智能、尊</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">芯半导体</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">等等AMHS企业，在这重要且需要“坐冷板凳”的工业软件领域，它们是一颗颗璀璨的明星！</span></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></p><p style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">未来</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(0,128,255); font-size: 20px; __visibility: visible;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">展望</span></span></p><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">在这特殊的时代背景下，对国内AMHS企业的发展是一个很好的契机，应当好好把握国产化替代的机遇，加强自身技术实力，相信总有一日赶上甚至超越国外巨头。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">为国内AMHS产业更好地发展，以下整理一些不错的建议：</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">1. 企业加强整体解决方案能力</span></span></h3><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">目前国内AMHS企业大多是单点突破半导体晶圆制造厂，较少企业具有整厂配套能力，AMHS企业应当加强整体解决方案能力，完善硬件、软件、服务等一体化方案，完善且强大的产品矩阵有助于提高企业在半导体产业中的竞争力。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">同时，重视特色工艺半导</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">体市场。特色工艺半导体厂主要包括光电器件、功率器件和传感器。随着半导体行业的发展，近几年，特色工艺领域投资、建厂速度逐渐加快， 基本都是8寸及12寸的晶圆厂，自动化需求较高，对于AMHS厂商来说存在一定发展机遇</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">。建议AMHS企业加强与特色工艺半导体厂商的交流、合作，挖掘AMHS系统在特色工艺半导体产业的潜力，扩大行业市场。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">此外，加强与上游其他CIM系统的密切配合，引入主流AI技术，为物料搬送提供最优路径和提高系统的运行效率，从而提高晶圆厂的生产效率。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">2. 建立统一的行业标准</span></span></h3><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">标准是引领行业质量的基础，高标准才有高质量的行业发展。</span><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">由于AMHS系统早年被海外企业垄断，因此导致相关标准化基础较为薄弱，急需建立统一的行业标准以引领国内企业更好地发展。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">对于硬件方</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">面，AMHS 硬件系统由具备传送、存储、净化不同功能的十多种设备组成，每一个设备在进入晶圆厂前都需花时间 打磨以满足晶圆厂无尘室的生产条</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">件和产品行业标准。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">对于工厂自动化</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">方面，AMHS系统的主要组成部分是设备、FOUPS、自动化仓储系统、OHS和OHT。所有这些组件的整合均需要相当程度的互操作性特征和接口。由于这些部件的供应商存在竞争关系，并且每个供应商对于互操作性的含义和实现可解释性所需的功能看法不一，因此需要制定一个系统内部统一的行业标准，以规范系统整体共同的框架和操作窗口。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">在202</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">3年，弥费科技承担了“半导体晶圆制造前端自动物料搬运系统制造标准化试点”项目，旨在推进 AMHS核心企业标准建设，夯实企业标准化基础，建立健全AMHS系统所涵盖的硬件设备与自动物料搬运软件系统全过程、全要素的制造验收标准体系，以高质量标准化引领企业创新发展。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">目前AMHS行业已具备部分团标和企标，需要进一步统一其他行业标准，例如设备与系统中文名称与定义，产品质量标准，底层通信协议标准等等，在这一过程中需要各企业、科研机构和高校通力合作，才能更好地制定符合行业的标准。</span></span></h3><h3 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; clear: both; min-height: 1em; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; text-align: left; __visibility: visible; box-sizing: border-box; overflow-wrap: break-word;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: bold;\\\">道阻且长，行则将至。相信在AMHS系统在内的CIM国产厂商与半导体产业的通力努力下，国产化替代终将成功，行业终见曙光！</span></span></h3><hr style=\\\"-webkit-tap-highlight-color: transparent; border-style: solid; border-width: 1px 0 0; border-color: rgba(0,0,0,0.1); -webkit-transform-origin: 0 0; -webkit-transform: scale(1,0.5); transform-origin: 0 0; transform: scale(1,0.5);\\\"/><div style=\\\"-webkit-tap-highlight-color: transparent; box-sizing: border-box; border-width: 0; border-style: solid; border-color: hsl(var(--border)); font-weight: bold; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">往期半导体CIM系统介绍</span></span><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">推荐阅读</span></div><ul style=\\\"-webkit-tap-highlight-color: transparent; list-style-type: disc;\\\"><li style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484363&amp;idx=1&amp;sn=3ee43fc24b54a57688bcc69968d6665e&amp;scene=21#wechat_redirect\\\" style=\\\"-webkit-tap-highlight-color: transparent;\\\" target=\\\"_blank\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">带你轻松了解什么是半导体CIM系统</span></a></span></div></li><li style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484429&amp;idx=1&amp;sn=6d121dd2c9b6b2f327f20f3b413887a8&amp;scene=21#wechat_redirect\\\" style=\\\"-webkit-tap-highlight-color: transparent;\\\" target=\\\"_blank\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">带你轻松了解半导体CIM系统之MES (一)</span></a></span></div></li><li style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484471&amp;idx=1&amp;sn=c73ad6712fdcf031ff834c12852e53cd&amp;scene=21#wechat_redirect\\\" style=\\\"-webkit-tap-highlight-color: transparent;\\\" target=\\\"_blank\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">带你轻松了解半导体CIM系统之EAP (一)</span></a></span></div></li><li style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484492&amp;idx=1&amp;sn=59b8b9a94dd4f7c2bc5db4810aa4557d&amp;scene=21#wechat_redirect\\\" style=\\\"-webkit-tap-highlight-color: transparent;\\\" target=\\\"_blank\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\">带你轻松了解半导体CIM系统之MES (二)</span></a></span></div></li><li style=\\\"-webkit-tap-highlight-color: transparent;\\\"><h1 style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; font-weight: 500; font-size: 22px; color: rgba(0,0,0,0.9); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><a href=\\\"https://mp.weixin.qq.com/s?__biz=MzIxNTE0NDY1MA==&amp;mid=2247484555&amp;idx=1&amp;sn=0582218dd28aaf2a2585a018a47aaefd&amp;scene=21#wechat_redirect\\\" style=\\\"-webkit-tap-highlight-color: transparent;\\\" target=\\\"_blank\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-weight: normal;\\\">带你轻松了解半导体CIM系统之EAP (二)</span></a></span></h1><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div></li></ul><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; letter-spacing: normal; font-weight: bold;\\\">参考</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; letter-spacing: normal; font-weight: bold;\\\">资</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; letter-spacing: normal; font-weight: bold;\\\">料:</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; letter-spacing: normal; font-weight: normal;\\\">- 弥费科技，赛迪顾问等企业公开资料</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; letter-spacing: normal; font-weight: normal;\\\">- </span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; letter-spacing: normal; font-weight: normal;\\\">高明亮，</span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; font-weight: 400; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; letter-spacing: normal; font-weight: normal;\\\">300mm半导体工厂AMHS系统的分析、设计和控制策略的仿真研究</span></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-style: italic;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-style: italic;\\\">关注一下，后续有更多精彩内容~<img src=\\\":/a71c255c43db450a8b5d64289c532812\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; -webkit-tap-highlight-color: transparent; display: inline-block; width: auto; vertical-align: middle; background-size: cover; height: auto;\\\" width=\\\"auto\\\"/></span></span><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent;\\\"><span style=\\\"-webkit-tap-highlight-color: transparent; font-style: italic;\\\"></span></span><span style=\\\"-webkit-tap-highlight-color: transparent; outline: 0; max-width: 100%; box-sizing: border-box; overflow-wrap: break-word; color: rgb(160,160,160); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: 0.544px; orphans: 2; text-align: justify; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; display: inline;\\\"><br style=\\\"-webkit-tap-highlight-color: transparent;\\\"/></span></div></div></div></div><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent;\\\"><div style=\\\"-webkit-tap-highlight-color: transparent; display: flex;\\\"><a style=\\\"-webkit-tap-highlight-color: transparent;\\\">阅读原文</a></div></div></div></div></div></div></div></span>\\\n</div></body></html>\\u0000\"]],\"start1\":0,\"start2\":0,\"length1\":0,\"length2\":128117}]"
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