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ocr_text: Outline\n«+ Si Electronics\nQ Si-based Technology: Field Effect Transistor, Metal-Oxide FET & CMOS Technology\nQ From MOSFET to Integrated Circuits\nQ Scaling: motivations & issues\n+» Heterogeneous Integration & Defect Engineering\nQ Heterogeneous Material Integration on Si Platforms\nQ From MOSFET to HEMT\nQ Epitaxy Defect Engineering\n+» SiGe & lII-V technology\nQ Strained Si MOSFET\nQ siGe channels & liI-V HEMTs\nQ Nitride Materials — AlIGaN/GaN HEMTs\n++ Conclusions & perspectives rE fe
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