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body_diff: "[{\"diffs\":[[1,\"<html>\\\r\\\n<head>\\\r\\\n  <title>Lam Research（泛林集团）有哪些半导体设备？</title>\\\r\\\n  <basefont face=\\\"微软雅黑\\\" size=\\\"2\\\" />\\\r\\\n  <meta http-equiv=\\\"Content-Type\\\" content=\\\"text/html;charset=utf-8\\\" />\\\r\\\n  <meta name=\\\"exporter-version\\\" content=\\\"YXBJ Windows/608924 (zh-CN, DDL); Windows/10.0.0 (Win64); EDAMVersion=V2;\\\"/>\\\r\\\n  <meta name=\\\"content-class\\\" content=\\\"yinxiang.peso.superNote\\\"/>\\\r\\\n  <meta name=\\\"application-data:yinxiang.noteLayout\\\" content=\\\"{\\\"lineSpace\\\":\\\"recommend\\\",\\\"paragraphSpace\\\":\\\"recommend\\\"}\\\"/>\\\r\\\n  <style>\\\r\\\n\\tbody, td {\\\r\\\n\\t  font-family: 微软雅黑;\\\r\\\n\\t  font-size: 12pt;\\\r\\\n\\t}\\\r\\\n  </style>\\\r\\\n</head>\\\r\\\n<body>\\\r\\\n<a name=\\\"46536\\\"></a>\\\r\\\n<h1>Lam Research（泛林集团）有哪些半导体设备？</h1>\\\r\\\n\\\r\\\n<div><span style=\\\"\\\"><div style=\\\"max-width: 700px;\\\"><p></p><div style=\\\"--en-blockquote: true; box-sizing: border-box; border-left: 3px solid #b4c0cc; background-position: initial initial; background-repeat: initial initial;\\\"><div>原文链接: <a href=\\\"https://mp.weixin.qq.com/s?__biz=Mzg3MTU2ODM2Mg==&amp;mid=2247497146&amp;idx=1&amp;sn=2062398359ee42af3c92b89863fb2a22&amp;chksm=cf780a92b76813d7bf69f878ee6ffd1fec875cd39792204d2df3b2509ac6a82bfed6f63c7179&amp;mpshare=1&amp;scene=1&amp;srcid=0905kNfDIr82aTbutBszh1Ar&amp;sharer_shareinfo=57b750ef76ba6d1a7a3301eefad5aa07&amp;sharer_shareinfo_first=57b750ef76ba6d1a7a3301eefad5aa07#rd\\\"><span>https://mp.weixin.qq.com/s?__biz=Mzg3MTU2ODM2Mg==&amp;mid=224749...</span></a></div></div><p></p><div style=\\\"\\\"><div><div><div><span style=\\\"\\\">原创</span><span><span style=\\\"\\\">Semi Dance</span></span><span><a style=\\\"\\\"> Semi Dance </a></span><span><em></em></span></div><div style=\\\"\\\"><h1 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">1 Lam Research公司概览</span></h1><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>Lam Research Corporation（中文常译为“泛林集团”或“拉姆研究”），成立于1980年，是全球半导体设备产业的巨擘。其核心业务聚焦于集成电路制造中的</span><strong style=\\\"font-weight: 600;\\\"><span>刻蚀（Etch）</span></strong><span>、</span><strong style=\\\"font-weight: 600;\\\"><span>薄膜沉积（Deposition）</span></strong><span>、</span><strong style=\\\"font-weight: 600;\\\"><span>晶圆清洗（Wafer Cleaning）</span></strong><span> 三大核心工艺环节。公司在等离子体物理、原子级加工和集成化设备解决方案方面拥有绝对领先优势，是台积电、三星、英特尔、美光等全球顶级芯片制造商不可或缺的技术合作伙伴。</span></span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span style=\\\"font-weight: 700;\\\">公司创始与早期发展</span><br/></span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>Lam Research（泛林集团）由</span><strong style=\\\"font-weight: 600;\\\"><span>华人科学家林杰屏博士</span></strong><span>（Dr. David K. Lam）于1980年创立，总部位于美国加利福尼亚州硅谷。</span></span></p><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/1267c93538364ee0b9fd4e7d6ae6939b\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><br/></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">林杰屏博士的经历堪称传奇，他因战乱辗转越南和香港地区，后前往加拿大就读于多伦多大学，于1967年获得工程物理应用科学学士学位，1973年获得麻省理工学院博士学位。在创业之前，他曾在德州仪器（TI）和惠普（HP）等科技巨头工作，积累了丰富的经验和行业洞察。在德州仪器，他学到了生产设备和市场需求之间的关系；在惠普，他理解了自动化的重要性，并有机会参与到刻蚀技术的研究中。</span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>林杰屏怀揣着</span><strong style=\\\"font-weight: 600;\\\"><span>制造下一代等离子刻蚀机</span></strong><span>的愿景，决定辞职创建自己的公司。他的战略规划围绕三个核心原则：采用单晶圆刻蚀法、工厂必须高度自动化、使用调制解调器进行远程诊断。幸运的是，他的想法得到了集成电路的共同发明人、半导体行业传奇人物</span><strong style=\\\"font-weight: 600;\\\"><span>鲍勃·诺伊斯（Bob Noyce）</span></strong><span> 的认可和支持，并成功获得了第一笔创业资金。</span></span></p><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/50a976797b6d47159f206a6bd74256c6\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><br/></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>1981年，公司推出了</span><strong style=\\\"font-weight: 600;\\\"><span>第一款产品AutoEtch 480</span></strong><span>，这是一台自动化多晶硅等离子刻蚀机，于次年1月成功售出第一台。1983年，泛林的刻蚀机销售量大幅增长，公司于1984年在纳斯达克上市。值得一提的是，林杰屏博士在公司上市后的第二年（1985年）便离开了自己创立的公司。</span></span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">1980年代末至1990年代初，Lam Research开始向海外扩张，在中国台湾、韩国、日本和新加坡等地新建工厂，开启了全球化布局的步伐。这一时期的扩张为公司后续成为全球半导体设备领导企业奠定了坚实基础。</span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><em><span style=\\\"\\\">表：Lam Research早期发展里程碑</span></em></p><table style=\\\"border-collapse: collapse; width: max-content; max-width: max-content;\\\"><thead><tr><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">年份</span></strong></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">重要事件</span></strong></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">技术/市场意义</span></strong></th></tr></thead><tbody><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">1980</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">公司成立</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">专注于等离子刻蚀技术</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">1981</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">推出AutoEtch 480</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">首台自动化多晶硅等离子刻蚀机</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">1984</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">纳斯达克上市</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">获得资本市场支持，加速发展</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">1985</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">创始人林杰屏离职</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">公司进入职业经理人管理阶段</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">1990s初</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">海外扩张</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">在中国台湾、韩国、日本和新加坡设厂</span></div></td></tr></tbody></table><h2 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">技术扩张与市场领先地位确立</span></h2><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">1990年代是Lam Research巩固其技术优势并扩大产品范围的关键时期。1992年，公司推出了首款电容耦合等离子体刻蚀机，1995年又推出了首款双频介质刻蚀机，不断强化其在刻蚀市场的领导地位。这些技术创新使得Lam的刻蚀设备在精度、效率和均匀性方面持续提升，满足了半导体制造工艺不断微缩的需求。</span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>战略收购</span></strong><span>是Lam Research扩大业务范围和技术能力的重要手段：</span></span></p><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><span style=\\\"\\\">1997年，公司以2.25亿美元收购了芯片设备制造商OnTrak Systems，增强了其在晶圆处理领域的能力。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><span style=\\\"\\\">2005年，收购高纯度定制硅元件与组件的全球供应商Bullen Semiconductor，提升了关键零部件供应能力。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><span style=\\\"\\\">2008年，收购全球领先的晶圆清洁设备供应商SEZ Group，显著增强了其在清洗技术领域的实力。</span></p></li></ul><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>然而，最具转折意义的收购发生在2012年，Lam Research以约33亿美元收购了</span><strong style=\\\"font-weight: 600;\\\"><span>薄膜沉积设备商Novellus Systems</span></strong><span>。这次收购不仅极大地扩展了公司的产品组合，还使其成为了刻蚀、薄膜沉积和清洗三大核心半导体制造工艺的全方位解决方案提供商。通过这次收购，Lam成功整合了Novellus在化学气相沉积（CVD）、电化学沉积（ECD）等领域的先进技术，与自身原有的刻蚀优势形成强大协同效应。</span></span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">到2010年，Lam Research凭借销售额200%的增长，位居全球半导体设备厂商排名第四。2016年，公司成功进入《财富》500强名单，标志着已成为全球最具影响力的工业企业之一。根据Gartner数据，2021年全球刻蚀机市场规模达到222.8亿美元，相较2020年同比增长6%，而Lam Research在该市场的占有率高达46%，处于绝对龙头地位。</span></p><h2 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">代表性产品与技术突破</span></h2><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">Lam Research的产品线涵盖了半导体制造的前道工艺多个关键环节，主要包括刻蚀设备、薄膜沉积设备、清洗设备以及先进封装解决方案。这些产品和技术创新不仅推动了半导体制造业的发展，也为Lam Research赢得了市场领导地位。</span></p><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">刻蚀设备（Etch Systems）</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">刻蚀是Lam Research最核心和最具竞争优势的领域，公司在该市场占有率达46%，处于绝对龙头地位。Lam的刻蚀设备产品线丰富，主要包括：</span></p><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Sense.i®系列</span></strong><span>：业界最智能、最互联的刻蚀系统，深度融合了人工智能和机器学习算法，能够实现自适应的工艺控制、预测性维护和卓越的均匀性。</span></p></li><li><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/8f67e4c3cc3f4630bc7fbae4b379d2f3\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Kiyo®系列</span></strong><span>：采用电感耦合等离子体（ICP）技术，专注于导体刻蚀，如多晶硅栅极、金属栅极和接触孔刻蚀。</span></p></li><li><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/13c1322fcfe842cdb9b01e649f015e06\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Flex®系列</span></strong><span>：采用电容耦合等离子体（CCP）技术，专注于介质刻蚀，如氧化硅、氮化硅和低k介质刻蚀。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Syndion®系列</span></strong><span>：深反应离子刻蚀（DRIE）系统，主要用于MEMS制造和先进封装中的硅通孔（TSV）刻蚀。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Vantex®系列</span></strong><span>：用于光刻胶去除（灰化）和表面处理。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>选择性刻蚀产品系列</span></strong><span>：包括Argos、Prevos和Selis，专门用于选择性去除特定材料而不损伤其他层，是GAA晶体管等先进结构制造的关键技术。</span></p></li></ul><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>2022年，Lam Research推出了</span><strong style=\\\"font-weight: 600;\\\"><span>全新的选择性蚀刻产品系列</span></strong><span>，包括Argos、Prevos和Selis三款产品，应用开创性晶圆制造技术与新兴的化学方法，支援晶片制造商开发环绕式闸极（GAA）电晶体结构。这些解决方案提供超高可调控选择性与材料无损去除能力，使晶片制造商能够在先进逻辑纳米层片或纳米线应用，以及DRAM面临平面微缩极限时，实现从平面到3D结构的下一步技术跃升。</span></span></p><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">薄膜沉积设备（Deposition Systems）</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">通过收购Novellus Systems，Lam Research成为了薄膜沉积领域的领导企业。其沉积设备主要包括：</span></p><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VECTOR®系列</span></strong><span>：等离子体增强化学气相沉积（PECVD）系统，用于沉积各种介质薄膜，如氧化硅、氮化硅和低k介质。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>ALTUS®系列</span></strong><span>：专门用于钨沉积，采用冷壁反应腔设计和脉冲成核层（PNL）技术，能够无孔洞地填充高深宽比的接触孔和通孔。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Striker®系列</span></strong><span>：原子层沉积（ALD）系统，提供原子级厚度控制和极佳的台阶覆盖率，用于沉积高k栅极介质、金属栅极和DRAM电容器介质等。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SABRE®系列</span></strong><span>：电化学沉积（ECD）系统，主要用于铜互连工艺，采用电化学机械沉积（ECMD）技术，能够无孔洞地填充高深宽比的互连沟槽。</span></p></li></ul><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">清洗设备（Cleaning Systems）</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">Lam Research的清洗设备主要包括湿法清洗和干法清洗两种类型：</span></p><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>EOS®系列</span></strong><span>：湿式晶圆清洗系统，用于晶片处理步骤之间，去除会影响良率的残留物与缺陷。EOS系列采用先进的腔体设计，可实现极低的缺陷率，最多拥有16个处理腔体，可提供最佳化的高生产量。它还采用专有技术的高深宽比结构用无倾倒干燥技术，以及高效的溶剂化学回收，可实现最低的拥有成本。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Coronus®系列</span></strong><span>：晶圆边缘和斜角处理系统，专门用于去除晶圆边缘的薄膜和污染物，是提高先进制程良率的关键设备。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>DV-Prime®和Da Vinci®系列</span></strong><span>：单晶圆旋转清洗系统，提供先进的湿法清洗能力，能够处理最先进的3D结构而不造成损伤或坍塌。</span></p></li></ul><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><em><span style=\\\"\\\">表：Lam Research主要产品系列及应用领域</span></em></p><table style=\\\"border-collapse: collapse; width: max-content; max-width: max-content;\\\"><thead><tr><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">产品类别</span></strong></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">主要产品系列</span></strong></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">关键技术</span></strong></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">主要应用</span></strong></th></tr></thead><tbody><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">刻蚀设备</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Sense.i®, Kiyo®, Flex®, Syndion®</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">ICP, CCP, DRIE, 选择性刻蚀</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">导体刻蚀, 介质刻蚀, 硅深孔刻蚀, 选择性去除</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">薄膜沉积</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">VECTOR®, ALTUS®, Striker®, SABRE®</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">PECVD, ALD, ECD</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">介质沉积, 钨栓塞填充, 原子层沉积, 铜互连</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">清洗设备</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">EOS®, Coronus®, DV-Prime®</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">湿法清洗, 边缘处理, 单晶圆清洗</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">颗粒去除, 边缘清洗, 结构干燥</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">先进封装</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Syndion® G, SABRE® 3D</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">TSV刻蚀, 铜填充</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">2.5D/3D封装, 硅通孔形成与填充</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">工艺建模</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">SEMulator3D®</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">虚拟制造, 工艺仿真</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">工艺开发, 问题</span></div></td></tr></tbody></table><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><br/></span></p><div style=\\\"text-align: center;\\\"><span style=\\\"\\\"><img src=\\\":/f16dd426a6634af9afad615efeea2091\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></span></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><br/></span></p><div style=\\\"text-align: center;\\\"><span style=\\\"\\\"><img src=\\\":/8a2b904ac8644453865ebf6579ca02bc\\\" type=\\\"image/png\\\" data-filename=\\\"640.png\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></span></div><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">市场统治力</span></h3><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>等离子体刻蚀（Plasma Etch）</span></strong><span>：常年占据全球市场份额首位（超过50%），在介质刻蚀和导体刻蚀领域均拥有无可争议的领导地位。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>薄膜沉积（Thin-Film Deposition）</span></strong><span>：尤其在</span><strong style=\\\"font-weight: 600;\\\"><span>电化学沉积（ECD）</span></strong><span>、</span><strong style=\\\"font-weight: 600;\\\"><span>原子层沉积（ALD）</span></strong><span> 以及用于3D NAND的</span><strong style=\\\"font-weight: 600;\\\"><span>高深宽比（HAR） CVD</span></strong><span> 领域是全球市场的核心领导者。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>晶圆清洗（Wafer Cleaning）</span></strong><span>：提供先进的干法和湿法清洗解决方案，是先进逻辑和存储芯片制造中的关键供应商。</span></p></li></ul><h2 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">2 刻蚀设备（Etch Equipment）：Lam的技术基石与王冠</span></h2><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">刻蚀是半导体制造中定义电路图形的关键步骤。Lam凭借其革命性的变压器耦合等离子体（TCP®）源技术和持续创新，在该领域建立了极高的技术壁垒。</span></p><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">2.1 刻蚀工艺原理</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">现代干法刻蚀主要依赖等离子体（物质的第四态）进行。其核心原理在于：</span></p><ol start=\\\"1\\\" style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>生成等离子体</span></strong><span>：在真空反应腔内，通过射频（RF）能量将通入的工艺气体（如CF₄, Cl₂, HBr等）电离，产生包含离子、电子、自由基等高活性物质的等离子体。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>表面反应</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>化学反应</span></strong><span>：等离子体中的自由基与晶圆表面的原子发生化学反应，生成挥发性产物。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>物理轰击</span></strong><span>：带正电的离子在电场作用下被加速轰击晶圆表面，通过物理动量溅射去除材料，并增强化学反应的方向性（各向异性）。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>副产物去除</span></strong><span>：挥发性反应副产物被真空系统抽走。</span></p></li></ol><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>Lam的核心技术在于对等离子体密度和离子能量的</span><strong style=\\\"font-weight: 600;\\\"><span>独立精准控制</span></strong><span>，从而实现优异的</span><strong style=\\\"font-weight: 600;\\\"><span>刻蚀速率</span></strong><span>、</span><strong style=\\\"font-weight: 600;\\\"><span>均匀性</span></strong><span>、</span><strong style=\\\"font-weight: 600;\\\"><span>选择比</span></strong><span>（对不同材料的刻蚀速率比）和</span><strong style=\\\"font-weight: 600;\\\"><span>轮廓控制</span></strong><span>。</span></span></p><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">2.2 Lam刻蚀设备主要产品系列概览</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><em><span style=\\\"\\\">表：Lam Research 主要刻蚀产品系列及应用领域</span></em></p><table style=\\\"border-collapse: collapse; width: max-content; max-width: max-content;\\\"></table><table style=\\\"border-collapse: collapse; width: max-content; max-width: max-content;\\\"><caption></caption><colgroup><col></col><col></col><col></col><col></col></colgroup><thead><tr><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">产品系列/平台</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">核心技术</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">主要应用领域</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">代表型号</span></div></th></tr></thead><tbody><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Sense.i®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">人工智能驱动、自适应控制、RF驱动</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">最先进的逻辑和存储芯片刻蚀</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Sense.i</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Coronus®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">定向边缘等离子体处理</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">晶圆边缘和斜角刻蚀与清洗</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Coronus HP, Coronus DX</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">DSiE™</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">双频CCP高深宽比刻蚀</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">3D NAND通道孔、DRAM电容</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">DSiE F Series, DSiE G Series</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Flex®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">电感耦合等离子体（ICP）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">导体刻蚀（栅极、接触孔、金属互连）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Flex G Series, Flex H Series</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Kiyo®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">反应离子刻蚀（RIE）/电容耦合等离子体（CCP）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">介质刻蚀（氧化物、氮化物、低k介质）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Kiyo G Series</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Syndion®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">深反应离子刻蚀（DRIE）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">MEMS、先进封装（TSV硅通孔）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Syndion G-Series</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Selis®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">选择性刻蚀（热/化学）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">选择性去除特定材料（如SiGe, SiN）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Selis</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Vantex</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">去胶和表面处理</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">光刻胶去除、表面预处理</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Vantex</span></div></td></tr></tbody></table><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">2.3 产品型号</span></h3><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Akara®: Sense.i® Platform - 智能刻蚀的终极形态</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：Sense.i并非单一型号，而是一个革命性的智能平台。它集成了</span><strong style=\\\"font-weight: 600;\\\"><span>大量实时传感器</span></strong><span>（用于测量温度、压力、RF状态、光学发射光谱等）、</span><strong style=\\\"font-weight: 600;\\\"><span>强大的边缘计算能力</span></strong><span>和</span><strong style=\\\"font-weight: 600;\\\"><span>机器学习算法</span></strong><span>。其“自适应智能”功能能够感知每一个晶圆的微小差异，并在刻蚀过程中动态调整数百个参数，实现“每片晶圆都处于最佳工艺窗口”的终极目标。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>核心优势</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>卓越的均匀性</span></strong><span>：即使在最先进的3nm节点，也能实现原子级别的晶圆内和晶圆间均匀性。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>预测性维护</span></strong><span>：AI模型能预测部件寿命和工艺漂移，在问题发生前触发维护，极大提升设备利用率（OEE）。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>快速量产</span></strong><span>：通过虚拟工艺模型（SEMulator3D®）和云端数据共享，极大缩短新工艺的开发与量产导入时间。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：专为最苛刻的逻辑（FinFET, GAA）和存储（3D NAND, DRAM）芯片的大规模量产而设计。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Coronus® Product Family - 守护晶圆良率的边缘卫士</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：在先进制程中，晶圆边缘沉积的薄膜和产生的颗粒是致命的污染源。Coronus系列使用一个专用的、角度可调的喷头，产生局部的定向等离子体，精确地对晶圆边缘的斜角（bevel）和最外围几毫米的区域进行选择性刻蚀或清洗，而不影响主芯片区。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Coronus® HP</span></strong><span>：高生产率型号，吞吐量高，适用于需要频繁进行边缘处理的先进逻辑和存储芯片生产线。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Coronus® DX</span></strong><span>：更先进的型号，提供了更复杂的工艺能力，例如处理更脆弱的超低k介质材料边缘，或进行更精细的边缘图形化。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：所有28nm以下节点的逻辑芯片和3D NAND芯片制造中必不可少的良率管理工具。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">RIE DSiE Product Family - 征服3D NAND的深孔利刃</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：3D NAND需要刻蚀深度超过100微米、深宽比超过60:1的极深通道孔。DSiE系列采用</span><strong style=\\\"font-weight: 600;\\\"><span>双频电容耦合等离子体（CCP）</span></strong><span> 源：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>高频（Hz）</span></strong><span>：控制等离子体密度，决定刻蚀速率。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>低频（LF）</span></strong><span><span>：控制离子轰击能量，决定刻蚀的方向性和轮廓。</span></span><br/><span><span>通过精确控制两种频率的功率和相位，即使在刻蚀深度不断加深的情况下，也能确保等离子体和活性基团能到达孔底，并保持孔的垂直度和圆度。</span></span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号演进</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>DSiE™ III</span></strong><span>：早期型号，为第一代3D NAND（24层左右）的开发与量产立下汗马功劳。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>DSiE™ F Series</span></strong><span>：成熟量产型号，针对64层/96层3D NAND进行了优化，提升了生产率和成本效益。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>DSiE™ G Series</span></strong><span>：当前主力型号，专为128层以上乃至500+层的3D NAND设计。采用了更先进的射频脉冲技术、腔室设计和工艺化学，以应对极深极窄孔带来的电荷累积、扭曲、弓形等挑战。</span></p></li></ul></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Flex® Product Family - 导体刻蚀的王者家族</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：Flex系列采用</span><strong style=\\\"font-weight: 600;\\\"><span>电感耦合等离子体（ICP）</span></strong><span> 源。TCP线圈产生高密度、低损伤的等离子体，而下电极的独立偏置RF则控制离子轰击能量。这种解耦设计使其在刻蚀多晶硅、金属等导体材料时，能同时实现高速率、高选择比（对底层介质）和低损伤。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号演进</span></strong><span>（体现了制程技术的演进）：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Flex® D/E Series</span></strong><span>：服务于90nm至32nm节点的多晶硅栅极和金属栅极刻蚀。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Flex® F Series</span></strong><span>：为22/20nm及16/14nm FinFET节点开发，成功解决了复杂3D鳍片结构刻蚀的难题。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Flex® G Series</span></strong><span>：服务于10nm/7nm节点，引入了原子级工艺控制，以刻蚀更精细的线条和更复杂的多重图形化结构。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Flex® H Series</span></strong><span>：专为5nm及以下节点和EUV光刻时代设计，具备极高的控制精度和稳定性，以应对EUV更随机、更敏感的图形特征。</span></p></li></ul></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Kiyo® Product Family - 介质刻蚀的精度大师</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：Kiyo系列主要采用</span><strong style=\\\"font-weight: 600;\\\"><span>电容耦合等离子体（CCP）</span></strong><span> 技术，通过调节上下电极的射频功率和频率，精细控制等离子体特性，实现对各种介质材料（如SiO₂, SiN, SiON, 低k介质）的高选择比、各向异性刻蚀。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号演进</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Kiyo® C/E/F Series</span></strong><span>：这些系列随技术节点进步而迭代，不断改进腔室均匀性、颗粒控制能力和射频稳定性，以满足从65nm到14nm节点的介质刻蚀需求（如自对准接触孔、间隔层、硬掩模刻蚀）。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Kiyo® G Series</span></strong><span>：最新一代介质刻蚀系统，集成了先进的脉冲射频技术和更灵敏的工艺控制系统，用于刻蚀5nm/3nm节点中极其脆弱和精细的介质结构，并能有效防止低k介质的k值损伤和坍塌。</span></p></li></ul></ul><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">2.4 其他关键刻蚀设备详解</span></h3><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Syndion® Product Family - 穿透硅晶的深钻专家</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：Syndion系列采用</span><strong style=\\\"font-weight: 600;\\\"><span>深反应离子刻蚀（DRIE）</span></strong><span> 技术，特别是基于</span><strong style=\\\"font-weight: 600;\\\"><span>博世（Bosch）工艺</span></strong><span>，该工艺通过快速交替的“刻蚀”和“钝化”步骤来实现。刻蚀步骤使用SF₆等气体进行各向同性刻蚀，而钝化步骤则使用C₄F₈等气体在侧壁沉积一层聚合物保护膜。这种循环使得刻蚀在垂直方向远快于水平方向，从而能够刻蚀出侧壁垂直、深宽比极高的结构。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号演进</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Syndion® C</span></strong><span>：基础型号，为MEMS器件和早期TSV应用提供可靠的DRIE解决方案。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Syndion® F-Series</span></strong><span>：提升了生产效率和工艺均匀性，满足大规模MEMS制造和先进封装中对TSV深度一致性的更高要求。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Syndion® G-Series</span></strong><span>：最新一代DRIE系统，支持更高深宽比的TSV（用于3D堆叠封装）和更复杂的MEMS结构。它提供了更好的轮廓控制和更低的侧壁粗糙度，减少了后续工艺的难度。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：主要应用于微机电系统（MEMS）如加速度计、陀螺仪的制造，以及先进封装领域的硅通孔（TSV）刻蚀，是实现芯片3D堆叠的关键技术。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Selective Etch Product Family - 原子级的选择性去除</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：选择性刻蚀是先进逻辑芯片制造中的颠覆性技术。与传统等离子体刻蚀不同，Selis®等技术采用热学或化学气相方法，通过精确控制反应温度和气体化学，实现仅对目标材料（如硅锗-SiGe）进行高速率刻蚀，而对其他材料（如硅-Si）的刻蚀速率极低（选择比可达100:1以上），几乎为零损伤。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Selis®</span></strong><span>：Lam的选择性刻蚀产品。在制造纳米片（Nanosheet）或环绕栅极（GAA）晶体管时，需要多次、选择性地去除SiGe牺牲层而不损伤Si通道层，Selis®是实现这一步骤的核心设备。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：是5nm及以下逻辑节点制造GAA晶体管架构的关键 enabling technology（使能技术）。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">RIE Vantex Product Family - 光刻胶的终结者</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：Vantex系统主要用于</span><strong style=\\\"font-weight: 600;\\\"><span>光刻胶去除（Ashing）</span></strong><span>。它使用高密度的氧等离子体，将碳氢化合物组成的光刻胶氧化成易挥发的CO₂和H₂O，从而将其从晶圆表面去除。同时，它也用于一些表面的轻度处理，以改变其化学性质。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：在刻蚀或离子注入完成后，去除完成使命的光刻胶掩模。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Metior® Product Family - 量测与刻蚀的融合</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：Metior系列并非单纯的刻蚀设备，而是集成了</span><strong style=\\\"font-weight: 600;\\\"><span>原位（In-Situ）质量计量</span></strong><span>的先进刻蚀系统。它在刻蚀反应腔内集成了高精度传感器，能够在刻蚀过程中实时、不间断地监测被刻蚀材料的厚度。当刻蚀达到目标厚度时，系统能立即自动终止工艺，实现了无与伦比的工艺控制精度和重复性。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Metior® HX</span></strong><span>：高性能型号，提供了极高的计量精度和速度。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Metior® HXE</span></strong><span>：在HX基础上增强了某些性能，可能支持更广泛的材料或更严苛的工艺环境。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：主要用于需要极高刻蚀停止控制精度的应用，如浅沟槽隔离（STI）、锗硅（SiGe）通道刻蚀等。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">TCP® 系列 - Lam传奇的等离子体源</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：变压器耦合等离子体（TCP）源是Lam的核心专利技术。它通过一个位于反应腔上方的平面线圈（天线）将射频能量耦合到工艺气体中，产生高密度、低离子能量的等离子体。其最大优势在于等离子体密度和离子能量可以独立控制，为工艺优化提供了极大的灵活性。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号演进</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>TCP 9400 family</span></strong><span>：经典的刻蚀平台，搭载TCP源，广泛应用于多个技术节点的介质和导体刻蚀。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>TCP® 9600 family</span></strong><span>：TCP 9400的升级版，提供了更强大的RF功率、更好的均匀性和更低的缺陷率，用于更先进的节点。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>意义</span></strong><span>：TCP源是Lam众多刻蚀产品（如Flex, Kiyo系列）的技术基础，是Lam确立刻蚀市场领导地位的关键。</span></p></li></ul><hr style=\\\"background: repeat rgba(0, 0, 0, 0.1); border-width: medium; border-style: none; border-color: currentcolor; height: 1px; display: block; color: rgb(15, 17, 21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"/><h2 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">3 薄膜沉积设备（Deposition Equipment）：构建微观世界的基石</span></h2><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">薄膜沉积是在晶圆表面生长或覆盖一层薄薄的材料（从几埃到几微米）的工艺。Lam通过2012年收购Novellus Systems，极大地增强了其在沉积领域的产品实力。</span></p><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">3.1 化学气相沉积（CVD）原理</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">CVD是通过让气态前驱体（Precursors）在反应腔内发生化学反应，生成固态物质并沉积在晶圆表面的过程。等离子体增强CVD（PECVD）利用等离子体来活化反应气体，显著降低了反应所需温度，扩大了应用范围。</span></p><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">3.2 Lam CVD设备主要产品系列概览</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><em><span style=\\\"\\\">表：Lam Research 主要CVD产品系列及应用领域</span></em></p><table style=\\\"border-collapse: collapse; width: max-content; max-width: max-content;\\\"><caption></caption><colgroup><col></col><col></col><col></col><col></col></colgroup><thead><tr><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">产品系列/平台</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">核心技术</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">主要应用领域</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">代表型号</span></div></th></tr></thead><tbody><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">VECTOR®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">等离子体增强化学气相沉积（PECVD）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">介质薄膜沉积（氧化物、氮化物、低k介质）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">VECTOR Strata®, VECTOR ALD®</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">ALTUS®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">高温CVD、回流工艺</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">钨栓塞填充、先进封装</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">ALTUS Max, ALTUS Max ExtremeFill™</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">SPEED®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">高密度等离子体CVD（HDP-CVD）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">高质量氧化物填充</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">SPEED® NEXT, SPEED® Max</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Striker®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">原子层沉积（ALD）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">极高 conformity 薄膜沉积</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Striker FE, Striker® ICE™</span></div></td></tr></tbody></table><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">3.3 产品型号深度详解</span></h3><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">VECTOR® PECVD Product Family - 介质沉积的市场标杆</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：VECTOR平台采用先进的PECVD技术，通过精确控制等离子体特性、温度场和气流，在晶圆上沉积出高度均匀、低应力、低缺陷的介质薄膜。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VECTOR®</span></strong><span>：基础平台，支持300mm和200mm晶圆。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VECTOR® TEOS</span></strong><span>：专用于使用TEOS（正硅酸乙酯）前驱体沉积二氧化硅（SiO₂）薄膜，具有良好的台阶覆盖能力。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VECTOR® AHM®</span></strong><span>：用于沉积先进的高迁移率薄膜。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VECTOR® Strata®</span></strong><span>：一个高度集成的系统，可在同一平台内依次进行CVD和蚀刻工艺，用于实现自间隙壁（Self-Aligned Spacer）等复杂结构，是FinFET和GAA制造中的关键设备。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VECTOR® MD</span></strong><span>：可能指用于沉积介质薄膜的型号。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VECTOR® DT</span></strong><span>：可能指双反应腔（Dual-Track）配置，以提高生产效率。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：沉积氮化硅（SiN）侧墙、氧化硅阻挡层、低k介质层、钝化层等，应用于从成熟到最先进的所有逻辑和存储工艺。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">ALTUS® Product Family - 完美填充的钨栓塞专家</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：ALTUS系列专注于</span><strong style=\\\"font-weight: 600;\\\"><span>钨（W）</span></strong><span> CVD沉积，用于形成晶体管之间的接触孔栓塞和互连通孔。其核心优势在于</span><strong style=\\\"font-weight: 600;\\\"><span>“冷壁”（Cold-Wall）</span></strong><span> 反应腔设计（只有晶圆被加热）和</span><strong style=\\\"font-weight: 600;\\\"><span>脉冲成核层（PNL）</span></strong><span> 技术，确保了钨薄膜具有优异的粘附性和极佳的填充能力，能够无孔洞地填充高深宽比的接触孔。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号演进</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>ALTUS® Halo</span></strong><span>：较早的型号。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Concept Two® ALTUS</span></strong><span>：用于200mm晶圆的型号。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>ALTUS® Max</span></strong><span>：主力量产型号，为300mm晶圆提供了更高的生产率和更优的薄膜性能。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>ALTUS® Max ExtremeFill™</span></strong><span>：增强了填充能力，针对最先进节点中深宽比更高的接触孔。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>ALTUS® DirectFill™ Max</span></strong><span>：可能集成了成核层和体填充步骤，简化了流程。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>ALTUS® Max ICEFill</span></strong><span>：可能引入了新的工艺化学或硬件设计，以应对特定挑战。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：逻辑和存储芯片中所有钨接触孔和通孔的沉积。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">HP-CVD-SPEED Product Family - 高质量氧化物填充之王</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：SPEED系列采用</span><strong style=\\\"font-weight: 600;\\\"><span>高密度等离子体CVD（HDP-CVD）</span></strong><span> 技术。它在沉积氧化硅的同时，辅以氩气等惰性气体的</span><strong style=\\\"font-weight: 600;\\\"><span>物理溅射</span></strong><span>效应。这种“沉积-溅射-再沉积”的协同效应能有效去除孔洞入口处的悬垂物，从而实现近乎完美的</span><strong style=\\\"font-weight: 600;\\\"><span>间隙填充（Gapfill）</span></strong><span>，避免产生孔洞（Void）。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号演进</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SPEED® NEXT</span></strong><span>：早期型号。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SPEED® Max</span></strong><span>：高性能型号，提供了更高的沉积速率和更好的填充能力，用于更窄的器件间距。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：主要用于浅沟槽隔离（STI）和前段金属间介质（PMD）的氧化物填充，是防止晶体管间短路的关键步骤。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">ALD-Striker Product Family - 原子级的薄膜控制</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：原子层沉积（ALD）是一种将物质以单原子膜的形式一层一层镀在基底表面的方法。它通过将气相前驱体脉冲交替地通入反应腔，并利用表面自限制反应，实现无与伦比的</span><strong style=\\\"font-weight: 600;\\\"><span>膜厚控制精度</span></strong><span>（原子层级）和</span><strong style=\\\"font-weight: 600;\\\"><span>极佳的台阶覆盖率</span></strong><span>（100% Conformity），即使是深宽比极高的结构也能均匀覆盖。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Striker</span></strong><span>：Lam的核心ALD平台。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Striker® FE</span></strong><span>：可能指“Front End”（前段），用于沉积逻辑芯片前道工艺中的高k栅极介质、金属栅极等薄膜。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Striker® ICE™</span></strong><span>： likely指“Integrated Conformal Etch”，可能结合了ALD和刻蚀功能，用于更复杂的三维结构制备。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：高k金属栅（HKMG）、晶体管间隔层、DRAM电容器介质、3D NAND中的电荷陷阱层等。</span></p></li></ul><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">3.4 电化学沉积（ECD）设备 - 金属互连的填充艺术</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">电化学沉积（Electrochemical Deposition, ECD），又称电镀（Electroplating），是先进芯片制造中形成铜互连线的关键技术。其核心挑战在于无孔洞地填充高深宽比的微细沟槽，确保电路的导电性和可靠性。</span></p><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">技术原理</span></strong></h4><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">铜ECD过程通常首先通过物理气相沉积（PVD）在沟槽和孔洞内沉积一层薄的阻挡层（如TaN）和铜种子层（Seed Layer）。种子层为后续的电镀提供导电通路。随后，晶圆浸入含有铜离子的电解液中，在电场作用下，铜离子在晶圆表面还原成金属铜，优先从沟槽底部开始生长，最终实现完美填充。</span></p><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">SABRE® Product Family - 铜互连填充的行业标准</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>产品定位</span></strong><span>：SABRE系列是Lam（原Novellus）的旗舰电镀产品线，长期以来一直是全球铜大马士革工艺互连技术的行业标杆。其独特的</span><strong style=\\\"font-weight: 600;\\\"><span>电化学机械沉积（ECMD）</span></strong><span> 技术和</span><strong style=\\\"font-weight: 600;\\\"><span>多阳极调节</span></strong><span>系统，能够实现超共形（Superconformal）填充，即底部生长速率快于开口处，从而避免在填充过程中产生孔洞（Void）。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号演进与详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SABRE® Extreme</span></strong><span>：高性能型号，针对最先进的逻辑芯片，能够填充更窄、深宽比更大的互连沟槽，确保16/14nm及以下节点的可靠性。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SABRE® Max</span></strong><span>：在Extreme基础上进一步增强了生产率和工艺稳定性，适用于大规模量产环境。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SABRE® Excel</span></strong><span>：可能代表了进一步的自动化或集成化升级，优化了成本效益。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SABRE® 3D</span></strong><span> / </span><strong style=\\\"font-weight: 600;\\\"><span>SABRE® 3D xT</span></strong><span>：这些型号专为</span><strong style=\\\"font-weight: 600;\\\"><span>三维集成和先进封装</span></strong><span>设计。它们不仅能够处理标准晶圆，还能处理更薄的晶圆以及硅通孔（TSV）等封装结构中的巨大深宽比填充需求，是2.5D/3D IC封装技术的关键设备。</span></p></li></ul></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Kallisto® Product Family - 创新性的单晶圆湿法处理</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：Kallisto平台将电化学沉积与湿法处理（如清洗、蚀刻）集成在一个紧凑的系统中。它采用单晶圆、多腔室模块化设计，允许多个湿法工艺步骤在一个设备内 sequentially 完成，减少了晶圆在不同设备间的传送，从而显著降低缺陷、减少占地面积并提高生产效率。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Kallisto ECD CX/CM</span></strong><span>：CX和CM可能代表不同的配置或功能侧重。该系列专注于铜及其它金属的电化学沉积，并与后续的清洗等湿法工艺模块集成，为先进封装和特定器件应用提供一体化的解决方案。</span></p></li></ul></ul><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><em><span style=\\\"\\\">表：Lam Research 主要ECD产品系列对比</span></em></p><table style=\\\"border-collapse: collapse; width: max-content; max-width: max-content;\\\"><caption></caption><colgroup><col></col><col></col><col></col><col></col></colgroup><thead><tr><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">产品系列/平台</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">核心技术</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">主要应用领域</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">技术特点</span></div></th></tr></thead><tbody><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">SABRE®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">电化学机械沉积（ECMD）、多阳极</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">逻辑/存储芯片铜互连</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">超共形填充，无孔洞，行业标杆</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">SABRE® 3D</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">先进电镀技术</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">先进封装、TSV</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">高深宽比TSV填充，处理薄晶圆</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Kallisto®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">集成式单晶圆湿法处理（ECD+Cleaning）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">先进封装、特定器件</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">减少缺陷，节省空间，提高效率</span></div></td></tr></tbody></table><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">3.5 紫外热加工（UVTP）与金属沉积设备</span></h3><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Ultraviolet Thermal Processing (UVTP) - 薄膜的完美修复</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：在沉积某些薄膜（如超低k介质）后，其内部可能含有杂质（如碳氢化合物）或孔洞结构未完全固化，这会损害薄膜的机械和电气性能。UVTP技术通过</span><strong style=\\\"font-weight: 600;\\\"><span>紫外光（UV）</span></strong><span> 和</span><strong style=\\\"font-weight: 600;\\\"><span>热能</span></strong><span>的协同作用，对薄膜进行后处理。紫外光能有效打断薄膜中的弱化学键，并在热能的辅助下驱除杂质，促进薄膜网络结构的充分交联和固化，从而显著降低介电常数（k值）、提高机械强度和使用稳定性。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SOLA® Excel</span></strong><span>：Lam主要的UVTP系统。它用于对超低k介质薄膜进行固化处理，使其能够承受后续的化学机械抛光（CMP）和封装等机械应力，防止薄膜开裂或分层，是先进互连技术不可或缺的一环。</span></p></li></ul></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Versys® Metal Product Family - 金属薄膜沉积的多样化选择</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>产品定位</span></strong><span>：Versys Metal系列专注于通过物理气相沉积（PVD）技术沉积各种金属薄膜。PVD通过物理方法（如溅射、蒸发）将固态靶材源转化为气态，再沉积在晶圆表面形成薄膜。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Versys® Metal</span></strong><span>：基础平台。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Versys® Metal 45TM</span></strong><span>：专为300mm（12英寸）晶圆优化的型号。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Versys® Metal L/M/N</span></strong><span>：这些字母后缀（L, M, N）很可能代表了不同的硬件配置或工艺套件，以优化沉积特定类型的金属（如铝、钛、氮化钛、钽等），应用于接触孔、阻挡层、金属栅极等不同场景。</span></p></li></ul></ul><hr style=\\\"background: repeat rgba(0, 0, 0, 0.1); border-width: medium; border-style: none; border-color: currentcolor; height: 1px; display: block; color: rgb(15, 17, 21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"/><h2 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">4 清洗与表面处理设备（Wafer Cleaning &amp; Surface Preparation）- 纯净的基石</span></h2><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">清洗工艺贯穿芯片制造全程，用于在每一步可能产生污染的前后去除颗粒、有机物、金属杂质和自然氧化层，是保障高良率的基石。Lam通过收购SEZ Group和自身开发，提供了全面的湿法和干法清洗方案。</span></p><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">4.1 清洗工艺原理</span></h3><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>湿法清洗</span></strong><span>：使用化学药液（如SC-1, SC-2, DHF）的溶解和氧化还原反应，结合机械力（兆声波能量）去除污染物。可分为槽式（Batch）和单晶圆（Single-Wafer）清洗，后者已成为先进技术节点的主流，因其能减少交叉污染、节省化学品并更好地处理图形化晶圆。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>干法清洗</span></strong><span>：使用气态化学物质或等离子体进行清洗，避免液体表面张力带来的问题，尤其适用于高深宽比结构的清洗。</span></p></li></ul><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">4.2 Lam清洗设备主要产品系列概览</span></h3><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><em><span style=\\\"\\\">表：Lam Research 主要清洗产品系列及应用领域</span></em></p><table style=\\\"border-collapse: collapse; width: max-content; max-width: max-content;\\\"><caption></caption><colgroup><col></col><col></col><col></col><col></col></colgroup><thead><tr><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">产品系列/平台</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">核心技术</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">主要应用领域</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">代表型号</span></div></th></tr></thead><tbody><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">DV-Prime® &amp; Da Vinci®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">单晶圆湿法清洗</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">先进前端制程清洗、光刻胶去除</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Da Vinci®, DV-Prime®</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">EOS®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">干法光刻胶去除（灰化）</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">刻蚀/离子注入后光刻胶去除</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">EOS®</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">SP Series</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">槽式湿法清洗</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">200mm及150mm晶圆制造</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">SP203L, SP223, SP323</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Prestis®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">临界点干燥（CPD）、超临界CO₂</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">释放MEMS结构、防止图案坍塌</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">Prestis®</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">Coronus®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">晶圆边缘干法清洗/刻蚀</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">去除边缘污染物和缺陷</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">(已在刻蚀章节介绍)</span></div></td></tr></tbody></table><h3 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">4.3 产品型号深度详解</span></h3><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">DV-Prime® &amp; Da Vinci® Product Families - 单晶圆湿法清洗的领导者</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：该系列采用单晶圆旋转处理技术。晶圆被固定在真空吸盘上高速旋转，同时各种化学药液和去离子水通过喷嘴喷洒到晶圆表面，通过化学作用和离心力去除污染物。这种方式实现了每片晶圆的工艺参数独立控制，确保了卓越的均匀性和重复性。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Da Vinci®</span></strong><span>：Lam的核心单晶圆清洗平台，以其卓越的性能和可靠性著称。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>DV-Prime®</span></strong><span>：可能与Da Vinci系列有细微的技术或配置差异，同属于高端单晶圆清洗解决方案。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：用于关键的前端制程清洗，如栅极前清洗、触点前清洗、沉积前清洗等，确保界面质量。</span></p></li></ul></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">EOS® Product Family - 高效的干法去胶专家</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：EOS系统采用</span><strong style=\\\"font-weight: 600;\\\"><span>远程等离子体源</span></strong><span>产生高活性的氧自由基。这些自由基与晶圆表面的光刻胶发生化学反应，将其氧化为挥发性的一氧化碳和水蒸气，从而实现快速、均匀的光刻胶去除（Ashing）。远程等离子体避免了高能离子对晶圆表面敏感结构的直接轰击损伤。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：在刻蚀或离子注入工艺完成后，安全、高效地去除光刻胶掩模。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">SP Series Product Family - 成熟技术的可靠保障</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：SP系列是传统的</span><strong style=\\\"font-weight: 600;\\\"><span>槽式清洗机</span></strong><span>。它将多片晶圆（一个批次）同时浸入装有化学药液的槽体中进行处理。虽然技术在先进性上不如单晶圆清洗，但其吞吐量大，成本效益高。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SP203L</span></strong><span>：用于200mm晶圆清洗。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SP223</span></strong><span>：用于200mm和150mm晶圆清洗。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SP323</span></strong><span>：用于200mm晶圆清洗。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Concept Two® ALTUS® (200 mm)</span></strong><span>：与沉积设备共用平台概念的清洗配置。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Concept Two® SEQUEL® (200 mm, 150 mm)</span></strong><span>：适用于较小尺寸晶圆的清洗解决方案。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Concept Two® SPEED® (200 mm)</span></strong><span>：可能侧重于高生产率的清洗应用。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SPEED® Max (300 mm)</span></strong><span>：将SPEED技术扩展到300mm晶圆。</span></p></li></ul></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Prestis® - 拯救微细结构的超临界干燥术</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：在湿法刻蚀或清洗MEMS器件或极高深宽比结构时，液体（如水）的表面张力在干燥过程中会产生巨大的毛细作用力，足以拉断或使细微的图形结构坍塌（Stiction效应）。Prestis系统采用</span><strong style=\\\"font-weight: 600;\\\"><span>超临界二氧化碳干燥</span></strong><span>技术。在特定的温度和压力下，CO₂达到超临界状态，此时它兼具气体的低粘度和液体的高溶解度，没有气液界面，从而彻底消除了表面张力，能够无损地干燥最脆弱的结构。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用</span></strong><span>：MEMS器件制造、超高深宽比结构的最终释放干燥。</span></p></li></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">Reliant® Product Family - 广泛的沉积与清洗解决方案</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>产品定位</span></strong><span>：Reliant是一个覆盖沉积和清洗的广泛产品系列名称，主要面向</span><strong style=\\\"font-weight: 600;\\\"><span>特殊工艺</span></strong><span>、</span><strong style=\\\"font-weight: 600;\\\"><span>先进封装</span></strong><span>、</span><strong style=\\\"font-weight: 600;\\\"><span>化合物半导体</span></strong><span>和</span><strong style=\\\"font-weight: 600;\\\"><span>MEMS</span></strong><span>市场，以及</span><strong style=\\\"font-weight: 600;\\\"><span>200mm</span></strong><span>和</span><strong style=\\\"font-weight: 600;\\\"><span>150mm</span></strong><span>晶圆制造厂。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>型号详解</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Reliant Clean Products</span></strong><span>：包括一系列湿法和干法清洗设备。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Reliant Deposition Products</span></strong><span>：包括PECVD、LPCVD等多种沉积系统，满足特殊材料的需求。</span></p></li></ul></ul><hr style=\\\"background: repeat rgba(0, 0, 0, 0.1); border-width: medium; border-style: none; border-color: currentcolor; height: 1px; display: block; color: rgb(15, 17, 21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"/><h2 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 700; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">5 工艺建模与虚拟制造 - SEMulator3D® 与 OverViz™</span></h2><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">Lam Research 提供先进的虚拟制造软件平台，帮助客户在昂贵的实际流片（Tape-out）之前，于虚拟环境中设计、验证和优化半导体制造工艺，大幅节省研发成本和时间。</span></p><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><strong style=\\\"font-weight: inherit;\\\"><span style=\\\"\\\">（1）SEMulator3D® - 虚拟工艺集成与器件建模专家</span></strong></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>产品定位</span></strong><span>：SEMulator3D® 是 Lam 旗下的</span><strong style=\\\"font-weight: 600;\\\"><span>虚拟制造</span></strong><span>软件平台，它超越了传统 TCAD 工具的范畴。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：SEMulator3D® 通过基于物理原理的建模，在计算机中完整地构建和模拟整个半导体器件的制造流程。用户可以输入一系列工艺步骤（如沉积、刻蚀、注入等）的参数，软件会自动生成 3D 模型并预测最终器件的结构、电学性能以及可能存在的制造变异和整合问题（如短路、断路）。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>核心功能</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>Process modeling</span></strong><span>：工艺建模，快速进行工艺开发和优化。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>SW Modeling</span></strong><span>：软件建模，构建复杂的集成流程。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>应用价值</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>大幅缩短研发周期</span></strong><span>：在投入昂贵的实际流片前，在虚拟环境中验证和优化工艺方案。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>降低研发成本</span></strong><span>：减少实验次数和试错成本。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>加速良率爬升</span></strong><span>：提前识别和解决整合中的潜在问题。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>支持 DTCO（设计技术协同优化）</span></strong><span>：让工艺开发者和芯片设计者能够在早期共同探索最佳的实现路径。</span></p></li></ul></ul><h4 style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 600; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(15,17,21); letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><strong style=\\\"font-weight: inherit;\\\"><span>（2）OverViz™ - 等离子体过程仿真的高保真引擎</span></strong><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span>2</span></span></span></h4><ul style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>产品定位</span></strong><span>：OverViz™ 是 Lam Research 推出的一个用于</span><strong style=\\\"font-weight: 600;\\\"><span>等离子体放电高保真建模</span></strong><span>的工业仿真软件平台，特别专注于解决半导体制造中复杂的等离子体物理和化学问题</span><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span>2</span></span><span>。它是虚拟制造流程中深入分析等离子体相关工艺步骤的关键工具。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>技术原理</span></strong><span>：OverViz™ 的核心是 </span><strong style=\\\"font-weight: 600;\\\"><span>VizGlow™</span></strong><span> 求解器，它是一个用于非平衡等离子体放电高保真建模的工业仿真工具。VizGlow™ 能够与</span><strong style=\\\"font-weight: 600;\\\"><span>电磁场、流体流动和动力学粒子模型完全耦合</span></strong><span>，为各种复杂的多物理场问题提供解决方案</span><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span>2</span></span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span><span style=\\\"color: rgb(15, 17, 21);\\\">。其卓越之处在于能够分析从几 mTorr 的低压等离子体反应器到 15atm 的高压流体放电——</span><strong style=\\\"color: rgb(15, 17, 21);\\\"><span>仅需一个求解器即可</span></strong><span style=\\\"color: rgb(15, 17, 21);\\\">。该软件完全并行化，可用于执行具有复杂几何形状的大型 3D 仿真</span></span></span><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span>2</span></span><span>。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>核心组件</span></strong><span>：OverViz™ 仿真套件主要包括</span><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span>2</span></span><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VizGlow™</span></strong><span>：全耦合的非平衡等离子体求解器。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>VizSpark™</span></strong><span>：热等离子体模拟器。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>ChemZone™</span></strong><span>：快速的等离子体化学模拟器，并与广泛的化学数据库完全耦合。</span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>解决的行业挑战</span></strong><span>：等离子体模拟的用户常面临为特定问题选择正确模型、选择数值方法以及正确解释结果的挑战。OverViz™ 基于其二十年的仿真验证经验，在一个单一框架中容纳所有不同的物理特性，简化了这些复杂性，专注于解决半导体行业遇到的实际问题</span><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span><span style=\\\"color: rgb(15, 17, 21); background-color: rgb(255, 255, 255);\\\">。</span></span></span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>关键的客户受益</span></strong><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>半导体设备制造商</span></strong><span>：使用 OverViz™ 分析现有设备、改进工艺并开发新的设备概念</span><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span><span style=\\\"color: rgb(15, 17, 21); background-color: rgb(255, 255, 255);\\\">。</span></span></span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>集成电路制造商</span></strong><span>：利用其优化制造配方和工艺、识别并纠正工艺异常，以及设计新设备</span><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span><span style=\\\"color: rgb(15, 17, 21); background-color: rgb(255, 255, 255);\\\">。</span></span></span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>广泛的化学动力学支持</span></strong><span>：ChemZone™ 组件可用于快速探索半导体制造中的大型工艺参数空间，以及开发和验证新的有限速率化学动力学机制，这不仅适用于工艺等离子体，还适用于燃烧和其他气体化学动力学</span><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span><span style=\\\"color: rgb(15, 17, 21); background-color: rgb(255, 255, 255);\\\">。</span></span></span></p></li></ul><li style=\\\"\\\"><p style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>主要应用</span></strong><span style=\\\"vertical-align: middle; box-sizing: border-box; background: repeat rgb(235, 238, 242); min-width: 18px; height: 18px; font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; color: rgb(106, 111, 117); cursor: pointer; border-radius: 12px; display: inline-flex; top: -2px;\\\"><span><br/></span></span><span>：</span></p></li><ul style=\\\"\\\"><li><p style=\\\"\\\"><span style=\\\"\\\">半导体刻蚀和沉积工艺的深入仿真与分析。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><span style=\\\"\\\">优化制造配方和工艺。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><span style=\\\"\\\">识别和纠正工艺异常。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><span style=\\\"\\\">等离子体推进（例如航天领域）。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><span style=\\\"\\\">灰尘和等离子体行为模拟。</span></p></li><li style=\\\"\\\"><p style=\\\"\\\"><span style=\\\"\\\">激光等离子体模拟。</span></p></li></ul></ul><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><em><span style=\\\"\\\">表：Lam Research 虚拟制造软件产品对比</span></em></p><table style=\\\"border-collapse: collapse; width: max-content; max-width: max-content;\\\"><caption></caption><colgroup><col></col><col></col><col></col><col></col></colgroup><thead><tr><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">产品平台</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">核心技术焦点</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">主要功能</span></div></th><th style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.12); font-style: normal; font-variant-caps: normal; font-weight: 500; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; border-top-width: medium; border-top-style: none; border-top-color: currentcolor; text-align: left;\\\"><div><span style=\\\"\\\">解决的核心问题</span></div></th></tr></thead><tbody><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">SEMulator3D®</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">工艺与器件集成</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">虚拟的工艺步骤集成、3D器件结构构建、电性分析、制造变异预测</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">工艺整合性问题、器件性能评估、设计工艺协同优化（DTCO）</span></div></td></tr><tr><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">OverViz™</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><strong style=\\\"font-weight: 600;\\\"><span style=\\\"\\\">等离子体物理与化学</span></strong></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">高保真等离子体放电建模、多物理场耦合（电磁/流体/粒子）、化学反应模拟</span></div></td><td style=\\\"border-bottom-width: 1px; border-bottom-style: solid; border-bottom-color: rgba(0, 0, 0, 0.1); font-style: normal; font-variant-caps: normal; font-weight: 400; font-stretch: normal; font-size-adjust: none; font-kerning: auto; font-variant-alternates: normal; font-variant-ligatures: normal; font-variant-numeric: normal; font-variant-east-asian: normal; font-variant-position: normal; font-variant-emoji: normal; font-feature-settings: normal; font-optical-sizing: auto; font-variation-settings: normal; min-width: 100px; max-width: max(30vw, 320px);\\\"><div><span style=\\\"\\\">等离子体工艺机理研究、设备腔体设计优化、工艺配方深层分析</span></div></td></tr></tbody></table><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><strong style=\\\"font-weight: 600;\\\"><span>OverViz™ 与 SEMulator3D® 的协同效应</span></strong><span>：虽然 SEMulator3D® 擅长于快速模拟整个工艺流并查看宏观的集成结果，但 OverViz™ 提供了深入探究等离子体工艺内部物理和化学过程的“显微镜”。工程师可以先用 SEMulator3D® 识别出工艺中的问题，然后利用 OverViz™ 进行更深层的机理分析，找出根本原因并优化等离子体参数。两者结合，构成了从宏观集成到微观机理的完整虚拟仿真解决方案。</span></span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span><span><span style=\\\"font-weight: bold;\\\">6 Metior® 系列：量测与刻蚀的融合创新</span><br/>w</span></span></span></p><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/989f7e8dfa684b75a519404236d09b36\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span><span>产品定位：Metior 系列并非传统的独立式量测机台，而是代表了 Lam Research 将 “量测”（Metrology） 与 “刻蚀”（Etch） 工艺深度集成的核心技术理念。它是一种原位（In-Situ）计量系统，直接嵌入在刻蚀设备内部，能够在刻蚀过程中实时、不间断地监控被刻蚀材料的厚度和特性。<br/></span></span></span></p><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/8f521e9c57024f4d8d7f091b90654d55\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span><span>技术原理与核心能力：<br/><br/> 1. 原位实时监控：传统量测需要将晶圆从刻蚀设备中取出，送往独立的量测机台进行检测，然后再返回继续工艺。这不仅耗时，而且存在对准误差和颗粒污染的风险。Metior 系统通过在刻蚀反应腔内集成高精度传感器（如光学干涉仪、光谱椭圆仪等），在刻蚀过程中直接实时监测被刻蚀材料的厚度。<br/></span></span></span></p><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/0bfaec9f068546acb487de04e4c7b2ea\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span><span> 2. 高精度终点检测：其核心能力是终点检测（End Point Detection, EPD）。系统能够实时追踪刻蚀速率，并在刻蚀精确达到目标厚度（如恰好停止在所需的底层材料上）时，立即自动终止工艺。这实现了无与伦比的工艺控制精度和重复性，几乎消除了因过刻蚀（损伤下层材料）或欠刻蚀（残留未去除材料）导致的晶圆报废。<br/><br/> 3. 数据闭环反馈：Metior 系统收集的实时数据可以集成到 Lam 的整合式解决方案中，与 SEMulator3D® 等建模软件形成闭环，用于预测性维护和工艺窗口的优化，为实现智能制造提供关键数据支撑。<br/><br/>型号与应用：<br/><br/>· Metior® HX：高性能型号，提供了极高的计量精度和速度，适用于最苛刻的先进逻辑和存储芯片制造。<br/>· Metior® HXE：在 HX 基础上增强了某些性能，可能支持更广泛的材料体系或更严苛的工艺环境。<br/>· 应用：主要用于需要极高刻蚀停止控制精度的应用，例如：<br/>· 浅沟槽隔离（STI） 刻蚀到精确的深度。<br/>· 锗硅（SiGe） 通道的精确暴露于环绕栅极（GAA）晶体管制造。<br/>· 各种多层堆叠结构中的特定层刻蚀停止。<br/><br/>价值：Metior 技术极大提升了工艺的均匀性和重复性，是减少工艺变异、提升良率的关键技术，尤其在 3D NAND 和先进逻辑制程中不可或缺。<br/><br/><span style=\\\"font-weight: bold;\\\">7Dextro™：半导体设备维护的协作机器人</span><br/><br/>产品定位：Dextro 是 Lam Research 在 2024 年推出的首款专为半导体制造设备维护而设计的协作机器人（cobot）。它旨在自动化那些耗时、精密、重复性强且可能对人员有潜在危险的设备维护任务，从而最大限度地减少工具停机时间、提高生产一致性，并提升晶圆厂的安全性。<br/></span></span></span><br/></p><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/f63dc774f8704f45a385778743c311b6\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span><span>技术特点与核心能力：<br/><br/> 1. 移动协作平台：Dextro 是安装在推车上的移动式机器人，配备高精度机械臂和各种可互换的末端执行器（即“手”）。它被设计为与晶圆厂工程师协同工作，而非取代他们，由技术人员或工程师进行控制和管理。<br/><br/> 2. 超高精度操作：其机械臂和视觉系统能够执行远超人类手工精度的操作。例如，在安装和压缩耗材组件时，其精度是手动应用的两倍以上。<br/><br/> 3. 多重任务处理：Dextro 能够完成多项关键的设备维护任务：<br/>· 精密部件安装：精确安装和压缩耗材组件，确保子系统（如腔室耗材）装配良好，这有助于控制晶圆边缘的蚀刻性能，从而提高产量。<br/>· 高精度紧固：将真空密封的高精度螺栓拧紧到精确的规格，手动操作这类任务的错误率高达5%。精确的紧固可消除可能导致工具停产并影响芯片产量的腔室温度偏差。<br/>· 腔室清洁：使用自动化和清洁技术清除腔室内侧壁的聚合物积聚，而无需拆卸下腔室。这不仅减少了维护时间，也降低了人员操作的风险（传统方式需要佩戴重型防护呼吸设备）。<br/><br/>应用与部署：<br/><br/>· 当前支持：目前，Lam Research 的 Flex® G 和 H 系列电介质蚀刻设备都支持由 Dextro 进行维护。<br/>· 未来扩展：计划在 2025 年及以后进一步扩展到其他设备平台和应用。<br/>· 部署效益：根据 Lam Research 的介绍，Dextro 目前已部署在全球多个先进的晶圆厂。单个 Dextro 单元可以服务 Lam 设备中需要每月维护的 50 到 100 个腔室。它能显著提高首次正确（first-time-right, FTR） 的概率，减少维护错误，从而减少生产变异、提高产量，并降低成本和风险。<br/><br/>行业意义：Dextro 的出现解决了半导体制造业面临的一些关键挑战：设备复杂性增加、维护精度要求极高、熟练工程师人力短缺以及对生产一致性与良率的极致追求。它代表了半导体工厂运维自动化和智能化的重要发展方向。<br/><br/></span></span></span><br/></p><div><div style=\\\"display: inline-block;\\\"><img src=\\\":/5ebfb979e7494056b64813c8ab6400db\\\" type=\\\"image/jpeg\\\" data-filename=\\\"640.jpg\\\" style=\\\"--en-marks: %7B%22align%22%3A%22center%22%7D; height: auto; width: auto;\\\" width=\\\"auto\\\"/></div></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>Lam Research 的成功在于其近四十年来始终专注于核心技术、深刻理解客户挑战并通过持续创新与战略收购来提供价值解决方案。从开创性的 TCP 刻蚀源到智能化的 Sense.i 平台，从征服 3D NAND 的 DSiE 到定义铜互连标准的 SABRE 电镀机，再到 </span></span><strong style=\\\"\\\"><span>OverViz™ 和 SEMulator3D® 构成的数字化仿真利器</span></strong><span style=\\\"\\\"><span>，Lam 在半导体制造的</span></span><strong style=\\\"\\\"><span>硬件和软件</span></strong><span style=\\\"\\\"><span>关键环节均构筑了强大的技术壁垒和生态系统。</span></span><br/></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span>半导体产业正朝着更复杂的 3D 架构、新材料以及系统级异质集成的方向发展。Lam Research 已然做好了准备，其 </span><strong style=\\\"font-weight: 600;\\\"><span>OverViz™</span></strong><span> 等虚拟制造工具将继续帮助客户降低研发风险，加速创新周期，共同定义行业的下一次可能（Define Possible®）。</span></span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span><br/></span></span></p><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"></p><p style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0; text-transform: none; white-space: normal; word-spacing: 0; -webkit-tap-highlight-color: rgba(26,26,26,0.3); -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0; text-decoration: none; color: rgb(64,64,64); font-variant-ligatures: normal; orphans: 2; widows: 2; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">相关阅读：</span></p><p style=\\\"font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0; text-transform: none; white-space: normal; word-spacing: 0; -webkit-tap-highlight-color: rgba(26,26,26,0.3); -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0; text-decoration: none; color: rgb(64,64,64); font-variant-ligatures: normal; orphans: 2; widows: 2; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\">1.<a href=\\\"https://mp.weixin.qq.com/s?__biz=Mzg3MTU2ODM2Mg==&amp;mid=2247495274&amp;idx=1&amp;sn=1e8a1ac8e40c67d71d7737dba620d105&amp;scene=21#wechat_redirect\\\" target=\\\"_blank\\\">半导体量测龙头KLA公司全产品线解析</a></span></p><div style=\\\"caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-tap-highlight-color: rgba(26, 26, 26, 0.3); -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; text-decoration: none;\\\"><span>2.<a href=\\\"https://mp.weixin.qq.com/s?__biz=Mzg3MTU2ODM2Mg==&amp;mid=2247497094&amp;idx=1&amp;sn=8801c652611c932b2aac9d4d9ac9fc59&amp;scene=21#wechat_redirect\\\" target=\\\"_blank\\\">AMAT应用材料公司有半导体设备？</a></span></div><p style=\\\"color: rgb(15,17,21); font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0; text-transform: none; widows: 2; word-spacing: 0; -webkit-text-stroke-width: 0; white-space: normal; background-color: rgb(255,255,255); text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\\\"><span style=\\\"\\\"><span><br/></span></span><br/></p><div><span><br/></span></div></div></div><div><div><div><div style=\\\"display: flex; color: rgba(0,0,0,.3);\\\"><div style=\\\"color: rgba(0,0,0,.3);\\\">素材来源官方媒体/网络新闻</div></div></div></div></div></div></div></div></span>\\\n</div></body></html>\\u0000\"]],\"start1\":0,\"start2\":0,\"length1\":0,\"length2\":225721}]"
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